Signal processing circuit and semiconductor device including the signal processing circuit

ABSTRACT

Provided is a semiconductor device that can operate stably. All transistors included in the semiconductor device are transistors each of which contains an oxide semiconductor in a channel formation region. The transistor includes a front gate and a back gate. The threshold voltage of the transistor can be shifted in the positive direction or the negative direction depending on a potential applied to the back gate. To make the transistor in a conducting state, the threshold voltage is shifted in the negative direction to increase the amount of current flowing in the transistor, and to make the transistor in a non-conducting state, the threshold voltage is shifted in the positive direction to decrease the amount of current flowing in the transistor. A circuit of the semiconductor device that utilizes this effect and includes transistors all having the same polarity is formed.

BACKGROUND OF THE INVENTION

1. Field of the Invention

One embodiment of the present invention relates to a signal processingcircuit and a semiconductor device including the signal processingcircuit.

One embodiment of the present invention is not limited to the abovetechnical field. The technical field of the invention disclosed in thisspecification and the like relates to an object, a method, or amanufacturing method. One embodiment of the present invention relates toa process, a machine, manufacture, or a composition of matter.Specifically, examples of the technical field of one embodiment of thepresent invention disclosed in this specification include asemiconductor device, a display device, a liquid crystal display device,a light-emitting device, a power storage device, an imaging device, amemory device, a processor, an electronic device, a method for drivingany of them, a method for manufacturing any of them, a method fortesting any of them, and a system including any of them.

2. Description of the Related Art

In recent years, semiconductor devices such as central processing units(CPUs), memories, or display devices have been used in variouselectronic devices such as mobile phones, personal computers,vehicle-mounted devices, and digital cameras.

It has been especially proposed to use a transistor whose channelformation region is formed using an oxide semiconductor (hereinafter,also referred to as an “oxide semiconductor transistor” or an “OStransistor”) for circuits included in the semiconductor devices. Forexample, Patent Document 1 discloses a memory including a memory cellthat can retain data without power supply owing to the use of an OStransistor as a write transistor. This means that a memory including anOS transistor can be used as a nonvolatile memory.

REFERENCE Patent Document

-   [Patent Document 1] Japanese Published Patent Application No.    2011-187950

SUMMARY OF THE INVENTION

It is difficult to operate a transistor whose channel formation regionis formed using silicon (hereinafter, also referred to as a “silicontransistor” or a “Si transistor”) stably in high-temperatureenvironments. For example, electronic devices installed in automobiles,electronic devices used in summer, and the like might be especiallyaffected by high-temperature environments continuously, which might leadto malfunctions of the electronic devices.

Thus, semiconductor devices that can operate stably even inhigh-temperature environments are required.

An object of one embodiment of the present invention is to provide anovel semiconductor device. Another object of one embodiment of thepresent invention is to provide a memory device or a module includingthe novel semiconductor device. Another object of one embodiment of thepresent invention is to provide an electronic device using the memorydevice or the module including the novel semiconductor device. Anotherobject of one embodiment of the present invention is to provide a systemusing the memory device or the module including the novel semiconductordevice.

Another object of one embodiment of the present invention is to providea semiconductor device that can operate stably even in high-temperatureenvironments, a memory device including the semiconductor device, or amodule including the semiconductor device. Another object of oneembodiment of the present invention is to provide an electronic deviceincluding the memory device or the module. Another object of oneembodiment of the present invention is to provide a memory device or amodule with low power consumption.

Note that the objects of one embodiment of the present invention are notlimited to the above objects. The objects described above do notpreclude the existence of other objects. The other objects are the onesthat are not described above and will be described below. The otherobjects will be apparent from and can be derived from the description ofthe specification, the drawings, and the like by those skilled in theart. One embodiment of the present invention solves at least one of theabove objects and the other objects. One embodiment of the presentinvention does not necessarily solve all the above objects and the otherobjects.

(1) One embodiment of the present invention is a signal processingcircuit including first to (2^(n)−1)-th functional circuits (n is aninteger greater than or equal to 1), first to n-th wirings A, and firstto n-th wirings B. Each of the first to (2^(n)−1)-th functional circuitsincludes a first terminal, a second terminal, a third terminal, a fourthterminal, and a fifth terminal. The first terminal of the h-thfunctional circuit (h is an integer greater than or equal to 1 and lessthan or equal to (2^(n−1)−1)) is electrically connected to the thirdterminal of the 2h-th functional circuit. The second terminal of theh-th functional circuit is electrically connected to the third terminalof the (2h+1)-th functional circuit. The fourth terminal of each of the2^(i−1)-th to (2^(i)−1)-th functional circuits (i is an integer greaterthan or equal to 1 and less than or equal to n) is electricallyconnected to the i-th wiring A. The fifth terminal of each of the2^(i−1)-th to (2^(i)−1)-th functional circuits is electrically connectedto the i-th wiring B. One of a high-level potential and a low-levelpotential is input to each of the first to n-th wirings A and the otherof the high-level potential and the low-level potential is input to eachof the first to n-th wirings B. The first to (2^(n)−1)-th functionalcircuits are each configured to electrically connect the third terminalto the first terminal and not to electrically connect the third terminaland the second terminal when the high-level potential is input to thefourth terminal. The first to (2^(n)−1)-th functional circuits are eachconfigured to electrically connect the third terminal to the secondterminal and not to electrically connect the third terminal and thefirst terminal when the low-level potential is input to the fourthterminal. The first to (2^(n)−1)-th functional circuits are eachconfigured not to cause a voltage drop between the first terminal andthe third terminal or between the second terminal and the thirdterminal.

(2) One embodiment of the present invention is the signal processingcircuit according to (1), in which the first to (2^(n)−1)-th functionalcircuits each include a first transistor and a second transistor. Thefirst transistors and the second transistors each include a first gateand a second gate. In each of the first to (2^(n)−1)-th functionalcircuits, the third terminal is electrically connected to a firstterminal of the first transistor and a first terminal of the secondtransistor, the first terminal is electrically connected to a secondterminal of the first transistor, the second terminal is electricallyconnected to a second terminal of the second transistor, the fourthterminal is electrically connected to the first gate of the firsttransistor, the fifth terminal is electrically connected to the firstgate of the second transistor, the second gate of the first transistoris electrically connected to the first gate of the first transistor, andthe second gate of the second transistor is electrically connected tothe first gate of the second transistor.

(3) One embodiment of the present invention is the signal processingcircuit according to (2), in which the first transistors and the secondtransistors have the same polarity.

(4) One embodiment of the present invention is the signal processingcircuit according to any one of (1) to (3) from which r functionalcircuits (r is an integer greater than or equal to 1 and less than orequal to (2^(n)−2^(n−1)−1)) are removed. The r functional circuits aredirectly and/or indirectly connected to the second terminal of the firstfunctional circuit. At least one of the r functional circuits is one ofthe (2^(n)−2^(n−2))-th to (2^(n)−1)-th functional circuits. A nodeelectrically connected to the third terminal of any of the r functionalcircuits is electrically connected to one of a node electricallyconnected to the first terminal of the any of the r functional circuitsand a node electrically connected to the second terminal of the any ofthe r functional circuits. A functional circuit electrically connectedto the other of the node electrically connected to the first terminal ofthe any of the r functional circuits and the node electrically connectedto the second terminal of the any of the r functional circuits directlyand/or indirectly is removed as part of the r functional circuits.

(5) One embodiment of the present invention is a signal processingcircuit including first to (2^(m)−1)-th functional circuits A (m is aninteger greater than or equal to 1), first to (2^(n)−2^(m))-thfunctional circuits B (n is an integer greater than m), first to n-thwirings A, and first to n-th wirings B. Each of the first to(2^(m)−1)-th functional circuits A includes a first terminal, a secondterminal, a third terminal, a fourth terminal, and a fifth terminal.Each of the first to (2^(n)−2^(m))-th functional circuits B includes asixth terminal, a seventh terminal, an eighth terminal, a ninthterminal, and a tenth terminal. The first terminal of the f-thfunctional circuit A (f is an integer greater than or equal to 1 andless than or equal to (2^(m−1)−1)) is electrically connected to thethird terminal of the 2f-th functional circuit A. The second terminal ofthe f-th functional circuit A is electrically connected to the thirdterminal of the (2f+1)-th functional circuit A. The first terminal ofthe g-th functional circuit A (g is an integer greater than or equal to2^(m−1) and less than or equal to (2^(m)−1)) is electrically connectedto the eighth terminal of the (2g−2^(m)+1)-th functional circuit B. Thesecond terminal of the g-th functional circuit A is electricallyconnected to the eighth terminal of the (2g−2^(m)+2)-th functionalcircuit B. The sixth terminal of the {h−(2^(m)−1)}-th functional circuitB (h is an integer greater than or equal to 2^(k−1) and less than orequal to (2^(k)−1), where k is an integer greater than m and less thanor equal to (n−1)) is electrically connected to the eighth terminal ofthe (2h−2^(m)+1)-th functional circuit B. The seventh terminal of the{h−(2^(m)−1)}-th functional circuit B is electrically connected to theeighth terminal of the (2h−2^(m)+2)-th functional circuit B. The fourthterminal of each of the 2^(i−1)-th to (2^(i)−1)-th functional circuits A(i is an integer greater than or equal to 1 and less than or equal to m)is electrically connected to the i-th wiring A. The fifth terminal ofeach of the 2^(i−1)-th to (2^(i)−1)-th functional circuits A iselectrically connected to the i-th wiring B. The ninth terminal of eachof the (2^(j−1)−2^(m)+1)-th to (2^(j)−2^(m))-th functional circuits B (jis an integer greater than m and less than or equal to n) iselectrically connected to the j-th wiring A. The tenth terminal of eachof the (2^(j−1)−2^(m)+1)-th to (2^(j)−2^(m))-th functional circuits B iselectrically connected to the j-th wiring B. One of a high-levelpotential and a low-level potential is input to each of the first ton-th wirings A and the other of the high-level potential and thelow-level potential is input to each of the first to n-th wirings B. Thefirst to (2^(m)−1)-th functional circuits A are each configured toelectrically connect the third terminal to the first terminal and not toelectrically connect the third terminal to the second terminal when thehigh-level potential is input to the fourth terminal. The first to(2^(m)−1)-th functional circuits A are each configured to electricallyconnect the third terminal to the second terminal and not toelectrically connect the third terminal to the first terminal when thelow-level potential is input to the fourth terminal. The first to(2^(n)−2^(m))-th functional circuits B are each configured toelectrically connect the eighth terminal to the sixth terminal and notto electrically connect the eighth terminal to the seventh terminal whenthe high-level potential is input to the ninth terminal. The first to(2^(n)−2^(m))-th functional circuits B are each configured toelectrically connect the eighth terminal to the seventh terminal and notto electrically connect the eighth terminal to the sixth terminal whenthe low-level potential is input to the ninth terminal. The first to(2^(m)−1)-th functional circuits A are each configured not to cause avoltage drop between the first terminal and the third terminal orbetween the second terminal and the third terminal. The first to(2^(n)−2^(m))-th functional circuits B are each configured not to causea voltage drop between the sixth terminal and the eighth terminal orbetween the seventh terminal and the eighth terminal.

(6) One embodiment of the present invention is the signal processingcircuit according to (5), in which the first to (2^(m)−1)-th functionalcircuits A each include a first transistor and a second transistor andthe first to (2^(n)−2^(m))-th functional circuits B each include a thirdtransistor and a fourth transistor. The first transistors, the secondtransistors, the third transistors, and the fourth transistors eachinclude a first gate and a second gate. In each of the first to(2^(m)−1)-th functional circuits A, the third terminal is electricallyconnected to a first terminal of the first transistor and a firstterminal of the second transistor, the first terminal is electricallyconnected to a second terminal of the first transistor, the secondterminal is electrically connected to a second terminal of the secondtransistor, the fourth terminal is electrically connected to the firstgate of the first transistor, and the fifth terminal is electricallyconnected to the first gate of the second transistor. In each of thefirst to (2^(n)−2^(m))-th functional circuits B, the eighth terminal iselectrically connected to a first terminal of the third transistor and afirst terminal of the fourth transistor, the sixth terminal iselectrically connected to a second terminal of the third transistor, theseventh terminal is electrically connected to a second terminal of thefourth transistor, the ninth terminal is electrically connected to thefirst gate of the third transistor, the tenth terminal is electricallyconnected to the first gate of the fourth transistor, the second gate ofthe third transistor is electrically connected to the first gate of thethird transistor, and the second gate of the fourth transistor iselectrically connected to the first gate of the fourth transistor.

(7) One embodiment of the present invention is the signal processingcircuit according to (6), in which the first transistors, the secondtransistors, the third transistors, and the fourth transistors includedin the functional circuits have the same polarity.

(8) One embodiment of the present invention is the signal processingcircuit according to any one of (5) to (7) from which p functionalcircuits A (p is an integer greater than or equal to 0) and q functionalcircuits B (q is an integer that satisfies r=p+q, where r is an integergreater than or equal to 1 and less than or equal to (2^(n)−2^(n−1)−1))are removed. The p functional circuits A and the q functional circuits Bare directly and/or indirectly connected to the second terminal of thefirst functional circuit A. At least one of the q functional circuits Bis one of the (2^(n)−2^(n−2)−2^(m)+1)-th to (2^(n)−2^(m))-th functionalcircuits B. A node electrically connected to the third terminal of anyof the p functional circuits A is electrically connected to one of anode electrically connected to the first terminal of the any of the pfunctional circuits A and a node electrically connected to the secondterminal. A functional circuit electrically connected to the other ofthe node electrically connected to the first terminal of the any of ther functional circuits and the node electrically connected to the secondterminal of the any of the p functional circuits A directly and/orindirectly is removed as part of the p functional circuits A and/or partof the q functional circuits B. A node electrically connected to theeighth terminal of any of the q functional circuits B is electricallyconnected to one of a node electrically connected to the sixth terminalof the any of the q functional circuits B and a node electricallyconnected to the seventh terminal of the any of the q functionalcircuits B. A functional circuit electrically connected to the other ofthe node electrically connected to the sixth terminal of the any of theq functional circuits B and the node electrically connected to theseventh terminal of the any of the q functional circuits B directlyand/or indirectly is removed as part of the q functional circuits B.

(9) One embodiment of the present invention is a signal processingcircuit including a first functional circuit, a second functionalcircuit, a first wiring, a second wiring, a third wiring, a fourthwiring, a fifth wiring, and a sixth wiring. The functional circuitincludes a first terminal, a second terminal, a third terminal, a firsttransistor, and a second transistor. The second functional circuitincludes a fourth terminal, a fifth terminal, a sixth terminal, a thirdtransistor, and a fourth transistor. Each of the first transistor, thesecond transistor, the third transistor, and the fourth transistor has adual-gate structure and includes a first gate and a second gate. Thefirst transistor, the second transistor, the third transistor, and thefourth transistor have the same polarity. One of a source and a drain ofthe first transistor is electrically connected to the first terminal.One of a source and a drain of the second transistor is electricallyconnected to the second terminal. The other of the source and the drainof the first transistor is electrically connected to the third terminal.The other of the source and the drain of the second transistor iselectrically connected to the third terminal. The first gate of thefirst transistor is electrically connected to the first wiring. Thefirst gate of the second transistor is electrically connected to thesecond wiring. The second gate of the first transistor is electricallyconnected to the third wiring. The second gate of the second transistoris electrically connected to the fourth wiring. One of a source and adrain of the third transistor is electrically connected to the fourthterminal. One of a source and a drain of the fourth transistor iselectrically connected to the fifth terminal. The other of the sourceand the drain of the third transistor is electrically connected to thesixth terminal. The other of the source and the drain of the fourthtransistor is electrically connected to the sixth terminal. The firstgate of the third transistor is electrically connected to the fifthwiring. The first gate of the fourth transistor is electricallyconnected to the sixth wiring. The second gate of the third transistoris electrically connected to the fifth wiring. The second gate of thefourth transistor is electrically connected to the sixth wiring. Thesixth terminal is electrically connected to one of the first terminaland the second terminal. An inverted signal of a signal input to thesecond wiring is input to the first wiring. An inverted signal of asignal input to the sixth wiring is input to the fifth wiring. Apotential for changing a threshold voltage of the first transistor isapplied to the third wiring. A potential for changing a thresholdvoltage of the second transistor is applied to the fourth wiring.

(10) One embodiment of the present invention is a signal processingcircuit including a functional circuit, a first wiring, a second wiring,a third wiring, and a fourth wiring. The functional circuit includes afirst terminal, a second terminal, a third terminal, a first transistor,and a second transistor. Each of the first transistor and the secondtransistor has a dual-gate structure and includes a first gate and asecond gate. The first transistor and the second transistor have thesame polarity. One of a source and a drain of the first transistor iselectrically connected to the first terminal. One of a source and adrain of the second transistor is electrically connected to the secondterminal. The other of the source and the drain of the first transistoris electrically connected to the third terminal. The other of the sourceand the drain of the second transistor is electrically connected to thethird terminal. The first gate of the first transistor is electricallyconnected to the first wiring. The first gate of the second transistoris electrically connected to the second wiring. The second gate of thefirst transistor is electrically connected to the third wiring. Thesecond gate of the second transistor is electrically connected to thefourth wiring. An inverted signal of a signal input to the second wiringis input to the first wiring. A potential for changing a thresholdvoltage of the first transistor is applied to the third wiring. Apotential for changing a threshold voltage of the second transistor isapplied to the fourth wiring.

(11) One embodiment of the present invention is a signal processingcircuit including a functional circuit, a first wiring, and a secondwiring. The functional circuit includes a first terminal, a secondterminal, a third terminal, a first transistor, and a second transistor.Each of the first transistor and the second transistor has a dual-gatestructure and includes a first gate and a second gate. The firsttransistor and the second transistor have the same polarity. One of asource and a drain of the first transistor is electrically connected tothe first terminal. One of a source and a drain of the second transistoris electrically connected to the second terminal. The other of thesource and the drain of the first transistor is electrically connectedto the third terminal. The other of the source and the drain of thesecond transistor is electrically connected to the third terminal. Thefirst gate of the first transistor is electrically connected to thefirst wiring. The first gate of the second transistor is electricallyconnected to the second wiring. The second gate of the first transistoris electrically connected to the first wiring. The second gate of thesecond transistor is electrically connected to the second wiring. Aninverted signal of a signal input to the second wiring is input to thefirst wiring.

(12) One embodiment of the present invention is a semiconductor deviceincluding the signal processing circuit according to any one of (1) to(11), a display element, and a driver circuit.

(13) One embodiment of the present invention is a semiconductor deviceincluding the signal processing circuit according to any one of (1) to(11), a photoelectric conversion element, and a driver circuit.

(14) One embodiment of the present invention is a semiconductor deviceincluding the signal processing circuit according to any one of (1) to(11), a memory cell, and a driver circuit.

(15) One embodiment of the present invention is the semiconductor deviceaccording to (14) in which a transistor included in the driver circuitand the first transistor have the same polarity.

(16) One embodiment of the present invention is the semiconductor deviceaccording to (15) in which a channel formation region of the transistorincluded in the driver circuit contains an oxide semiconductor.

One embodiment of the present invention can provide a novelsemiconductor device. Another embodiment of the present invention canprovide a memory device or a module including the novel semiconductordevice. Another embodiment of the present invention can provide anelectronic device using the memory device or the module including thenovel semiconductor device. Another embodiment of the present inventioncan provide a system using the memory device or the module including thenovel semiconductor device.

Another embodiment of the present invention can provide a semiconductordevice that can operate stably even in high-temperature environments, amemory device including the semiconductor device, or a module includingthe semiconductor device. Another embodiment of the present inventioncan provide an electronic device including the memory device or themodule. Another embodiment of the present invention can provide a memorydevice or a module with low power consumption.

Note that the effects of one embodiment of the present invention are notlimited to the above effects. The effects described above do notpreclude the existence of other effects. The other effects are the onesthat are not described above and will be described below. The othereffects will be apparent from and can be derived from the description ofthe specification, the drawings, and the like by those skilled in theart.

One embodiment of the present invention has at least one of the aboveeffects and the other effects. Therefore, one embodiment of the presentinvention does not have the effects described above in some cases.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram illustrating a configuration example of amemory device.

FIG. 2 is a block diagram illustrating a configuration example of amemory cell array.

FIG. 3 is a schematic diagram showing the current-voltagecharacteristics of a transistor.

FIGS. 4A to 4D are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIGS. 5A to 5D are top views and a cross-sectional view of a memory cellarray.

FIGS. 6A to 6E are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 7A is a timing chart showing an operation example for the circuitdiagram in FIG. 6A, and FIG. 7B is a timing chart showing an operationexample for the circuit diagram in FIG. 6C.

FIG. 8 is a timing chart showing an operation example for the circuitdiagram in FIG. 6D.

FIG. 9 is a block diagram illustrating a configuration example of asemiconductor device.

FIGS. 10A and 10B are circuit diagrams each illustrating a configurationexample of a semiconductor device.

FIG. 11 is a block diagram illustrating a configuration example of asemiconductor device.

FIG. 12 is a block diagram illustrating a configuration example of asemiconductor device.

FIG. 13 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIG. 14 is a block diagram illustrating a configuration example of asemiconductor device.

FIG. 15 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIG. 16 is a timing chart showing an operation example for the circuitdiagram in FIG. 15.

FIG. 17 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIG. 18 is a timing chart showing an operation example for the circuitdiagram in FIG. 17.

FIGS. 19A and 19B are a block diagram and a circuit diagram illustratinga configuration example of a semiconductor device.

FIGS. 20A to 20C are block diagrams and a circuit diagram illustrating aconfiguration example of a semiconductor device.

FIG. 21 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIG. 22 is a circuit diagram illustrating a configuration example of asemiconductor device.

FIGS. 23A to 23C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 24A to 24C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 25A to 25C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 26A to 26C each illustrate an atomic ratio range of an oxide.

FIG. 27 illustrates an InMZnO₄ crystal.

FIGS. 28A to 28C are band diagrams of stacked-layer structures ofoxides.

FIGS. 29A to 29C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIG. 30A is a cross-sectional view illustrating a structure example of atransistor and FIG. 30B is an energy band diagram of the transistor.

FIGS. 31A and 31B are cross-sectional views illustrating oxygendiffusion paths.

FIGS. 32A to 32C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 33A to 33C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 34A to 34C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 35A to 35C are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 36A to 36D are a top view and cross-sectional views illustrating astructure example of a transistor.

FIGS. 37A and 37B are a top view and a cross-sectional view illustratinga structure example of a transistor.

FIGS. 38A and 38B are cross-sectional views illustrating a structureexample of a memory cell.

FIGS. 39A and 39B are cross-sectional views illustrating a structureexample of a memory cell.

FIGS. 40A and 40B are cross-sectional views illustrating a structureexample of a memory cell.

FIGS. 41A and 41B are cross-sectional views illustrating a structureexample of a memory cell.

FIGS. 42A to 42E show structural analysis results of a CAAC-OS and asingle crystal oxide semiconductor by XRD and selected-area electrondiffraction patterns of a CAAC-OS.

FIGS. 43A to 43E show a cross-sectional TEM image and plan-view TEMimages of a CAAC-OS and images obtained through analysis thereof.

FIGS. 44A to 44D show electron diffraction patterns and across-sectional TEM image of an nc-OS.

FIGS. 45A and 45B show cross-sectional TEM images of an a-like OS.

FIG. 46 shows a change in crystal part of an In—Ga—Zn oxide induced byelectron irradiation.

FIG. 47A is a flow chart illustrating manufacturing steps of anelectronic component and FIG. 47B is a perspective view illustrating theelectronic component.

FIGS. 48A to 48H are perspective views illustrating electronic devices.

FIGS. 49A to 49E are perspective views illustrating electronic devices.

FIGS. 50A to 50F are perspective views illustrating application examplesof an RF tag.

DETAILED DESCRIPTION OF THE INVENTION

An “electronic device,” an “electronic component,” a “module,” and a“semiconductor device” are described. In general, an “electronic device”may include a personal computer, a mobile phone, a tablet terminal, ane-book reader, a wearable terminal, an audiovisual (AV) device, anelectronic appliance, a household appliance, an industrial appliance, adigital signage, a car, or an electric appliance including a system, forexample. An “electronic component” or a “module” may include aprocessor, a memory device, a sensor, a battery, a display device, alight-emitting device, an interface device, a radio frequency (RF) tag,a receiver, a transmitter, or the like included in an electronic device.A “semiconductor device” may include a device including a semiconductorelement or a driver circuit, a control circuit, a logic circuit, asignal generation circuit, a signal converter circuit, a potential levelconverter circuit, a voltage source, a current source, a switchingcircuit, an amplifier circuit, a memory circuit, a memory cell, adisplay circuit, a display pixel, or the like which includes asemiconductor element and is included in an electronic component or amodule.

Note that the above categorization is one example, and an “electronicdevice,” an “electronic component,” a “module,” and a “semiconductordevice” in this specification and the like are not limited by the abovecategorization. An “electronic device,” an “electronic component,” a“module,” and a “semiconductor device” cannot be strictly distinguishedfrom one another in some cases because distinctions between them arevague depending on roles, functions, components, use states,definitions, and the like thereof. For example, although a displaydevice is defined above as an “electronic component” or a “module,” thedisplay device may be defined as an “electronic device” in the casewhere the display device is an electronic appliance such as a televisionreceiver. Although a memory circuit is defined above as a “semiconductordevice,” the memory circuit may be defined as an “electronic component”or a “module” in the case where the memory circuit is regarded as onekind of memory devices. In the case where a “semiconductor device” isdefined as a device including a semiconductor element, for example, an“electronic device,” an “electronic component,” and a “module” includingsemiconductor elements can each be regarded as a “semiconductor device.”

Accordingly, an “electronic device” described in this specification canbe called an “electronic component,” a “module,” or a “semiconductordevice” in some cases. Similarly, an “electronic component” described inthis specification can be called an “electronic device,” a “module,” ora “semiconductor device” in some cases. A “module” described in thisspecification can be called an “electronic device,” an “electroniccomponent,” or a “semiconductor device” in some cases. A “semiconductordevice” described in this specification can be called an “electronicdevice,” an “electronic component,” or a “module” in some cases.

(Embodiment 1)

In this embodiment, a memory device of one embodiment of the disclosedinvention will be described.

<Memory Device>

FIG. 1 illustrates a memory device of one embodiment of the presentinvention. A memory device 100 includes a memory cell array 110, a rowdriver 120, a row decoder 130, a row address latch circuit 140, a senseamplifier/precharge circuit 150, a data selector/column decoder 160, acolumn address latch circuit 170, a control circuit 180, and a back gatevoltage control circuit 190.

The control circuit 180 is electrically connected to the row addresslatch circuit 140 and the column address latch circuit 170. The rowaddress latch circuit 140 is electrically connected to the row decoder130. The row decoder 130 is electrically connected to the memory cellarray 110 through the row driver 120. The column address latch circuit170 is electrically connected to the data selector/column decoder 160.The data selector/column decoder 160 is electrically connected to thememory cell array 110 through the sense amplifier/precharge circuit 150.

The back gate voltage control circuit 190 is electrically connected tothe memory cell array 110, the row driver 120, the row decoder 130, therow address latch circuit 140, the sense amplifier/precharge circuit150, the data selector/column decoder 160, the column address latchcircuit 170, and the control circuit 180. Note that the number ofwirings that connect the back gate voltage control circuit 190 to thememory cell array 110 depends on the number of rows and columns of thememory cell array 110 and the configuration of a memory cell. Although aplurality of wirings that connect the back gate voltage control circuit190 to the memory cell array 110 extend in the row and column directionsin FIG. 1, the wirings may extend in one of the row and columndirections, depending on the memory cell array 110.

The back gate voltage control circuit 190 has a function of reading acommand included in an input signal 181 that is input to the controlcircuit 180 and applying potentials corresponding to the command to backgates of transistors included in circuits. Note that the commandincluded in the input signal 181 is not necessarily used; the back gatevoltage control circuit 190 may have a function of reading outputsignals of circuits and applying potentials corresponding to the outputsignals to back gates of transistors included in circuits that areoutput destinations. Specifically, for example, an output signal of therow address latch circuit 140 that is transmitted to the row decoder 130can be input to the back gate voltage control circuit 190, so that apotential corresponding to the output signal can be applied to backgates of transistors included in the row decoder 130.

Note that a plurality of wirings extend to the memory cell array 110 inthe row direction, and each of the wirings electrically connects thememory cell array 110 to the row driver 120. In addition, a plurality ofwirings extend to the memory cell array 110 in the column direction, andeach of the wirings electrically connects the memory cell array 110 tothe sense amplifier/precharge circuit 150.

FIG. 2 illustrates the details of the memory cell array 110. The memorycell array 110 includes m memory cells 300 (m is an integer greater thanor equal to 1) in a column and n memory cells 300 (n is an integergreater than or equal to 1) in a raw. That is, m×n memory cells 300 arearranged in a matrix. The addresses of the memory cells 300 are alsoshown in FIG. 2. FIG. 2 illustrates memory cells at [1, 1], [m, 1], [i,j], [1, n], and [m, n] (i is an integer greater than or equal to 1 andless than or equal to m, and j is an integer greater than or equal to 1and less than or equal to n). Note that the number of the wirings (rowlines) that connect the memory cell array 110 to the row driver 120depends on the configuration of the memory cell 300, the number of thememory cells 300 in a column, and the like. Furthermore, the number ofthe wirings (column lines) that connect the memory cell array 110 to thesense amplifier/precharge circuit 150 depends on the configuration ofthe memory cell 300, the number of the memory cells 300 in a row, andthe like.

When data is written to or read from the memory device 100, the inputsignal 181 is input to the control circuit 180. When data is read fromthe memory device 100, an output signal 186 is output from the dataselector/column decoder 160.

In the case of accessing data retained in the memory device 100, asignal, row address strobe (RAS) 183, is transmitted from the controlcircuit 180 to the row address latch circuit 140 and then the inputsignal 181 is transmitted to the row address latch circuit 140, tospecify the row address of a memory cell to be accessed. Accordingly,the row address latch circuit 140 can determine a row address 182included in the input signal 181. Then, a signal, column address strobe(CAS) 185, is transmitted from the control circuit 180 to the columnaddress latch circuit 170 and then the input signal 181 is transmittedto the column address latch circuit 170, to specify the column addressof the memory cell to be accessed. Accordingly, the column address latchcircuit 170 can determine a column address 184 included in the inputsignal 181.

<Transistor>

Before the descriptions of the circuits included in the memory device ofone embodiment of the present invention, transistors included in thecircuits will be described.

The transistors used in the memory device of one embodiment of thepresent invention are all n-channel transistors. Thus, the memory deviceof one embodiment of the present invention does not include a CMOScircuit.

For the driving of the memory device of one embodiment of the presentinvention, n-channel transistors with dual-gate structures are used. Tooperate the memory device, a potential applied to a back gate of atransistor included in a driver circuit is adjusted as appropriatedepending on the driver circuit or a signal input to the driver circuit.Owing to the above principles, a memory device in which all transistorsare n-channel transistors can be obtained.

FIG. 3 is a schematic diagram showing the current-voltagecharacteristics of a transistor described in this embodiment. FIG. 3shows current-voltage characteristics (the longitudinal axis representsdrain-source current I_(ds) and the lateral axis represents gate-sourcevoltage V_(gs)) when a potential Φ₀, Φ₁, or Φ₂ is applied to a back gateof a transistor Tr. In FIG. 3, the transistor Tr whose back gate issupplied with the potential Φ₀ is denoted by Tr[Φ₀], and similarly, thetransistor Tr whose back gate is supplied with the potential Φ₁ and thetransistor Tr whose back gate is supplied with the potential Φ₂ aredenoted by Tr[Φ₁] and Tr[Φ₂], respectively. Note that as for thepotentials applied to the back gate, Φ₂>Φ₁>Φ₀ is satisfied.

In a circuit that requires high on-state current, the potential Φ₂ isapplied to the back gate of the transistor Tr so that thecurrent-voltage characteristics shift in the negative direction(hereinafter, a transistor in such a state is also referred to as adepletion transistor). In a circuit that requires low off-state current,the potential Φ₀ is applied to the back gate of the transistor Tr sothat the current-voltage characteristics shift in the positive direction(hereinafter, a transistor in such a state is also referred to as anenhancement transistor).

<Memory Cell>

Examples of memory cells included in the memory device of one embodimentof the present invention will be described with reference to FIGS. 4A to4D.

<<1T1C Memory Cell>>

FIG. 4A illustrates a 1T1C memory cell. A memory cell 301 includes atransistor Tr1 and a capacitor C1.

A first terminal of the transistor Tr1 is electrically connected to afirst terminal of the capacitor C1. A second terminal of the transistorTr1 is electrically connected to a wiring BL. A gate of the transistorTr1 is electrically connected to a wiring WL. A second terminal of thecapacitor C1 is electrically connected to a wiring VSS through which alow power supply potential is applied. A back gate of the transistor Tr1is electrically connected to a wiring BG1.

A node ND1 that serves as a data retention portion is positioned betweenthe first terminal of the transistor Tr1 and the first terminal of thecapacitor C1. The transistor Tr1 functions as a switch that connects thenode ND1 to the wiring BL. The wiring BL functions as a bit line to/fromwhich a writing signal and a reading signal are input/output. A memorycell selection signal is input to the wiring WL.

When the memory cell 301 performs writing or reading operation, thetransistor Tr1 preferably operates with the current-voltagecharacteristics of the transistor Tr[Φ₂]. In other words, a potential atwhich the transistor Tr1 operates with the current-voltagecharacteristics of the transistor Tr[Φ₂] is preferably applied from thewiring BG1 to the back gate of the transistor Tr1. Furthermore, when thememory cell 301 does not perform writing or reading operation, thetransistor Tr1 preferably operates with the current-voltagecharacteristics of the transistor Tr[Φ₀]. In other words, a potential atwhich the transistor Tr1 operates with the current-voltagecharacteristics of the transistor Tr[Φ₀] is preferably applied from thewiring BG1 to the back gate of the transistor Tr1.

As described above, when a predetermined potential is applied to theback gate of the transistor Tr1, the conducting/non-conducting state ofthe transistor Tr1 or the amount of current flowing in the transistorTr1 can be determined.

Here, an example of a memory cell array formed using the memory cells301 is described. FIGS. 5A to 5C are top views of the memory cell arrayin which the memory cells 301 are laid on a supporting substrate. FIG.5D is a cross-sectional view taken along a dashed-dotted line B1-B2 inFIGS. 5A to 5C. FIG. 5A is a top view illustrating a structure below adashed-dotted line D1-D2 in FIG. 5D, FIG. 5B is a top view illustratinga structure below a dashed-dotted line D3-D4 in FIG. 5D, and FIG. 5C isa top view illustrating a structure below a dashed-dotted line D5-D6 inFIG. 5D.

Note that FIGS. 5A to 5C do not illustrate a substrate 311 and asemiconductor 312 described later. In FIG. 5D, a region with a hatchingpattern shows any of the substrate 311, the semiconductor 312, and aconductor such as a wiring, and a region with no hatching pattern showsan insulator. Note that the insulator consists of stacked insulatingfilms. Thus, in the description for FIGS. 5A to 5D in thisspecification, the expression “over an insulating film” means theexpression “over any one of the insulating films included in theinsulator.”

In FIGS. 5A and 5D, the wiring BG1 is over the substrate 311, thesemiconductor 312 is in a region overlapping with the wiring BG1 with aninsulating film positioned therebetween, a conductor 313 a is over aninsulating film and in a region in contact with the semiconductor 312,and a conductor 313 b is over an insulating film and in a region incontact with the semiconductor 312. Note that the wiring BG1 functionsnot only as a wiring but also as a bottom gate electrode, the conductor313 a functions as one of a source electrode and a drain electrode of atransistor, and the conductor 313 b functions as the other of the sourceelectrode and the drain electrode of the transistor. Thus, the conductor313 a does not include a region in contact with the conductor 313 b. Aconductor 314 a is over the conductor 313 a, and a conductor 314 b isover the conductor 313 b. The conductor 314 a and the conductor 314 beach function as a contact wiring between layers.

In FIGS. 5B and 5D, the wiring WL is in a region overlapping with thesemiconductor 312 with an insulating film positioned therebetween. Thewiring WL functions not only as a wiring but also as a top gateelectrode. The wiring WL, the conductor 313 a, the conductor 313 b, thesemiconductor 312, and the wiring BG1 can form the transistor Tr1. InFIG. 5B, the wiring WL extends in the direction inclined at an anglegreater than 0° and less than 90° toward the dashed-dotted line B1-B2.When the wiring WL is placed in this manner, a large number of thememory cells 301 can be arranged as compared to the case where thewiring WL extends perpendicularly to the dashed-dotted line B1-B2.

In FIGS. 5C and 5D, the wiring BL is over the conductor 313 b. In FIG.5C, the wiring BL extends perpendicularly to the wiring WL. Note thatone embodiment of the present invention is not limited to thisconfiguration example; the wiring BL may extend in the directioninclined at an angle greater than 0° and less than 90° toward the wiringWL.

In FIG. 5D, a conductor 315 is over the conductor 314 a, and a conductor316 is in a region overlapping with the conductor 315 with an insulatingfilm positioned therebetween and over a predetermined insulating film.The conductor 315 and the conductor 316 overlapping with the conductor315 with an insulating film positioned therebetween form the trenchcapacitor C1. Thus, the conductor 315 functions as one electrode of thecapacitor C1, and the conductor 316 in the region overlapping with theconductor 315 with an insulating film positioned therebetween functionsas the other electrode of the capacitor C1. The conductor 316 mayfunction as, instead of the electrode of the capacitor C1, a wiring thatis connected to another capacitor. In that case, the conductor 316 mayfunction as an electrode of the another capacitor.

Described here is the case where a technology node (design rule) of thememory cell array illustrated in FIGS. 5A to 5D is 30 nm.

Table 1 shows the size of the memory cell, the capacitance and theheight of the capacitor C1, and the size of the transistor when thetechnology node is 30 nm. The channel length (L in Table 1) and thechannel width (W in Table 1) of the transistor Tr1 are each 30 nm. Thesize of the memory cell (corresponding to a rectangle formed of thindotted lines in FIG. 5A) is 0.064 μm×0.096 μm. Thus, the area of eachmemory cell is 0.00614 μm². The capacitance of the capacitor C1 is 2.0fF.

TABLE 1 Memory Cell Area 0.00614 μm² (0.064 μm × 0.096 μm) 6F² (F = 36.5nm) Capacitor Capacitance 2.0 fF Height 1.75 μm when 10 nm thick, ε_(r)= 20 FET L/W 30 nm/30 nm

In the case of fabricating the memory cell array in FIGS. 5A to 5D withthe above technology node, it is preferable that a width WdBL of thewiring BL be 32 nm, a width WdWL of the wiring WL be 32 nm, a width PBLbetween the wirings BL be 96 nm, and a width PWL between the wirings WLbe 64 nm. In the case of a technology node less than 30 nm, it ispreferable that the width WdBL of the wiring BL be smaller than 32 nm,the width WdWL of the wiring WL be smaller than 32 nm, the width PBLbetween the wirings BL be smaller than 96 nm, and the width PWL betweenthe wirings WL be smaller than 64 nm.

<<2T1C Memory Cell>>

FIG. 4B illustrates a 2T1C memory cell. A memory cell 302 includes atransistor Tr2, a transistor Tr3, and a capacitor C2.

A first terminal of the transistor Tr2 is electrically connected to agate of the transistor Tr3 and a first terminal of the capacitor C2. Asecond terminal of the transistor Tr2 is electrically connected to thewiring BL. A gate of the transistor Tr2 is electrically connected to awiring WWL. A first terminal of the transistor Tr3 is electricallyconnected to the wiring BL. A second terminal of the transistor Tr3 iselectrically connected to a wiring SL. A second terminal of thecapacitor C2 is electrically connected to a wiring RWL. A back gate ofthe transistor Tr2 is electrically connected to a wiring BG2. A backgate of the transistor Tr3 is electrically connected to a wiring BG3.

A node ND2 that serves as a data retention portion is positioned betweenthe first terminal of the transistor Tr2, the gate of the transistorTr3, and the first terminal of the capacitor C2. The transistor Tr2functions as a switch that connects the node ND2 to the wiring BL. Thewiring WWL functions as a write word line to which a signal forselecting a memory cell is input. The wiring RWL functions as a readword line and is used to supply constant voltage to the second terminalof the capacitor C2 in writing operation and reading operation.

Data writing is performed when the transistor Tr2 is turned on toconnect the node ND2 to the wiring BL while the wiring RWL and thewiring SL are being precharged to constant voltage.

In data reading, the wiring BL, the wiring RWL, and the wiring SL areprecharged to constant voltage. Since the value of current flowing inthe transistor Tr3 changes in accordance with the potential of the nodeND2, the wiring BL is charged or discharged. Detection of an increase ordecrease in the voltage of the wiring BL enables reading of dataretained in the memory cell 302.

When the memory cell 302 performs writing operation, the transistor Tr2preferably operates with the current-voltage characteristics of thetransistor Tr[Φ₂] and the transistor Tr3 preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀]. In otherwords, a potential at which the transistor Tr2 operates with thecurrent-voltage characteristics of the transistor Tr[Φ₂] is preferablyapplied from the wiring BG2 to the back gate of the transistor Tr2, anda potential at which the transistor Tr3 operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the wiring BG3 to the back gate of the transistor Tr3.Furthermore, when the memory cell 302 performs reading operation, thetransistor Tr2 preferably operates with the current-voltagecharacteristics of the transistor Tr[Φ₀] and the transistor Tr3preferably operates with the current-voltage characteristics of thetransistor Tr[Φ₁]. In other words, a potential at which the transistorTr2 operates with the current-voltage characteristics of the transistorTr[Φ₀] is preferably applied from the wiring BG2 to the back gate of thetransistor Tr2, and a potential at which the transistor Tr3 operateswith the current-voltage characteristics of the transistor Tr[Φ₁] ispreferably applied from the wiring BG3 to the back gate of thetransistor Tr3.

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr2 and Tr3, theconducting/non-conducting states of the transistors Tr2 and Tr3 or theamount of current flowing in the transistor Tr2 and that in thetransistor Tr3 can be determined.

<<3T Memory Cell>>

FIG. 4C illustrates a 3T memory cell. A memory cell 303 includes atransistor Tr4, a transistor Tr5, and a transistor Tr6.

A first terminal of the transistor Tr4 is electrically connected to agate of the transistor Tr5. A second terminal of the transistor Tr4 iselectrically connected to a wiring WBL. A gate of the transistor Tr4 iselectrically connected to the wiring WWL. A first terminal of thetransistor Tr5 is electrically connected to a first terminal of thetransistor Tr6. A second terminal of the transistor Tr5 is electricallyconnected to the wiring VSS. The wiring VSS is a wiring through which alow power supply potential is applied. A second terminal of thetransistor Tr6 is electrically connected to a wiring RBL. A gate of thetransistor Tr6 is electrically connected to the wiring RWL. A back gateof the transistor Tr4 is electrically connected to a wiring BG4. A backgate of the transistor Tr5 is electrically connected to a wiring BG5. Aback gate of the transistor Tr6 is electrically connected to a wiringBG6.

A node ND3 that serves as a data retention portion is positioned betweenthe first terminal of the transistor Tr4 and the gate of the transistorTr5. The transistor Tr4 functions as a switch that connects the node ND3to the wiring WBL. The transistor Tr6 functions as a switch thatconnects the wiring RBL to the transistor Tr5. The wiring WBL functionsas a write bit line to which a data write signal is input. The wiringWWL functions as a write word line to which a signal for selecting amemory cell is input.

Data writing is performed when the transistor Tr4 is turned on toconnect the node ND3 to the wiring WBL.

In data reading, the transistor Tr6 is turned on while the wiring RBL isbeing precharged to constant voltage. Since the value of current flowingin the transistor Tr5 changes in accordance with the potential of thenode ND3, the wiring RBL is charged or discharged. Detection of anincrease or decrease in the voltage of the wiring RBL enables reading ofdata retained in the memory cell 303.

When the memory cell 303 performs writing operation, the transistor Tr4preferably operates with the current-voltage characteristics of thetransistor Tr[Φ₂] and the transistors Tr5 and Tr6 each preferablyoperate with the current-voltage characteristics of the transistorTr[Φ₀]. In other words, a potential at which the transistor Tr4 operateswith the current-voltage characteristics of the transistor Tr[Φ₂] ispreferably applied from the wiring BG4 to the back gate of thetransistor Tr4, and potentials at which the transistors Tr5 and Tr6operate with the current-voltage characteristics of the transistorTr[Φ₀] are preferably applied from the wirings BG5 and BG6 to the backgates of the transistors Tr5 and Tr6. Furthermore, when the memory cell303 performs reading operation, the transistor Tr4 preferably operateswith the current-voltage characteristics of the transistor Tr[Φ₀] andthe transistors Tr5 and Tr6 each preferably operate with thecurrent-voltage characteristics of the transistor Tr[Φ₁]. In otherwords, a potential at which the transistor Tr4 operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the wiring BG4 to the back gate of the transistor Tr4, andpotentials at which the transistors Tr5 and Tr6 operate with thecurrent-voltage characteristics of the transistor Tr[Φ₁] are preferablyapplied from the wirings BG5 and BG6 to the back gates of thetransistors Tr5 and Tr6.

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr4 to Tr6, theconducting/non-conducting states of the transistors Tr4 to Tr6 or theamount of current flowing in the transistor Tr4, that in the transistorTr5, and that in the transistor Tr6 can be determined.

<<SRAM>>

FIG. 4D illustrates a memory cell that is an example of a static randomaccess memory (SRAM). A memory cell 304 includes a transistor Tr7, atransistor Tr8, an inverter circuit INV1, and an inverter circuit INV2.

Since all transistors included in the memory device of one embodiment ofthe present invention are n-channel transistors, transistors included inthe inverter circuits INV1 and INV2 are n-channel transistors. Such aninverter circuit in which all transistors are n-channel transistors willbe described later.

A first terminal of the transistor Tr7 is electrically connected to aninput terminal of the inverter circuit INV1 and an output terminal ofthe inverter circuit INV2. A second terminal of the transistor Tr7 iselectrically connected to the wiring BL. A gate of the transistor Tr7 iselectrically connected to the wiring WL. A first terminal of thetransistor Tr8 is electrically connected to an output terminal of theinverter circuit INV1 and an input terminal of the inverter circuitINV2. A second terminal of the transistor Tr8 is electrically connectedto a wiring BLB. A gate of the transistor Tr8 is electrically connectedto the wiring WL. A back gate of the transistor Tr7 is electricallyconnected to a wiring BG7. A back gate of the transistor Tr8 iselectrically connected to a wiring BG8.

A node NET1 that serves as a data retention portion is positionedbetween the first terminal of the transistor Tr7, the input terminal ofthe inverter circuit INV1, and the output terminal of the invertercircuit INV2. A node NET2 that serves as a data retention portion ispositioned between the first terminal of the transistor Tr8, the outputterminal of the inverter circuit INV1, and the input terminal of theinverter circuit INV2. The wiring WL functions as a write/read word lineto which a signal for selecting a memory cell is input. A write signaland a read signal are transmitted to the wiring BL and the wiring BLB.

When the memory cell 304 performs writing operation or readingoperation, the transistors Tr7 and Tr8 each preferably operate with thecurrent-voltage characteristics of the transistor Tr[Φ₁]. In otherwords, potentials at which the transistors Tr7 and Tr8 operate with thecurrent-voltage characteristics of the transistor Tr[Φ₁] are preferablyapplied from the wirings BG7 and BG8 to the back gates of thetransistors Tr7 and Tr8. Furthermore, when the memory cell 304 does notperform writing or reading operation, the transistors Tr7 and Tr8 eachpreferably operate with the current-voltage characteristics of thetransistor Tr[Φ₀]. In other words, potentials at which the transistorsTr7 and Tr8 operate with the current-voltage characteristics of thetransistor Tr[Φ₀] are preferably applied from the wirings BG7 and BG8 tothe back gates of the transistors Tr7 and Tr8.

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr7 and Tr8, theconducting/non-conducting states of the transistors Tr7 and Tr8 or theamount of current flowing in the transistor Tr7 and that in thetransistor Tr8 can be determined.

<Peripheral Circuit>

Peripheral circuits included in the memory device of one embodiment ofthe present invention will be described with reference to FIGS. 6A to6E, FIGS. 7A and 7B, FIG. 8, FIG. 9, FIGS. 10A and 10B, FIG. 11, FIG.12, FIG. 13, FIG. 14, FIG. 15, FIG. 16, FIG. 17, and FIG. 18.

<<Logic Circuit>>

First, configuration examples of logic circuits of embodiments of thepresent invention will be described with reference to FIGS. 6A to 6E.

[NOT Circuit]

FIG. 6A illustrates a configuration example of a NOT circuit. In thisspecification, a NOT circuit may be described as an inverter, aninverter circuit, or the like, depending on circumstances or conditions.

A NOT circuit 201 includes a transistor Tr9 and a transistor Tr10. Thechannel width of the transistor Tr9 is smaller than the channel width ofthe transistor Tr10.

A gate of the transistor Tr10 is electrically connected to an inputterminal In1 of the NOT circuit 201. A first terminal of the transistorTr10 is electrically connected to a first terminal of the transistorTr9, a gate of the transistor Tr9, and an output terminal Out1 of theNOT circuit 201. A second terminal of the transistor Tr9 is electricallyconnected to a wiring VH through which a high-level potential isapplied. A second terminal of the transistor Tr10 is electricallyconnected to a wiring VL through which a low-level potential is applied.

Next, an operation example of the NOT circuit 201 will be described.

FIG. 7A is a timing chart showing the operation example of the NOTcircuit 201. From Time T1 to Time T2, the NOT circuit 201 is in astandby state and a potential Φ₀ is applied to a wiring BG9 and a wiringBG10. That is, the transistor Tr9 and the transistor Tr10 each operatewith the current-voltage characteristics of the transistor Tr[Φ₀] shownin FIG. 3. Even when a high-level potential is input to the inputterminal In1 in this state, current does not flow between a source and adrain of each of the transistors Tr9 and Tr10 because the transistorsTr9 and Tr10 are in non-conducting states (hereinafter, also referred toas normally-off states). Thus, an undefined potential is output to theoutput terminal Out1. FIG. 7A shows this undefined potential of theoutput terminal Out1 with hatching.

After Time T2, the NOT circuit 201 is in operation. At Time T2, apotential Φ₂ is applied to the wiring BG9 and a potential Φ₁ is appliedto the wiring BG10. At this time, the current-voltage characteristics ofthe transistor Tr9 are the current-voltage characteristics of thetransistor Tr[Φ₂] shown in FIG. 3, and the current-voltagecharacteristics of the transistor Tr10 are the current-voltagecharacteristics of the transistor Tr[Φ₁] shown in FIG. 3. A high-levelpotential remains being input to the input terminal In1. Thus, thetransistor Tr10 is turned on and current flows between the source andthe drain of the transistor Tr10. The gate and first terminal of thetransistor Tr9 have the same potential and the current-voltagecharacteristics of the transistor Tr9 are the current-voltagecharacteristics of the transistor Tr[Φ₂]; accordingly, the transistorTr9 is in a conducting state (hereinafter, also referred to as anormally-on state). Since the channel width of the transistor Tr9 issmaller than the channel width of the transistor Tr10, the larger amountof current flows in the transistor Tr10 than in the transistor Tr9.Thus, the potential of the output terminal Out1 is affected by thepotential of the wiring VL that is connected to the second terminal ofthe transistor Tr10; as a result, a low-level potential is output to theoutput terminal Out1.

At Time T3, a low-level potential is applied to the input terminal In1.The transistor Tr10 is in a non-conducting state because itscurrent-voltage characteristics are the current-voltage characteristicsof the transistor Tr[Φ₁] shown in FIG. 3. Furthermore, the gate andfirst terminal of the transistor Tr9 have the same potential and thecurrent-voltage characteristics of the transistor Tr9 are thecurrent-voltage characteristics of the transistor Tr[Φ₂]; accordingly,the transistor Tr9 is in a conducting state as it is before Time T3.Thus, the potential of the output terminal Out1 is affected by thepotential of the wiring VH that is connected to the second terminal ofthe transistor Tr9; as a result, a potential output to the outputterminal Out1 becomes a potential lower than a high-level potential by athreshold voltage V_(th) of the transistor Tr9.

Note that when the potential Φ₂ is set to be a potential that makes thethreshold voltage of the transistor Tr 0 V, a potential output to theoutput terminal Out1 can be increased to a high-level potential betweenTime T3 and Time T4. This means that when the potential Φ₂ is set to bea potential that makes the threshold voltage of the transistor Tr 0 V, apotential output to the output terminal Out1 can be a high-levelpotential without decreasing by the threshold voltage.

Described below is the reason why the output voltage of the transistorTr9 becomes a potential lower than a high-level potential by thethreshold voltage V_(th) of the transistor Tr9.

First, assume that the potential Φ₀ is applied from the wiring BG9 tothe back gate of the transistor Tr9. In this case, the current-voltagecharacteristics of the transistor Tr9 are the current-voltagecharacteristics of the transistor Tr[Φ₀] shown in FIG. 3.

Here, a high-level potential is a potential V_(high) and the potentialof the output terminal Out1 is a potential V_(x). Note that for theconfiguration of the NOT circuit 201, V_(x) is lower than V_(high). Atthis time, the source of the transistor Tr9 serves as the first terminaland the first terminal of the transistor Tr9 and the gate of thetransistor Tr9 have the same potential; thus, gate-source voltage V_(gs)becomes 0 V. Consequently, the transistor Tr9 with the current-voltagecharacteristics of the transistor Tr[Φ₀] is brought into anon-conducting state.

When the potential Φ₂ is applied from the wiring BG9 to the back gate ofthe transistor Tr9, the current-voltage characteristics of thetransistor Tr9 become the current-voltage characteristics of thetransistor Tr[Φ₂] shown in FIG. 3. Since the gate-source voltage V_(gs)of the transistor Tr9 is 0 V, the transistor Tr9 is brought into aconducting state.

Thus, current flows between the first terminal and second terminal ofthe transistor Tr9. Note that the drain-source voltage V_(ds) of thetransistor Tr9 at this time can be expressed by the formula below.V _(ds) =V _(high) −V _(x)>0  [Formula 1]

As the relationship between the threshold voltage V_(th) and gate-sourcevoltage V_(gs) of the transistor Tr9, V_(gs)−V_(th)>0 is satisfiedbecause the transistor Tr9 is in a conducting state. In the case wherethe transistor Tr9 operates in a saturation region, V_(ds)>V_(gs)−V_(th)is satisfied; thus, the formula below can be obtained fromV_(ds)=V_(high)−V_(x)>0 and V_(gs)=0.V _(high) −V _(x) >−V _(th)>0  [Formula 2]

In the case where a wiring through which a high-level potential or alow-level potential is supplied is not connected to the outputdestination of the output terminal Out1, the potential V_(x) of theoutput terminal Out1 is increased over time because of the high-levelpotential V_(high) applied through the wiring VH. When the potentialV_(x) is high, since V_(ds)=V_(high)−V_(x) is satisfied, thedrain-source voltage V_(ds) of the transistor Tr9 is low. Thedrain-source voltage V_(ds) is eventually decreased to pinch-off voltageover time. Note that V_(ds)=V_(gs)−V_(th) is satisfied at pinch-offvoltage; thus, the formula below can be obtained fromV_(ds)=V_(high)−V_(x) and V_(gs)=0.V _(x) =V _(high) +V _(th)  [Formula 3]

Since V_(th) is less than or equal to 0, V_(high)≥V_(high)+V_(th) issatisfied. This indicates that the potential of the output terminal Out1is lower than a high-level potential by the threshold voltage of thetransistor Tr9. When the threshold voltage is 0 V, the potential of theoutput terminal Out1 is V_(high).

As described above, a NOT circuit can be obtained without employing aCMOS structure by changing the potential of the back gate of thetransistor Tr9 in accordance with a potential input to the inputterminal In1.

A method for determining the amount of current flowing in thetransistors Tr9 and Tr10 included in the NOT circuit 201 is not limitedto the above. For example, a potential applied to the wiring BG9 afterTime T2 may be, instead of Φ₂, a potential higher than Φ₁ and lower thanΦ₂. This is effective when the NOT circuit 201 does not need to bedriven at high speed. In other words, when the NOT circuit 201 does notneed to be driven at high speed, application of a potential higher thanΦ₁ and lower than Φ₂ to the wiring BG9 can lead to a reduction in powerconsumption.

[NAND Circuit]

FIG. 6B illustrates a configuration example of a NAND circuit.

A NAND circuit 202A includes a transistor Tr11, a transistor Tr12, and atransistor Tr13. The channel width of the transistor Tr11 is smallerthan the channel width of each of the transistors Tr12 and Tr13.

A gate of the transistor Tr13 is electrically connected to an inputterminal In2B. A first terminal of the transistor Tr13 is electricallyconnected to a first terminal of the transistor Tr12. A second terminalof the transistor Tr13 is electrically connected to the wiring VLthrough which a low-level potential is applied. A gate of the transistorTr12 is electrically connected to an input terminal In2A. A secondterminal of the transistor Tr12 is electrically connected to a firstterminal of the transistor Tr11, a gate of the transistor Tr11, and anoutput terminal Out2. A second terminal of the transistor Tr11 iselectrically connected to the wiring VH through which a high-levelpotential is applied.

Next, an operation example of the NAND circuit 202A will be described.

FIG. 7B is a timing chart showing the operation example of the NANDcircuit 202A. From Time T1 to Time T2, the NAND circuit 202A is in astandby state and the potential Φ₀ is applied to wirings BG11 to BG13.That is, the transistors Tr11 to Tr13 each operate with thecurrent-voltage characteristics of the transistor Tr[Φ₀] shown in FIG.3. Even when a high-level potential is input to the input terminal In2Aand the input terminal In2B in this state, current does not flow betweena source and a drain of each of the transistors Tr11 to Tr13 because thetransistors Tr11 to Tr13 are in normally-off states. Thus, an undefinedpotential is output to the output terminal Out2. FIG. 7B shows thisundefined potential of the output terminal Out2 with hatching.

After Time T2, the NAND circuit 202A is in operation. At Time T2, thepotential Φ₂ is applied to the wiring BG11 and the potential t isapplied to the wiring BG12 and the wiring BG13. Thus, the transistorTr11 operates with the current-voltage characteristics of the transistorTr[Φ₂] and the transistor Tr12 and the transistor Tr13 each operate withthe current-voltage characteristics of the transistor Tr[Φ₁] shown inFIG. 3. A high-level potential remains being input to the input terminalIn2A and the input terminal In2B. Accordingly, current flows between thesource and the drain of each of the transistors Tr12 and Tr13. The gateand first terminal of the transistor Tr11 have the same potential andthe current-voltage characteristics of the transistor Tr11 are thecurrent-voltage characteristics of the transistor Tr[Φ₂] shown in FIG.3; thus, the transistor Tr11 is in a conducting state. Since the channelwidth of the transistor Tr11 is smaller than the channel width of eachof the transistor Tr12 and the transistor Tr13, the larger amount ofcurrent flows in the transistors Tr12 and Tr13 than in the transistorTr11. Thus, the potential of the output terminal Out2 is affected by thepotential of the wiring VL that is connected to the second terminal ofthe transistor Tr13; as a result, a low-level potential is output to theoutput terminal Out2.

At Time T3, a low-level potential is applied to the input terminal In2Aand a high-level potential remains being applied to the input terminalIn2B from before Time T3. The transistor Tr12 is in a non-conductingstate because its current-voltage characteristics are thecurrent-voltage characteristics of the transistor Tr[Φ₁] shown in FIG.3. Furthermore, the gate and first terminal of the transistor Tr11 havethe same potential and the current-voltage characteristics of thetransistor Tr11 are the current-voltage characteristics of thetransistor Tr[Φ₂]; accordingly, the transistor Tr11 is in a conductingstate as it is before Time T3. Thus, the potential of the outputterminal Out2 is affected by the potential of the wiring VH that isconnected to the second terminal of the transistor Tr11; as a result, apotential output to the output terminal Out2 becomes a potential lowerthan a high-level potential by a threshold voltage V_(th) of thetransistor Tr11.

At Time T4, a high-level potential is applied to the input terminal In2Aand a low-level potential is input to the input terminal In2B. Thetransistor Tr13 is in a non-conducting state because its current-voltagecharacteristics are the current-voltage characteristics of thetransistor Tr[Φ₁] shown in FIG. 3. Thus, a potential lower than ahigh-level potential by the threshold voltage V_(th) of the transistorTr11 remains being output to the output terminal Out2 from before TimeT4.

At Time T5, a low-level potential is applied to the input terminal In2A,and a low-level potential remains being input to the input terminal In2Bfrom before Time T5. Thus, the transistor Tr12 and the transistor Tr13are each in a non-conducting state. Accordingly, a potential lower thana high-level potential by the threshold voltage V_(th) of the transistorTr11 remains being output to the output terminal Out2 from before TimeT5.

At Time T6, a high-level potential is applied again to the inputterminal In2A and the input terminal In2B. This state is the same asthat from Time T2 to Time T3; thus, operation from Time T6 to Time T7 isthe same as that from Time T2 to Time T3. This means that a low-levelpotential is output from the output terminal Out2 similarly to the casefrom Time T2 to Time T3.

Note that when the potential Φ₂ is set to be a potential that makes thethreshold voltage of the transistor Tr 0 V, a potential output to theoutput terminal Out2 can be increased to a high-level potential betweenTime T3 and Time T6. This means that when the potential Φ₂ is set to bea potential that makes the threshold voltage of the transistor Tr 0 V, apotential output to the output terminal Out2 can be a high-levelpotential without decreasing by the threshold voltage.

As described above, a NAND circuit can be obtained without employing aCMOS structure by changing the potential of the back gate of thetransistor Tr11 in accordance with potentials input to the inputterminal In2A and the input terminal In2B.

A method for determining the amount of current flowing in thetransistors Tr11 to Tr13 included in the NAND circuit 202A is notlimited to the above. For example, a potential applied to the wiringBG11 after Time T2 may be, instead of Φ₂, a potential higher than Φ₁ andlower than Φ₂. This is effective when the NAND circuit 202A does notneed to be driven at high speed. In other words, when the NAND circuit202A does not need to be driven at high speed, application of apotential higher than Φ₁ and lower than Φ₂ to the wiring BG11 can leadto a reduction in power consumption.

To apply the same potential to the wiring BG12 and the wiring BG13, aNAND circuit 202B illustrated in FIG. 6C may be employed. In the NANDcircuit 202B, the back gate of the transistor Tr12 and the back gate ofthe transistor Tr13 are electrically connected to the wiring BG12.Accordingly, the threshold voltages of the transistor Tr12 and thetransistor Tr13 can be adjusted at the same time by application of apotential through the wiring BG12.

[NOR Circuit]

FIG. 6D illustrates a configuration example of a NOR circuit.

A NOR circuit 203A includes a transistor Tr14, a transistor Tr15, and atransistor Tr16. The channel width of the transistor Tr16 is smallerthan the channel width of each of the transistors Tr14 and Tr15.

A gate of the transistor Tr14 is electrically connected to an inputterminal In3A. A first terminal of the transistor Tr14 is electricallyconnected to a first terminal of the transistor Tr15, a first terminalof the transistor Tr16, a gate of the transistor Tr16, and an outputterminal Out3. A second terminal of the transistor Tr14 is electricallyconnected to the wiring VL through which a low-level potential isapplied. A gate of the transistor Tr15 is electrically connected to aninput terminal In3B. A second terminal of the transistor Tr15 iselectrically connected to the wiring VL through which a low-levelpotential is applied. A second terminal of the transistor Tr16 iselectrically connected to the wiring VH through which a high-levelpotential is applied.

Next, an operation example of the NOR circuit 203A will be described.

FIG. 8 is a timing chart showing the operation example of the NORcircuit 203A. From Time T1 to Time T2, the NOR circuit 203A is in astandby state and the potential Φ₀ is applied to wirings BG14 to BG16.That is, the transistors Tr14 to Tr16 each operate with thecurrent-voltage characteristics of the transistor Tr[Φ₀] shown in FIG.3. Even when a high-level potential is input to both of the inputterminals In3A and In3B in this state, current does not flow between asource and a drain of each of the transistors Tr14 to Tr16. Thus, anundefined potential is output to the output terminal Out3. FIG. 8 showsthis undefined potential of the output terminal Out3 with hatching.

After Time T2, the NOR circuit 203A is in operation. At Time T2, thepotential Φ₁ is applied to the wiring BG14 and the wiring BG15 and thepotential Φ₂ is applied to the wiring BG16. Thus, the transistor Tr14and the transistor Tr15 each operate with the current-voltagecharacteristics of the transistor Tr[Φ₁] shown in FIG. 3. A high-levelpotential remains being input to the input terminal In3A and the inputterminal In3B. Accordingly, current flows between the source and thedrain of each of the transistors Tr14 and Tr15. The gate and firstterminal of the transistor Tr16 have the same potential and thecurrent-voltage characteristics of the transistor Tr16 are thecurrent-voltage characteristics of the transistor Tr[Φ₂] shown in FIG.3; thus, the transistor Tr16 is in a conducting state. Since the channelwidth of the transistor Tr16 is smaller than the channel width of eachof the transistors Tr14 and Tr15, the larger amount of current flows inthe transistors Tr14 and Tr15 than in the transistor Tr16. Thus, thepotential of the output terminal Out3 is affected by the potential ofthe wiring VL connected to the transistors Tr14 and Tr15; as a result, alow-level potential is output to the output terminal Out3.

At Time T3, a low-level potential is applied to the input terminal In3Aand a high-level potential remains being applied to the input terminalIn3B from before Time T3. The transistor Tr14 is brought into anon-conducting state because its current-voltage characteristics are thecurrent-voltage characteristics of the transistor Tr[Φ₁] shown in FIG.3, and the transistor Tr15 is in a conducting state because itscurrent-voltage characteristics are the current-voltage characteristicsof the transistor Tr[Φ₁] shown in FIG. 3. Furthermore, the transistorTr16 is in a conducting state as it is before Time T3; thus, thepotential of the output terminal Out3 from Time T3 to Time T4 is alow-level potential, which is the same as that from Time T2 to Time T3.

At Time T4, a high-level potential is applied to the input terminal In3Aand a low-level potential is applied to the input terminal In3B. Thetransistor Tr14 is brought into a conducting state because itscurrent-voltage characteristics are the current-voltage characteristicsof the transistor Tr[Φ₁] shown in FIG. 3, and the transistor Tr15 isbrought into a non-conducting state because its current-voltagecharacteristics are the current-voltage characteristics of thetransistor Tr[Φ₁] shown in FIG. 3. Furthermore, the transistor Tr16 isin a conducting state as it is before Time T3; thus, the potential ofthe output terminal Out3 from Time T4 to Time T5 is a low-levelpotential, which is the same as that from Time T2 to Time T3 or thatfrom Time T3 to Time T4.

At Time T5, a low-level potential is applied to the input terminal In3Aand a low-level potential remains being applied to the input terminalIn3B from before Time T3. The transistors Tr14 and Tr15 are each broughtinto a non-conducting state because their current-voltagecharacteristics are the current-voltage characteristics of thetransistor Tr[Φ₁] shown in FIG. 3. Furthermore, the gate and firstterminal of the transistor Tr16 have the same potential and thecurrent-voltage characteristics of the transistor Tr16 are thecurrent-voltage characteristics of the transistor Tr[Φ₂]; accordingly,the transistor Tr16 is in a conducting state as it is before Time T3.Thus, the potential of the output terminal Out3 is affected by thepotential of the wiring VH that is connected to the second terminal ofthe transistor Tr16; as a result, a potential output to the outputterminal Out3 becomes a potential lower than a high-level potential by athreshold voltage V_(th) of the transistor Tr16.

At Time T6, a high-level potential is applied again to the inputterminal In3A and the input terminal In3B. This state is the same asthat from Time T2 to Time T3; thus, operation from Time T6 to Time T7 isthe same as that from Time T2 to Time T3. This means that a low-levelpotential is output from the output terminal Out3 similarly to the casefrom Time T2 to Time T3.

Note that when the potential Φ₂ is set to be a potential that makes thethreshold voltage of the transistor Tr 0 V, a potential output to theoutput terminal Out3 can be increased to a high-level potential betweenTime T5 and Time T6. This means that when the potential Φ₂ is set to bea potential that makes the threshold voltage of the transistor Tr 0 V, apotential output to the output terminal Out3 can be a high-levelpotential without decreasing by the threshold voltage.

As described above, a NOR circuit can be obtained without employing aCMOS structure by changing the potential of the back gate of thetransistor Tr16 in accordance with potentials input to the inputterminal In3A and the input terminal In3B.

A method for determining the amount of current flowing in thetransistors Tr14 to Tr16 included in the NOR circuit 203A is not limitedto the above. For example, a potential applied to the wiring BG16 afterTime T2 may be, instead of Φ₂, a potential higher than Φ₁ and lower thanΦ₂. This is effective when the NOR circuit 203A does not need to bedriven at high speed. In other words, when the NOR circuit 203A does notneed to be driven at high speed, application of a potential higher thanΦ₁ and lower than Φ₂ to the wiring BG16 can lead to a reduction in powerconsumption.

To apply the same potential to the wiring BG14 and the wiring BG15, aNOR circuit 203B illustrated in FIG. 6E may be employed. In the NORcircuit 203B, the back gate of the transistor Tr14 and the back gate ofthe transistor Tr15 are electrically connected to the wiring BG14.Accordingly, the threshold voltages of the transistor Tr14 and thetransistor Tr15 can be adjusted at the same time by application of apotential through the wiring BG14.

<<Decoder Circuit>>

FIG. 9 illustrates a configuration example of a decoder circuit. Adecoder circuit 401 is a circuit that outputs a signal from one of eightoutput terminals depending on a 3-bit control signal. The decodercircuit 401 includes selector circuits 321[1] to 321[7], external inputterminals A0, A0 b, A1, A1 b, A2, and A2 b, and external outputterminals Y0, Y1, Y2, Y3, Y4, Y5, Y6, and Y7.

In this specification, the selector circuits 321[1] to 321[7] and aselector circuit 321[a] (a is an integer greater than or equal to 8)that will be described later are collectively referred to as a selectorcircuit 321.

In FIG. 9, the external output terminals Y0 to Y7 are provided with thebinary numbers 000 to 111 in parentheses.

An inverted signal of a signal input to the external input terminal A0is input to the external input terminal A0 b. For example, when ahigh-level potential is input to the external input terminal A0, alow-level potential is input to the external input terminal A0 b.Similarly, an inverted signal of a signal input to the external inputterminal A1 is input to the external input terminal A1 b, and aninverted signal of a signal input to the external input terminal A2 isinput to the external input terminal A2 b. As described above, when anexternal input terminal through which a signal is supplied and anexternal input terminal through which an inverted signal of the signalis supplied are regarded as a pair, the decoder circuit 401 includesthree pairs of external input terminals.

Each of the selector circuits 321[1] to 321[7] includes an inputterminal IT, an output terminal OT1, an output terminal OT2, a controlterminal CT1, and a control terminal CT2. Note that symbols for theseterminals are provided only in the selector circuit 321[1] in FIG. 9 andare omitted in the selector circuits 321[2] to 321[7].

The selector circuits 321[1] to 321[7] each have a function ofoutputting a signal input to the input terminal IT to the outputterminal OT1 when a high-level potential is applied to the controlterminal CT1 (or when a low-level potential is applied to the controlterminal CT2). Furthermore, the selector circuits 321[1] to 321[7] eachhave a function of outputting a signal input to the input terminal IT tothe output terminal OT2 when a high-level potential is applied to thecontrol terminal CT2 (or when a low-level potential is applied to thecontrol terminal CT1).

The input terminal IT of the selector circuit 321[1] is electricallyconnected to the wiring VH through which a high-level potential isapplied. The control terminal CT1 of the selector circuit 321[1] iselectrically connected to the external input terminal A2 b. The controlterminal CT2 of the selector circuit 321[1] is electrically connected tothe external input terminal A2. The output terminal OT1 of the selectorcircuit 321[1] is electrically connected to the input terminal IT of theselector circuit 321[2]. The output terminal OT2 of the selector circuit321[1] is electrically connected to the input terminal IT of theselector circuit 321[3]. Note that depending on circumstances orconditions, the input terminal IT of the selector circuit 321[1] may beelectrically connected not to the wiring VH through which a high-levelpotential is applied but to a wiring through which a low-level potentialis applied.

The control terminals CT1 of the selector circuits 321[2] and 321[3] areelectrically connected to the external input terminal A1 b. The controlterminals CT2 of the selector circuits 321[2] and 321[3] areelectrically connected to the external input terminal A1. The outputterminal OT1 of the selector circuit 321[2] is electrically connected tothe input terminal IT of the selector circuit 321[4]. The outputterminal OT2 of the selector circuit 321[2] is electrically connected tothe input terminal IT of the selector circuit 321[5]. The outputterminal OT1 of the selector circuit 321[3] is electrically connected tothe input terminal IT of the selector circuit 321[6]. The outputterminal OT2 of the selector circuit 321[3] is electrically connected tothe input terminal IT of the selector circuit 321[7].

The control terminals CT1 of the selector circuits 321[4] to 321[7] areelectrically connected to the external input terminal A0 b. The controlterminals CT2 of the selector circuits 321[4] to 321[7] are electricallyconnected to the external input terminal A0. The output terminal OT1 ofthe selector circuit 321[4] is electrically connected to the externaloutput terminal Y0. The output terminal OT2 of the selector circuit321[4] is electrically connected to the external output terminal Y1. Theoutput terminal OT1 of the selector circuit 321[5] is electricallyconnected to the external output terminal Y2. The output terminal OT2 ofthe selector circuit 321[5] is electrically connected to the externaloutput terminal Y3. The output terminal OT1 of the selector circuit321[6] is electrically connected to the external output terminal Y4. Theoutput terminal OT2 of the selector circuit 321[6] is electricallyconnected to the external output terminal Y5. The output terminal OT1 ofthe selector circuit 321[7] is electrically connected to the externaloutput terminal Y6. The output terminal OT2 of the selector circuit321[7] is electrically connected to the external output terminal Y7.

Since the decoder circuit 401 includes three pairs of external inputterminals as described above, the selector circuits 321[1] to 321[7] aredivided into three columns. The decoder circuit 401 includes 2^(n−1)selector circuits 321 in the n-th column (here, n is an integer greaterthan or equal to 1 and less than or equal to 3). The input terminal ITof the selector circuit 321[1] in the first column is electricallyconnected to the wiring VH through which a high-level potential isapplied. The output terminals OT1 and OT2 of the selector circuits321[4] to 321[7] in the third column are electrically connected to theexternal output terminals Y0 to Y7.

The decoder circuit 401 has a configuration with which a high-levelpotential is output from one of the external output terminals Y0 to Y7when potentials are applied to the external input terminals A0, A0 b,A1, A1 b, A2, and A2 b.

When a high-level potential is input to the external input terminals A0and A2 and a low-level potential is input to the external input terminalA1, a low-level potential is input to the external input terminals A0 band A2 b and a high-level potential is input to the external inputterminal A1 b, for example. In this case, the selector circuit 321[1]outputs a signal from the output terminal OT2, the selector circuit321[3] outputs a signal from the output terminal OT1, and the selectorcircuit 321[6] outputs a signal from the output terminal OT2. In otherwords, when a high-level potential, a low-level potential, and ahigh-level potential are input to the external input terminal A0, theexternal input terminal A1, and the external input terminal A2,respectively, the external output terminal Y5 is selected and ahigh-level potential is applied from the wiring VH to the externaloutput terminal Y5.

Here, when a high-level potential is expressed by “1” and a low-levelpotential is expressed by “0,” it can be said that potentials “1,” “0,”and “1” are input to the external input terminals A2, A1, and A0,respectively, in the case of the above example. This means that externalinput potentials “1,” “0,” and “1” correspond to the numbers inparentheses for the external output terminal Y5, i.e., (101). Whenpotential levels of the external input terminals A2, A1, and A0 areexpressed in this order by “1” or “0” in the above manner, it ispossible to determine from the binary number which one of the externaloutput terminals Y0 to Y7 outputs a high-level potential.

As described above, the combination of a high-level potential and alow-level potential input to the external input terminals A2, A1, and A0can be used to select one of the external output terminals Y0 to Y7 fromwhich a high-level potential is output.

Here, circuit configurations of the selector circuits 321[1] to 321[7]will be described.

FIG. 10A illustrates the circuit configuration of the selector circuit321. The selector circuit 321 includes a transistor Tr17[1] and atransistor Tr17[2].

A first terminal of the transistor Tr17[1] is electrically connected tothe input terminal IT and a first terminal of the transistor Tr17[2]. Asecond terminal of the transistor Tr17[1] is electrically connected tothe output terminal OT1. A gate of the transistor Tr17[1] iselectrically connected to the control terminal CT1. A second terminal ofthe transistor Tr17[2] is electrically connected to the output terminalOT2. A gate of the transistor Tr17[2] is electrically connected to thecontrol terminal CT2. A back gate of the transistor Tr17[1] iselectrically connected to a wiring BG17[1]. A back gate of thetransistor Tr17[2] is electrically connected to a wiring BG17[2].

As described above, an inverted signal of a signal input to the controlterminal CT2 is input to the control terminal CT1. As a result, one ofthe transistor Tr17[1] and the transistor Tr17[2] can be brought into aconducting state and the other can be brought into a non-conductingstate. Accordingly, a signal input to the input terminal IT can beoutput to one of the output terminal OT1 and the output terminal OT2depending on signals from the control terminal CT1 and the controlterminal CT2.

During the operation of the decoder circuit 401, one of the transistorTr17[1] and the transistor Tr17[2] in the selector circuit 321 isbrought into a conducting state and the other of the transistor Tr17[1]and the transistor Tr17[2] is brought into a non-conducting state. Thetransistor in a conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₁] and thetransistor in a non-conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀]. In otherwords, a potential at which one of the transistor Tr17[1] and thetransistor Tr17[2] operates with the current-voltage characteristics ofthe transistor Tr[Φ₁] is preferably applied from one of the wiringBG17[1] and the wiring BG17[2] to the back gate of one of the transistorTr17[1] and the transistor Tr17[2], and a potential at which the otherof the transistor Tr17[1] and the transistor Tr17[2] operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the other of the wiring BG17[1] and the wiring BG17[2] tothe back gate of the other of the transistor Tr17[1] and the transistorTr17[2].

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr17[1] and Tr17[2], theconducting/non-conducting states of the transistors Tr17[1] and Tr17[2]or the amount of current flowing in the transistor Tr17[1] and that inthe transistor Tr17[2] can be determined.

To increase the amount of current flowing in the transistors Tr17[1] andTr17[2], a selector circuit 322 illustrated in FIG. 10B may be usedinstead of the selector circuit 321. In the selector circuit 322, theback gate of the transistor Tr17[1] is electrically connected to thecontrol terminal CT1 and the back gate of the transistor Tr17[2] iselectrically connected to the control terminal CT2. The other connectionstructures in the selector circuit 322 are the same as those in theselector circuit 321 except that the back gate of the transistor Tr17[1]and the back gate of the transistor Tr17[2] are not connected to thewiring BG17[1] and the wiring BG17[2]. Such a configuration canincrease, when the transistor Tr17[1] or the transistor Tr17[2] is in aconducting state, the source-drain current of the transistor in aconducting state.

Note that the decoder circuit of one embodiment of the present inventionis not limited to the decoder circuit 401 illustrated in FIG. 9.Although the number of external output terminals of the decoder circuit401 illustrated in FIG. 9 is 2³, the number of external output terminalsmay be 2^(k) (k is an integer greater than or equal to 1, where k is not3). In that case, the number of the selector circuits 321 is 2^(k)−1 andthe number of external input terminals is 2k; the connection structurehas a perfect binary tree structure.

When k is 2, for example, a decoder circuit 402 illustrated in FIG. 11is obtained. The decoder circuit 402 includes the selector circuits321[1] to 321[3], four external input terminals (external inputterminals A0, A0 b, A1, and A1 b), and four external output terminals(external output terminals Y0, Y1, Y2, and Y3). Note that symbols forthe input terminal IT, the output terminal OT1, the output terminal OT2,the control terminal CT1, and the control terminal CT2 are provided onlyin the selector circuit 321[1] in FIG. 11 and are omitted in theselector circuits 321[2] and 321[3]. Since the decoder circuit 402includes two pairs of external input terminals, the selector circuits321[1] to 321[3] are divided into two columns. The decoder circuit 402includes 2^(n−1) selector circuits 321 in the n-th column (here, n is aninteger greater than or equal to 1 and less than or equal to 2). Theinput terminal IT of the selector circuit 321[1] in the first column iselectrically connected to the wiring VH through which a high-levelpotential is applied. The output terminals OT1 and OT2 of the selectorcircuits 321[2] and 321[3] in the second column are electricallyconnected to the external output terminals Y0 to Y3. In FIG. 11, theexternal output terminals Y0 to Y3 are provided with the binary numbers00 to 11 in parentheses. In a manner similar to that described above, inthe binary number, the first number from the left expresses thepotential level of the external input terminal A1 and the second numberfrom the left expresses the potential level of the external inputterminal A0.

During the operation of the decoder circuit 402, one of the transistorTr17[1] and the transistor Tr17[2] in the selector circuit 321 isbrought into a conducting state and the other of the transistor Tr17[1]and the transistor Tr17[2] is brought into a non-conducting state. Thetransistor in a conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₁] and thetransistor in a non-conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀]. In otherwords, a potential at which one of the transistor Tr17[1] and thetransistor Tr17[2] operates with the current-voltage characteristics ofthe transistor Tr[Φ₁] is preferably applied from one of the wiringBG17[1] and the wiring BG17[2] to the back gate of one of the transistorTr17[1] and the transistor Tr17[2], and a potential at which the otherof the transistor Tr17[1] and the transistor Tr17[2] operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the other of the wiring BG17[1] and the wiring BG17[2] tothe back gate of the other of the transistor Tr17[1] and the transistorTr17[2].

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr17[1] and Tr17[2], theconducting/non-conducting states of the transistors Tr17[1] and Tr17[2]or the amount of current flowing in the transistor Tr17[1] and that inthe transistor Tr17[2] can be determined.

When k is 4, for example, a decoder circuit 403 illustrated in FIG. 12is obtained. The decoder circuit 403 includes selector circuits 321[1]to 321[15], eight external input terminals (external input terminals A0,A0 b, A1, A1 b, A2, A2 b, A3, and A3 b), and 16 external outputterminals (external output terminals Y0, Y1, Y2, Y3, Y4, Y5, Y6, Y7, Y8,Y9, Y10, Y11, Y12, Y13, Y14, and Y15). Note that symbols for the inputterminal IT, the output terminal OT1, the output terminal OT2, thecontrol terminal CT1, and the control terminal CT2 are provided only inthe selector circuit 321[1] in FIG. 12 and are omitted in the selectorcircuits 321[2] to 321[15]. Since the decoder circuit 403 includes fourpairs of external input terminals, the selector circuits 321[1] to321[15] are divided into four columns. The decoder circuit 403 includes2^(n−1) selector circuits 321 in the n-th column (here, n is an integergreater than or equal to 1 and less than or equal to 4). The inputterminal IT of the selector circuit 321[1] in the first column iselectrically connected to the wiring VH through which a high-levelpotential is applied. The output terminals OT1 and OT2 of the selectorcircuits 321[8] to 321[15] in the fourth column are electricallyconnected to the external output terminals Y0 to Y15. In FIG. 12, theexternal output terminals Y0 to Y15 are provided with the binary numbers0000 to 1111 in parentheses. In a manner similar to that describedabove, in the binary number, the first number from the left expressesthe potential level of the external input terminal A3, the second numberfrom the left expresses the potential level of the external inputterminal A2, the third number from the left expresses the potentiallevel of the external input terminal A1, and the fourth number from theleft expresses the potential level of the external input terminal A0.

During the operation of the decoder circuit 403, one of the transistorTr17[1] and the transistor Tr17[2] in the selector circuit 321 isbrought into a conducting state and the other of the transistor Tr17[1]and the transistor Tr17[2] is brought into a non-conducting state. Thetransistor in a conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₁] and thetransistor in a non-conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀]. In otherwords, a potential at which one of the transistor Tr17[1] and thetransistor Tr17[2] operates with the current-voltage characteristics ofthe transistor Tr[Φ₁] is preferably applied from one of the wiringBG17[1] and the wiring BG17[2] to the back gate of one of the transistorTr17[1] and the transistor Tr17[2], and a potential at which the otherof the transistor Tr17[1] and the transistor Tr17[2] operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the other of the wiring BG17[1] and the wiring BG17[2] tothe back gate of the other of the transistor Tr17[1] and the transistorTr17[2].

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr17[1] and Tr17[2], theconducting/non-conducting states of the transistors Tr17[1] and Tr17[2]or the amount of current flowing in the transistor Tr17[1] and that inthe transistor Tr17[2] can be determined.

FIG. 13 illustrates the configuration example of a decoder circuitutilizing the above principles. A decoder circuit 403 a is, similarly tothe decoder circuit 403, a decoder circuit obtained when k is 4. Notethat the binary numbers provided for the external output terminals Y0 toY15 of the decoder circuit 403 illustrated in FIG. 12 are omitted in thedecoder circuit 403 a illustrated in FIG. 13. The decoder circuit 403 ais different from the decoder circuit 403 in that selector circuitsconnected to the external input terminals A0, A0 b, A1, and A1 b are theselector circuits 322. In the decoder circuit 403 a, the selectorcircuits 321 are provided on a side closer to the wiring VH that iselectrically connected to a high potential power source, and theselector circuits 322 are provided on a side closer to the externaloutput terminals Y0 to Y15.

In the case of a decoder circuit like the decoder circuits 401 to 403,the larger the number of external output terminals is, the larger thenumber of the selector circuits 321 for selecting an external outputterminal is, inevitably. In that case, when current flows from the highpotential power source to one of the external output terminals, voltageoutput from one of the external output terminals might be lower than thevoltage of the wiring VH.

When the selector circuits 322 are provided on the side closer to theexternal output terminals in the decoder circuit 403 a, the reduction involtage can be prevented. Since the gate and the back gate of thetransistor included in the selector circuit 322 are electricallyconnected to each other, the transistor can have high on-state currentwhen being in a conducting state. In addition, a voltage drop in thetransistor can be reduced; thus, a signal from the high potential powersource can be supplied to one of the external output terminals Y0 to Y15without decay.

Note that the number of the selector circuits 321 and the number of theselector circuits 322 are not limited to those for the decoder circuit403 a, and may be changed depending on circumstances or conditions. Forexample, all of the selector circuits 321[1] to 321[15] included in thedecoder circuit 403 may be replaced by the selector circuits 322. In adecoder circuit obtained when k is not 4, a predetermined number of theselector circuits 322 may be provided and the other selector circuitsmay be the selector circuits 321.

Note that the decoder circuit of one embodiment of the present inventionis not limited to the decoder circuit 401 illustrated in FIG. 9, thedecoder circuit 402 illustrated in FIG. 11, or the decoder circuit 403illustrated in FIG. 12. Although the above decoder circuits include2^(k) external output terminals, the number of external output terminalsis not necessarily 2^(k). When the number of external output terminalsis p, where p is an integer greater than 2^(k) and less than 2^(k+1), adecoder circuit including 2^(k+1)external output terminals may bedesigned first and then the selector circuits 321 may be removed fromthe decoder circuit until the number of external output terminalsbecomes p.

FIG. 14 illustrates a decoder circuit including 11 external outputterminals, for example. A decoder circuit 404 includes the selectorcircuit 321[1], the selector circuit 321[2], the selector circuits321[4] to 321[6], the selector circuits 321[8] to 321[12], eightexternal input terminals (external input terminals A0, A0 b, A1, A1 b,A2, A2 b, A3, and A3 b), and 11 external output terminals (externaloutput terminals Y0, Y1, Y2, Y3, Y4, Y5, Y6, Y7, Y8, Y9, and Y10). Notethat symbols for the input terminal IT, the output terminal OT1, theoutput terminal OT2, the control terminal CT1, and the control terminalCT2 are provided only in the selector circuit 321[1] in FIG. 14 and areomitted in the other selector circuits. The decoder circuit 404 has aconfiguration in which five selector circuits 321 (i.e., the selectorcircuits 321[2], 321[7], 321[13], 321[14], and 321[15]) are removed fromthe above-described decoder circuit 403 including 2⁴ external outputterminals. Similarly to the decoder circuit 403, the decoder circuit 404includes four pairs of external input terminals and the selectorcircuits are divided into four columns: the selector circuit 321[1], theselector circuit 321[2], the selector circuits 321[4] to 321[6], and theselector circuits 321[8] to 321[12]. The input terminal IT of theselector circuit 321[1] in the first column is electrically connected tothe wiring VH through which a high-level potential is applied. Theoutput terminals OT1 and OT2 of the selector circuits 321[8] to 321[12]in the fourth column and the output terminal OT2 of the selector circuit321[6] in the third column are electrically connected to the externaloutput terminals Y0 to Y10. In FIG. 14, the external output terminals Y0to Y10 are provided with the binary numbers 0000 to 1010 in parentheses.In a manner similar to that described above, in the binary number, thefirst number from the left expresses the potential level of the externalinput terminal A3, the second number from the left expresses thepotential level of the external input terminal A2, the third number fromthe left expresses the potential level of the external input terminalA1, and the fourth number from the left expresses the potential level ofthe external input terminal A0.

Note that in the case where a signal is transmitted from the wiring VHto an external output terminal through a region (a region ZN1 or aregion ZN2 in FIG. 14) which is not provided with the selector circuit321 and is not electrically connected to the external input terminals,the corresponding digit becomes “0” regardless of the potentials of theexternal input terminals. For example, since there is no transistorswitching by the potentials of the external input terminals A2 and A2 bin the region ZN1, the second number from the left of the binary numberfor an external output terminal from which a signal is output is “0.”This means that the second number from the left of each of the binarynumbers for the external output terminals Y8, Y9, and Y10 is “0.” Foranother example, since there is no transistor switching by thepotentials of the external input terminals A0 and A0 b in the regionZN2, the fourth number from the left of the binary number for anexternal output terminal from which a signal is output is “0.” Thismeans that the fourth number from the left of the binary number for theexternal output terminal Y10 is “0.” As described above, in the casewhere there is a column including a region with no selector circuit 321and a signal is transmitted through the region, the correspondingexternal output terminal can be expressed by a binary number in a mannersimilar to that of the decoder circuit 403 when the corresponding digitfor the region is regarded as “0.”

During the operation of the decoder circuit 404, one of the transistorTr17[1] and the transistor Tr17[2] in the selector circuit 321 isbrought into a conducting state and the other of the transistor Tr17[1]and the transistor Tr17[2] is brought into a non-conducting state. Thetransistor in a conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₁] and thetransistor in a non-conducting state preferably operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀]. In otherwords, a potential at which one of the transistor Tr17[1] and thetransistor Tr17[2] operates with the current-voltage characteristics ofthe transistor Tr[Φ₁] is preferably applied from one of the wiringBG17[1] and the wiring BG17[2] to the back gate of one of the transistorTr17[1] and the transistor Tr17[2], and a potential at which the otherof the transistor Tr17[1] and the transistor Tr17[2] operates with thecurrent-voltage characteristics of the transistor Tr[Φ₀] is preferablyapplied from the other of the wiring BG17[1] and the wiring BG17[2] tothe back gate of the other of the transistor Tr17[1] and the transistorTr17[2].

As described above, when a predetermined potential is applied to theback gate of each of the transistors Tr17[1] and Tr17[2], theconducting/non-conducting states of the transistors Tr17[1] and Tr17[2]or the amount of current flowing in the transistor Tr17[1] and that inthe transistor Tr17[2] can be determined.

A method for determining the amount of current flowing in thetransistors Tr17[1] and Tr17[2] included in the decoder circuits 401 to404 is not limited to the above. For example, to increase the potentialof a signal to be output, the potential of the back gate of one of thetransistor Tr17[1] and the transistor Tr17[2] that is in a conductingstate in the selector circuit 321 can be set at a potential higher thanthe potential Φ₁ so that the amount of current flowing in the transistoris increased. To reduce the potential of a signal to be output, forexample, the potential of the back gate of one of the transistor Tr17[1]and the transistor Tr17[2] that is in a conducting state in the selectorcircuit 321 can be set at a potential lower than the potential Φ₁ sothat the amount of current flowing in the transistor is reduced.

In some cases, a signal output from the selector circuit 321 in the n-thcolumn or in a column near the n-th column has a lower potential than asignal output from the selector circuit 321[1] in the first column does.This is because a transistor in a column closer to the external outputterminals has a smaller area; thus, in particular, when the channelwidth of a transistor is small, the amount of current flowing therein issmall. It is also because the potential of a signal transmitted from thewiring VH to the external output terminal is decreased by the wiringresistance and the internal resistance of the selector circuit. Incontrast, a transistor in the first column or in a column near the firstcolumn can have a large area; thus, in particular, when the channelwidth of a transistor is large, the amount of current flowing therein islarge.

As described above, the amount of current flowing in the selectorcircuits 321 in the first column and a column near the first columnmight be different from the amount of current flowing in the selectorcircuits 321 in the n-th column and a column near the n-th column. Inthat case, the amount of current flowing in the entire decoder circuitcan be kept constant in the following manner: in each of the selectorcircuits 321 in the first column and a column near the first column, thepotential of the back gate of one of the transistor Tr17[1] and thetransistor Tr17[2] that is in a conducting state is set at a potentiallower than the potential Φ₁ to reduce the amount of current flowing inthe transistor, and in each of the selector circuits 321 in the n-thcolumn and a column near the n-th column, the potential of the back gateof one of the transistor Tr17[1] and the transistor Tr17[2] that is in aconducting state is set at a potential higher than the potential Φ₁ toincrease the amount of current flowing in the transistor. In the abovemanner, it is also possible to prevent a reduction in the potential of asignal in the selector circuits 321 in the n-th column and a column nearthe n-th column.

<<Row Driver Circuit>>

FIG. 15 illustrates a configuration example of a row driver circuit. Arow driver circuit 411 includes a transistor Tr18, an inverter circuitINV3, and an inverter circuit INV4.

Since all transistors included in the memory device of one embodiment ofthe present invention are n-channel transistors, transistors included inthe inverter circuits INV3 and INV4 are n-channel transistors. As aninverter circuit in which all transistors are n-channel transistors, theNOT circuit 201 described above can be used, for example.

A first terminal of the transistor Tr18 is electrically connected to aninput terminal of the inverter circuit INV3. An output terminal of theinverter circuit INV3 is electrically connected to an input terminal ofthe inverter circuit INV4. In particular, when the inverter circuit INV3and the inverter circuit INV4 are connected in series, the invertercircuit INV3 and the inverter circuit INV4 function as a buffer circuitthat restores a decayed signal.

A second terminal of the transistor Tr18 is electrically connected tothe wiring VL through which a low-level potential is applied. A gate ofthe transistor Tr18 is electrically connected to the wiring VH throughwhich a high-level potential is applied. An input terminal of theinverter circuit INV3 is electrically connected to a wiring DE. Anoutput terminal of the inverter circuit INV4 is electrically connectedto the wiring WL.

In a memory cell array in which memory cells are arranged in a matrix,one row driver circuit 411 is provided in each row. The wiring DE, whichis a wiring for supplying a row address signal, has a function ofselecting a word line. Specifically, the wiring DE has a function oftransmitting a signal from an output terminal of a row decoder to therow driver. When the transistor Tr18 is in a non-conducting state andthe wiring DE is at a high-level potential or a potential close to ahigh-level potential, a high-level potential is output to the wiring WLthrough the inverter circuit INV3 and the inverter circuit INV4.

Next, the operation of the row driver circuit 411 will be described.

FIG. 16 is a timing chart showing an operation example of the row drivercircuit 411. At Time T1, a potential close to a low-level potential isapplied to the wiring DE. Since the wiring WL is connected to the wiringDE through the inverter circuit INV3 and the inverter circuit INV4, thepotential of the wiring WL becomes a low-level potential. The row drivercircuit 411 is in a non-active state at Time T1; thus, the potential Φ₀is applied to a wiring BG18. This means that the transistor Tr18 is in anon-conducting state. Thus, a low-level potential applied to the secondterminal of the transistor Tr18 is not output to the first terminal ofthe transistor Tr18.

At Time T2, the row driver circuit 411 is in an active state; thus, thepotential Φ₁ is applied to the wiring BG18. As a result, the transistorTr18 is brought into a conducting state and a low-level potentialapplied to the second terminal of the transistor Tr18 is output to thefirst terminal of the transistor Tr18. Accordingly, the potential of thewiring DE becomes a low-level potential.

At Time T3, the potential Φ₁ remains being input to the wiring BG18 fromTime T2, and a high-level potential is input to the wiring DE. At thistime, the transistor Tr18 remains in a conducting state and thesource-drain voltage of the transistor Tr18 becomes a potentialdifference between a high-level potential and a low-level potential.Since a high-level potential from the wiring DE is applied to the inputterminal of the inverter circuit INV3, a potential lower than ahigh-level potential by the threshold voltage of the transistor includedin the inverter circuit INV4 is output to the wiring WL.

In the above manner, in the operation of the row driver circuit 411,application of the potential Φ₁ to the wiring BG18 enables thetransistor Tr18 to output a potential corresponding to the potential ofthe input terminal of the inverter circuit INV3 to the wiring WL.

<<Sense Amplifier/Precharge Circuit>>

FIG. 17 illustrates a configuration example of a senseamplifier/precharge circuit. In one embodiment of the present invention,a sense amplifier and a precharge circuit are collectively described asone circuit as in FIG. 17.

A sense amplifier/precharge circuit 501 includes transistors Tr19 toTr24.

A first terminal of the transistor Tr19 is electrically connected to afirst terminal of the transistor Tr20, a first terminal of thetransistor Tr22, a gate of the transistor Tr23, and a wiring BL1. Asecond terminal of the transistor Tr19 is electrically connected to afirst terminal of the transistor Tr21, a first terminal of thetransistor Tr23, a gate of the transistor Tr22, and a wiring BL2. A gateof the transistor Tr19 is electrically connected to a gate of thetransistor Tr20, a gate of the transistor Tr21, and a wiring EQ. Asecond terminal of the transistor Tr20 is electrically connected to asecond terminal of the transistor Tr21 and a wiring VM through which amiddle-level potential is applied. A first terminal of the transistorTr24 is electrically connected to a second terminal of the transistorTr22 and a second terminal of the transistor Tr23. A second terminal ofthe transistor Tr24 is electrically connected to the wiring VL throughwhich a low-level potential is applied. A gate of the transistor Tr24 iselectrically connected to a wiring SE.

In a memory cell array in which memory cells are arranged in a matrix,one sense amplifier/precharge circuit 501 is provided in each column.The wiring BL1 and the wiring BL2 each function as a bit line and have afunction of transmitting a read bit signal to the memory cell array. Thewiring SE has a function of applying a low-level potential to one of thewiring BL1 and the wiring BL2. Specifically, when a high-level potentialis applied to the wiring SE, a low-level potential is applied to thesecond terminal of the transistor Tr22 and the second terminal of thetransistor Tr23. In that case, when the transistor Tr22 or thetransistor Tr23 is in a conducting state, the wiring BL1 or the wiringBL2 is set at a low-level potential. The wiring EQ has a function ofequalizing the potentials of the wirings BL1 and BL2; application of ahigh-level potential to the wiring EQ makes the potentials of thewirings BL1 and BL2 substantially equal to each other.

Then, an operation example of the sense amplifier/precharge circuit 501is described. In this operation example, a memory cell connected to thesense amplifier/precharge circuit 501 is the memory cell 304 illustratedin FIG. 4D. Thus, the wiring BL is electrically connected to the wiringBL1 and the wiring BLB is electrically connected to the wiring BL2.

FIG. 18 is a timing chart showing the operation example of the senseamplifier/precharge circuit 501. At Time T1, the potential Φ₁ is appliedto wirings BG19 to BG24. Thus, the transistors Tr19 to Tr24 each operatewith the current-voltage characteristics of the transistor Tr[Φ₁] shownin FIG. 3. Furthermore, a low-level potential is input to the wiring SE,a low-level potential is input to the wiring EQ, and a low-levelpotential is input to the wiring WL. In an initial state, a potentialhigher than or equal to a low-level potential and lower than or equal toa high-level potential is input to the wiring BL1 and the wiring BL2 (inFIG. 18, the potential of the wiring BL1 is a potential between alow-level potential and a middle-level potential, and the potential ofthe wiring BL2 is a potential between a middle-level potential and ahigh-level potential). Note that “WL” in FIG. 18 denotes a word line forselecting the memory cell 304 electrically connected to the senseamplifier/precharge circuit 501.

At Time T2, a high-level potential is applied to the wiring EQ. Thus,the transistors Tr19 to Tr21 are brought into conducting states and amiddle-level potential is applied to the wirings BL1 and BL2. After thewirings BL1 and BL2 are set at a middle-level potential, a low-levelpotential is applied to the wiring EQ to make the transistors Tr19 toTr21 non-conducting states.

At Time T3, data reading of a memory cell selected by the wiring WL thatis connected to the wirings BL1 and BL2 and functions as a word line isperformed. Thus, a high-level potential is applied to the wiring WLelectrically connected to the memory cell. As a result, a potentialretained in the memory cell is supplied from the memory cell to thewirings BL1 and BL2. At this time, a potential between a middle-levelpotential and a high-level potential is supplied to the wiring BL1, anda potential between a low-level potential and a middle-level potentialis supplied to the wiring BL2. Note that when potential supply to thewiring BL1 and the wiring BL2 is completed, a low-level potential isapplied to the wiring WL to terminate the data reading of the memorycell.

At Time T4, the potential read from the memory cell is amplified. Ahigh-level potential is applied to the wiring SE so that the transistorTr24 is brought into a conducting state. Since the potential of thewiring BL1 is a potential between a middle-level potential and ahigh-level potential, the transistor Tr23 can also be brought into aconducting state. Thus, a low-level potential from the wiring VL isapplied to the wiring BL2, and the potential of the wiring BL2 isreduced to a low-level potential.

As described above, a sense amplifier/precharge circuit can be obtainedwithout employing a CMOS structure by using the configuration of thesense amplifier/precharge circuit 501.

In Embodiment 1, one embodiment of the present invention has beendescribed. Other embodiments of the present invention are described inEmbodiments 2 to 8. Note that one embodiment of the present invention isnot limited thereto. In other words, various embodiments of theinvention are described in this embodiment and the other embodiments,and one embodiment of the present invention is not limited to aparticular embodiment. Although an example in which a channel formationregion, a source region, a drain region, or the like of a transistorincludes an oxide semiconductor is described as one embodiment of thepresent invention, one embodiment of the present invention is notlimited thereto. Depending on circumstances or conditions, varioustransistors or a channel formation region, a source region, a drainregion, or the like of a transistor in one embodiment of the presentinvention may include various semiconductors. Depending on circumstancesor conditions, various transistors or a channel formation region, asource region, a drain region, or the like of a transistor in oneembodiment of the present invention may include, for example, at leastone of silicon, germanium, silicon germanium, silicon carbide, galliumarsenide, aluminum gallium arsenide, indium phosphide, gallium nitride,and an organic semiconductor. Alternatively, for example, depending oncircumstances or conditions, various transistors or a channel formationregion, a source region, a drain region, or the like of a transistor inone embodiment of the present invention does not necessarily include anoxide semiconductor.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 2)

In this embodiment, a semiconductor device of one embodiment of thedisclosed invention will be described.

<Semiconductor Device 1>

FIG. 19A is a block diagram of a semiconductor device including thecircuits described in Embodiment 1. FIG. 19B is a circuit diagram of apixel included in the semiconductor device. A semiconductor device 800functions as a display device.

A display device illustrated in FIG. 19A includes a region includingpixels of display elements (hereinafter referred to as a pixel portion802), a circuit portion that is provided outside the pixel portion 802and includes a circuit for driving the pixels (hereinafter, the circuitportion is referred to as a driver circuit portion 804), circuits havinga function of protecting elements (hereinafter, the circuits arereferred to as protection circuits 806), and a terminal portion 807.Note that the protection circuits 806 are not necessarily provided.

Part or the whole of the driver circuit portion 804 is preferably formedover a substrate over which the pixel portion 802 is formed. Thus, thenumber of components and the number of terminals can be reduced. Whenpart or the whole of the driver circuit portion 804 is not formed overthe substrate over which the pixel portion 802 is formed, the part orthe whole of the driver circuit portion 804 can be mounted by chip onglass (COG) bonding or tape automated bonding (TAB).

The pixel portion 802 includes a plurality of circuits for drivingdisplay elements arranged in X (X is a natural number of 2 or more) rowsand Y (Y is a natural number of 2 or more) columns (hereinafter, thecircuits are referred to as pixel circuits 801). The driver circuitportion 804 includes circuits such as a circuit for supplying a signal(scan signal) to select a pixel (hereinafter, the circuit is referred toas a scan line driver circuit 804 a) and a circuit for supplying asignal (data signal) to drive a display element in a pixel (hereinafter,the circuit is referred to as a signal line driver circuit 804 b).

The scan line driver circuit 804 a includes a shift register or thelike. The scan line driver circuit 804 a receives a signal for drivingthe shift register through the terminal portion 807 and outputs asignal. For example, the scan line driver circuit 804 a receives a startpulse signal, a clock signal, or the like and outputs a pulse signal.The scan line driver circuit 804 a has a function of controlling thepotentials of wirings supplied with scan signals (hereinafter referredto as scan lines GL_1 to GL_X). Note that a plurality of scan linedriver circuits 804 a may be provided to control the scan lines GL_1 toGL_X separately. Alternatively, the scan line driver circuit 804 a has afunction of supplying an initialization signal. Without being limitedthereto, another signal can be supplied from the scan line drivercircuit 804 a.

The scan line driver circuit 804 a may include any one of the decodercircuits 401 to 404 described in Embodiment 1. The use of any one of thedecoder circuits 401 to 404 enables a pulse signal to be input to anyone of the scan lines GL_1 to GL_X When potentials input to the externalinput terminals included in any one of the decoder circuits 401 to 404are gradually varied, the scan lines GL_1 to GL_X can be scanned andselected one by one.

The signal line driver circuit 804 b includes a shift register or thelike. The signal line driver circuit 804 b receives a signal (imagesignal) from which a data signal is generated, as well as a signal fordriving the shift register, through the terminal portion 807. The signalline driver circuit 804 b has a function of generating a data signal tobe written to the pixel circuit 801 from the image signal. In addition,the signal line driver circuit 804 b has a function of controllingoutput of a data signal in response to a pulse signal produced by inputof a start pulse signal, a clock signal, or the like. Furthermore, thesignal line driver circuit 804 b has a function of controlling thepotentials of wirings supplied with data signals (hereinafter referredto as signal lines DL_1 to DL_Y). Without being limited thereto, anothersignal can be supplied from the signal line driver circuit 804 b.

The signal line driver circuit 804 b may include at least one of thedecoder circuits 401 to 404 described in Embodiment 1. The use of anyone of the decoder circuits 401 to 404 enables a data signal to be inputto any one of the signal lines DL_1 to DL_Y. When potentials input tothe external input terminals included in any one of the decoder circuits401 to 404 are gradually varied, the signal lines DL_1 to DL_Y can bescanned and selected one by one.

The signal line driver circuit 804 b includes a plurality of analogswitches, for example. The signal line driver circuit 804 b can output,as data signals, time-divided image signals obtained by sequentiallyturning on the plurality of analog switches.

A data signal is input to each of the pixel circuits 801 through one ofthe scan lines GL to which scan signals are applied. Data writing anddata retention of the data signal in each of the plurality of pixelcircuits 801 are controlled by the scan line driver circuit 804 a. Forexample, to the pixel circuit 801 in the m-th row and the n-th column (mis a natural number of X or less, and n is a natural number of Y orless), a pulse signal is input from the scan line driver circuit 804 athrough the scan line GL_m, and a data signal is input from the signalline driver circuit 804 b through the signal line DL_n in accordancewith the potential of the scan line GL_m.

The protection circuit 806 in FIG. 19A is connected to, for example, thescan line GL between the scan line driver circuit 804 a and the pixelcircuit 801. Alternatively, the protection circuit 806 is connected tothe signal line DL between the signal line driver circuit 804 b and thepixel circuit 801. Alternatively, the protection circuit 806 can beconnected to a wiring between the scan line driver circuit 804 a and theterminal portion 807. Alternatively, the protection circuit 806 can beconnected to a wiring between the signal line driver circuit 804 b andthe terminal portion 807. Note that the terminal portion 807 refers to aportion having terminals for inputting power, control signals, and imagesignals from external circuits to the display device.

The protection circuit 806 electrically connects a wiring connected tothe protection circuit to another wiring when a potential out of acertain range is applied to the wiring connected to the protectioncircuit.

As illustrated in FIG. 19A, the protection circuits 806 provided for thepixel portion 802 and the driver circuit portion 804 can improve theresistance of the display device to overcurrent generated byelectrostatic discharge (ESD) or the like. Note that the configurationof the protection circuits 806 is not limited thereto; for example, theprotection circuit 806 can be connected to the scan line driver circuit804 a or the signal line driver circuit 804 b. Alternatively, theprotection circuit 806 can be connected to the terminal portion 807.

One embodiment of the present invention is not limited to the example inFIG. 19A, in which the driver circuit portion 804 includes the scan linedriver circuit 804 a and the signal line driver circuit 804 b. Forexample, only the scan line driver circuit 804 a may be formed, and aseparately prepared substrate over which a signal line driver circuit isformed (e.g., a driver circuit board formed using a single-crystalsemiconductor film or a polycrystalline semiconductor film) may bemounted.

Each of the plurality of pixel circuits 801 in FIG. 19A can have theconfiguration illustrated in FIG. 19B, for example.

The pixel circuit 801 illustrated in FIG. 19B includes a transistor 852,a transistor 854, a capacitor 862, and a light-emitting element 872.

One of a source and a drain of the transistor 852 is electricallyconnected to the signal line DL_n through which a data signal isapplied. A gate of the transistor 852 is electrically connected to thescan line GL_m through which a gate signal is applied.

The transistor 852 has a function of controlling writing of a datasignal.

A first terminal of the capacitor 862 is electrically connected to awiring through which a potential is applied (hereinafter referred to asa potential supply line VL_a), and a second terminal of the capacitor862 is electrically connected to the other of the source and the drainof the transistor 852.

The capacitor 862 functions as a storage capacitor for retaining writtendata.

One of a source and a drain of the transistor 854 is electricallyconnected to the potential supply line VL_a. A gate of the transistor854 is electrically connected to the other of the source and the drainof the transistor 852.

One of an anode and a cathode of the light-emitting element 872 iselectrically connected to a potential supply line VL_b, and the other ofthe anode and the cathode of the light-emitting element 872 iselectrically connected to the other of the source and the drain of thetransistor 854.

A high power supply potential VDD is applied to one of the potentialsupply line VL_a and the potential supply line VL_b, and a low powersupply potential VSS is applied to the other of the potential supplyline VL_a and the potential supply line VL_b.

For example, in the display device including the pixel circuits 801 inFIG. 19B, the scan line driver circuit 804 a in FIG. 19A sequentiallyselects the pixel circuits 801 row by row to turn on the transistors852, and data signals are written.

When the transistor 852 is turned off, the pixel circuit 801 to whichthe data has been written is brought into a holding state. Furthermore,the amount of current flowing between the source and the drain of thetransistor 854 is controlled in accordance with the potential of thewritten data signal. The light-emitting element 872 emits light with aluminance corresponding to the amount of flowing current. This operationis sequentially performed row by row; thus, an image can be displayed.

<Semiconductor Device 2>

FIGS. 20A to 20C illustrate a semiconductor device including at leastone of the decoder circuits 401 to 404 described in Embodiment 1. Asemiconductor device 900 functions as an image sensor.

FIG. 20A illustrates an imaging device in one embodiment of the presentinvention. The imaging device includes a pixel array 26 including pixelblocks 21 arranged in a matrix, a circuit 22 (row driver) having afunction of driving the pixel blocks 21, a circuit 23 (CDS circuit) forperforming correlated double sampling (CDS) on an output signal of thepixel block 21, a circuit 24 (e.g., an A/D converter) having a functionof converting analog data output from the circuit 23 to digital data,and a circuit 25 (column driver) having a function of selecting andreading data converted in the circuit 24. Note that a structure withoutthe circuit 23 can be employed.

As illustrated in FIG. 20B, for example, the pixel block 21 can includea plurality of pixels 20 (pixels 20 a, 20 b, 20 c, and 20 d). Although adetailed structure will be described later, in the pixel block 21, someof the transistors are used in common by the plurality of pixels 20.

FIG. 20C illustrates a circuit diagram of the circuit 23 and a blockdiagram of the circuit 24 that are connected to one column of the pixelblock 21. The circuit 23 can include a transistor 51, a transistor 52, acapacitor C3, and a capacitor C4. Furthermore, the circuit 24 caninclude a comparator circuit 27 and a counter circuit 29.

Note that a transistor 53 functions as a current source circuit. Awiring 91 (OUT1) is electrically connected to one of a source and adrain of the transistor 53, and a power supply line is connected to theother of the source and the drain of the transistor 53. As the powersupply line, a low-potential power supply line can be used, for example.Bias voltage is always applied to a gate of the transistor 53.

In the circuit 23, one of a source and a drain of the transistor 51 iselectrically connected to one of a source and a drain of the transistor52 and one electrode of the capacitor C3. The one of the source and thedrain of the transistor 52 is electrically connected to one electrode ofthe capacitor C4 and a wiring 92 (OUT2). The other of the source and thedrain of the transistor 51 is electrically connected to a high-potentialpower supply line (CDSVDD) to which a reference potential is supplied,for example. The other electrode of the capacitor C4 is electricallyconnected to a low-potential power supply line (CDSVSS), for example.

An operation example of the circuit 23 when the circuit 23 is connectedto the pixel 20 is described. First, the transistors 51 and 52 areturned on. Next, the potential of imaging data is output from the pixel20 to the wiring 91 (OUT1), and a reference potential (CDSVDD) is heldin the wiring 92 (OUT2). Then, the transistor 51 is turned off and areset potential (here, a potential higher than the potential of theimaging data, for example, a VDD potential) is output from the pixel 20to the wiring 91 (OUT1). At this time, the wiring 92 (OUT2) has apotential obtained by adding the absolute value of a difference betweenthe potential of the imaging data and the reset potential to thereference potential (CDSVDD). Thus, a potential signal with little noisethat is obtained by adding the net potential of the imaging data to thereference potential (CDSVDD) can be supplied to the circuit 24.

Note that when the reset potential is lower than the potential of theimaging data (e.g., a GND potential), the wiring 92 (OUT2) has apotential that is obtained by subtracting the absolute value of thedifference between the potential of the imaging data and the resetpotential from the reference potential (CDSVDD).

In the circuit 24, a signal potential that is input from the circuit 23to the comparator circuit 27 and a swept reference potential (RAMP) arecompared. Then, in accordance with the output of the comparator circuit27, the counter circuit 29 operates to output a digital signal to awiring 93 (OUT3).

A pixel block 21 a illustrated in FIG. 21 is a specific configurationexample of the pixel block 21. In the pixel block 21 a, each pixelincludes a photoelectric conversion element PD (photodiode), atransistor 41, a transistor 42, a transistor 43, and a capacitor C5. Inthe pixel block 21 a, a transistor 44, a transistor 45, and a transistor46 are used in common by four pixels (the pixels 20 a, 20 b, 20 c, and20 d) that are arranged in an extending direction of the wiring 91(OUT1) (hereinafter, this direction is referred to as a Y direction).Although the pixel block 21 a in FIG. 21 includes four pixels, the pixelblock 21 a may include two pixels, three pixels, or five or more pixels.

In each of the pixels (the pixels 20 a, 20 b, 20 c, and 20 d), an outputterminal of the photoelectric conversion element PD is electricallyconnected to a first terminal of the transistor 41 and a first terminalof the transistor 42. A second terminal of the transistor 41 iselectrically connected to a first terminal of the transistor 43 and afirst terminal of the capacitor C5. A wiring 71 is electricallyconnected to an input terminal of the photoelectric conversion elementPD and a second terminal of the capacitor C5. A gate of the transistor41 is electrically connected to a wiring 65. A gate of the transistor 42is electrically connected to a wiring 62. In the pixels, gates of thetransistors 43 are electrically connected to wirings 61 a to 61 d. Ineach pixel, a second terminal of the transistor 43 is electricallyconnected to a first terminal of the transistor 44 and a gate of thetransistor 45, and a second terminal of the transistor 42 iselectrically connected to a wiring 72 and a second terminal of thetransistor 44. A gate of the transistor 44 is electrically connected toa wiring 63. A first terminal of the transistor 45 is electricallyconnected to a wiring 74. A second terminal of the transistor 45 iselectrically connected to a first terminal of the transistor 46. Asecond terminal of the transistor 46 is electrically connected to thewiring 91. A gate of the transistor 46 is electrically connected to awiring 64. A first terminal of a capacitor C6 is electrically connectedto the second terminals of the transistors 43 included in the pixels 20a and 20 b. A second terminal of the capacitor C6 is electricallyconnected to the wiring 71.

In the pixel block 21 a, the wiring 72, the wiring 74, the wiring 62,the wiring 63, and the wiring 65 can be used in common by four pixels.In addition, these wirings can be used in common by another pixel block21 a provided in the Y direction.

In the pixel block 21 a, when the wiring 71 electrically connects thepixel 20 a to the pixel 20 b and another wiring 71 electrically connectsthe pixel 20 c to the pixel 20 d as illustrated in FIG. 21, wirings canbe minimized. Furthermore, the wiring 71 can be used in common byanother pixel block 21 a provided in an extending direction of thewiring 64 (hereinafter, this direction is referred to as an Xdirection).

The wiring 61 a, the wiring 61 b, the wiring 61 c, and the wiring 61 dcan be used in common by another pixel block 21 a provided in the Xdirection.

FIG. 22 illustrates the configurations of a pixel block 21 a[m, n] and apixel block 21 a[m, n+1] that is adjacent to the pixel block 21 a[m, n]in the horizontal direction. Note that m and n are given natural numbersand denote a row and a column, respectively. The pixel block 21 a[m, n]includes a pixel 20 a[m, n], a pixel 20 b[m, n], a pixel 20 c[m, n], anda pixel 20 d[m, n]. The pixel block 21 a[m, n+1] includes a pixel 20a[m, n+1], a pixel 20 b[m, n+1], a pixel 20 c[m, n+1], and a pixel 20d[m, n+1]. The pixel block 21 a[m, n] is electrically connected to awiring 74[n−1] and a wiring 62[n]. The pixel block 21 a[m, n+1] iselectrically connected to a wiring 74[n] and a wiring 62[n+1]. Thetransistors 44 to 46 and the capacitor C6 are shared by the pixel block21 a[m, n] and the pixel block 21 a[m, n+1]. Thus, the wiring 63[n]electrically connected to the gate of the transistor 44 and a wiring 91[n] electrically connected to the second terminal of the transistor 46are also shared by the pixel block 21 a[m, n] and the pixel block 21a[m, n+1]. When the wiring 72 and the wiring 74 have the same potentialin the operating condition of the pixel 20, one of the wiring 72 and thewiring 74 can be eliminated and the other of the wiring 72 and thewiring 74 can be used in common by the pixel block 21 a[m, n] and thepixel block 21 a[m, n+1], as illustrated in FIG. 22.

Here, the circuit 22 includes at least one of the decoder circuits 401to 404. The semiconductor device 900 has a function of transmittingimaging data acquired by pixel blocks in each row to the circuit 23 andthe circuit 24 by row-by-row scanning. Application of any of theabove-described decoder circuits achieves such scanning. That is,similarly to the case of the semiconductor device 800, when potentialsinput to the external input terminals included in any one of the decodercircuits 401 to 404 are gradually varied, the scan lines included in thesemiconductor device 900 can be scanned and selected one by one.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 3)

Described in this embodiment are transistors of one embodiment of thedisclosed invention.

Transistors of embodiments of the present invention each preferablyinclude an nc-OS or a CAAC-OS, which is described in Embodiment 5.

<Structure Example 1 of Transistor>

An example of a transistor of one embodiment of the present invention isdescribed below. FIGS. 23A to 23C are a top view and cross-sectionalviews illustrating a transistor of one embodiment of the presentinvention. FIG. 23A is a top view. FIG. 23B is a cross-sectional viewtaken along a dashed-dotted line X1-X2 in FIG. 23A. FIG. 23C is across-sectional view taken along a dashed-dotted line Y1-Y2 in FIG. 23A.Note that for simplification of the drawing, some components in the topview in FIG. 23A are not illustrated.

The transistor 1200 a includes a conductor 1205 and a conductor 1260that function as gate electrodes; an insulator 1220, an insulator 1222,an insulator 1224, and an insulator 1250 that function as gateinsulating layers; a metal oxide 1230 that includes a region where achannel is formed; a conductor 1240 a and a conductor 1241 a thatfunction as one of a source and a drain; a conductor 1240 b and aconductor 1241 b that function as the other of the source and the drain;an insulator 1214; an insulator 1216; the insulator 1270; and aninsulator 1280 that contains excess oxygen.

The metal oxide 1230 includes a metal oxide 1230 a, a metal oxide 1230 bover the metal oxide 1230 a, and a metal oxide 1230 c over the metaloxide 1230 b. When the transistor 1200 a is turned on, current flows (achannel is formed) mainly in the metal oxide 1230 b. In contrast,although current might flow through a region in the vicinity of theinterface (a mixed region in some cases) between the metal oxide 1230 band the metal oxides 1230 a and 1230 c, the rest of the metal oxides1230 a and 1230 c might function as insulators at the other region.

The insulator 1214 preferably contains a material having a barrierproperty against oxygen and hydrogen. For example, silicon nitrideformed by a CVD method, that can be given as an example of a film havinga barrier property with respect to hydrogen, can be used for theinsulator 1214. For the insulator 1214, a metal oxide such as aluminumoxide, hafnium oxide, or tantalum oxide is preferably used, for example.In particular, aluminum oxide has an excellent blocking effect thatprevents permeation of oxygen and impurities such as hydrogen andmoisture which cause a change in the electrical characteristics of thetransistor. Accordingly, the use of aluminum oxide can prevent entry ofimpurities such as hydrogen and moisture into the transistor 1200 a inand after a manufacturing process of the transistor. In addition,release of oxygen from the metal oxide in the transistor 1200 a can beprevented. Therefore, aluminum oxide is suitably used for a protectivefilm for the transistor 1200 a.

The insulator 1216 is provided over the insulator 1214. For theinsulator 1216, a material such as silicon oxide, silicon oxynitride,silicon nitride oxide, silicon nitride, aluminum oxide, aluminumoxynitride, aluminum nitride oxide, or aluminum nitride can be used.

A two-layer structure of the conductor 1205 a and the conductor 1205 bis illustrated in FIGS. 23A to 23C, but there is no limitation on thestructure, and a single-layer structure or a stacked-layer structure ofthree or more layers may be used. For example, a conductor having abarrier property with respect to hydrogen, e.g., tantalum nitride, maybe used as the conductor 1205 a, and tungsten, which has highconductivity, may be stacked thereover as the conductor 1205 b. The useof the combination of the materials can prevent diffusion of hydrogeninto the metal oxide 1230 while conductivity of a wiring is ensured.

Each of the insulators 1220 and 1224 is preferably an insulatorcontaining oxygen, such as a silicon oxide film or a silicon oxynitridefilm. In particular, the insulator 1224 is preferably an insulatorcontaining excess oxygen (containing oxygen in excess of that in thestoichiometric composition). In the case where such an insulatorcontaining excess oxygen is provided in contact with the metal oxide inthe transistor 1200 a, oxygen vacancies in the metal oxide can becompensated. Note that the insulators 1220 and 1224 are not necessarilyformed of the same material.

The insulator 1222 preferably has a single-layer structure or astacked-layer structure formed using an insulator containing siliconoxide, silicon oxynitride, silicon nitride oxide, aluminum oxide,hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate(PZT), strontium titanate (SrTiO₃), (Ba,Sr)TiO₃ (BST), or the like.Aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, siliconoxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxidemay be added to the insulator, for example. The insulator may besubjected to nitriding treatment. A layer of silicon oxide, siliconoxynitride, or silicon nitride may be stacked over the insulator.

Note that the insulator 1222 may have a stacked-layer structure of twoor more layers. In this case, the stacked layers are not necessarilyformed of the same material but may be formed of different materials.

In the case where the insulator 1222 including a high-k material isprovided between the insulator 1220 and the insulator 1224, electronscan be trapped in the insulator 1222 under specific conditions, and thethreshold voltage can be increased. As a result, the insulator 1222 isnegatively charged in some cases.

For example, in the case where the insulator 1220 and the insulator 1224are formed using silicon oxide and the insulator 1222 is formed using amaterial having a lot of electron trap states such as hafnium oxide,aluminum oxide, or tantalum oxide, the state where the potential of theconductor 1205 is higher than the potential of the source electrode andthe drain electrode is kept at a temperature higher than the operatingtemperature or the storage temperature of the semiconductor device(e.g., at a temperature of 125° C. or higher and 450° C. or lower,typically 150° C. or higher and 300° C. or lower) for 10 milliseconds orlonger, typically one minute or longer. Thus, electrons are moved fromthe metal oxide in the transistor 1200 a to the conductor 1205. At thistime, some of the moving electrons are trapped by the electron trapstates of the insulator 1222.

In the transistor in which a necessary amount of electrons is trapped bythe electron trap states of the insulator 1222, the threshold voltage isshifted in the positive direction. By controlling the voltage of theconductor 1205, the amount of electrons to be trapped can be controlled,and thus the threshold voltage can be controlled. The transistor 1200 ahaving the structure is a normally-off transistor which is in anon-conducting state (also referred to as an off state) even when thegate voltage is 0 V.

The treatment for trapping the electrons may be performed in themanufacturing process of the transistor. For example, the treatment ispreferably performed at any step before factory shipment, such as afterthe formation of a conductor connected to a source conductor or a drainconductor of the transistor, after the preceding process (waferprocessing), after a wafer-dicing step, or after packaging. In eithercase, it is preferable that the transistor be not exposed totemperatures of 125° C. or higher for one hour or more after the processfor trapping electrons.

When the insulators 1220 and 1224 are formed using silicon oxide and theinsulator 1222 is formed using hafnium oxide, the insulators 1220 and1224 may be formed by a chemical vapor deposition method (including aCVD method and an atomic layer deposition (ALD) method) and theinsulator 1222 may be formed by a sputtering method. Note that using asputtering method for the formation of the insulator 1222 might easilycrystallize the insulator 1222 at low temperature to generate a largeamount of fixed charges.

The threshold voltages can be controlled by appropriate adjustment ofthe thicknesses of the insulator 1220, the insulator 1222, and theinsulator 1224.

The insulator 1222 is preferably formed using a material having abarrier property with respect to oxygen and hydrogen. When such amaterial is used, release of oxygen from the metal oxide in thetransistor 1200 a or entry of an impurity such as hydrogen from theoutside can be prevented.

The metal oxide 1230 a, the metal oxide 1230 b, and the metal oxide 1230c are formed using a metal oxide such as an In-M-Zn oxide (M is Al, Ga,Y, or Sn). An In—Ga oxide or an In—Zn oxide may be used as the metaloxide 1230.

The metal oxide 1230 according to the present invention is describedbelow.

A metal oxide used for the metal oxide 1230 preferably contains at leastindium or zinc. In particular, indium and zinc are preferably contained.In addition, aluminum, gallium, yttrium, tin, or the like is preferablycontained. Furthermore, one or more elements selected from boron,silicon, titanium, iron, nickel, germanium, zirconium, molybdenum,lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, orthe like may be contained.

Here, the case where a metal oxide contains indium, an element M, andzinc is considered. The element M is aluminum, gallium, yttrium, tin, orthe like. Alternatively, the element M can be boron, silicon, titanium,iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium,neodymium, hafnium, tantalum, tungsten, magnesium, or the like. Notethat two or more of the above elements may be used in combination as theelement Min some cases.

First, preferred ranges of the atomic ratio of indium, the element M,and zinc contained in the metal oxide of the present invention aredescribed with reference to FIGS. 26A to 26C. Note that the proportionof oxygen atoms is not shown in FIGS. 26A to 26C. The terms of theatomic ratio of indium, the element M, and zinc contained in the metaloxide are denoted by [In], [M], and [Zn], respectively.

In FIGS. 26A to 26C, broken lines indicate a line where the atomic ratio[In]:[M]:[Zn] is (1+α):(1−α):1, where α is a real number greater than orequal to −1 and less than or equal to 1, a line where the atomic ratio[In]:[M]:[Zn] is (1+α):(1−α):2, a line where the atomic ratio[In]:[M]:[Zn] is (1+α):(1−α):3, a line where the atomic ratio[In]:[M]:[Zn] is (1+α):(1−α):4, and a line where the atomic ratio[In]:[M]:[Zn] is (1+α): (1−α):5.

Dashed-dotted lines indicate a line where the atomic ratio [In]:[M]:[Zn]is 1:1:β, where β is a real number greater than or equal to 0, a linewhere the atomic ratio [In]:[M]:[Zn] is 1:2:β, a line where the atomicratio [In]:[M]:[Zn] is 1:3:β, a line where the atomic ratio[In]:[M]:[Zn] is 1:4:β, a line where the atomic ratio [In]:[M]:[Zn] is2:1:β, and a line where the atomic ratio [In]:[M]:[Zn] is 5:1:β.

The metal oxide in FIGS. 26A to 26C with an atomic ratio of[In]:[M]:[Zn]=0:2:1 or an atomic ratio that is in the neighborhoodthereof is likely to have a spinel crystal structure.

FIGS. 26A and 26B illustrate examples of the preferred ranges of theatomic ratio of indium, the element M, and zinc contained in the metaloxide of one embodiment of the present invention.

FIG. 27 illustrates an example of the crystal structure of InMZnO₄ whoseatomic ratio [In]:[M]:[Zn] is 1:1:1. The crystal structure in FIG. 27 isInMZnO₄ observed from a direction parallel to a b-axis. Note that ametal element in a layer that contains M, Zn, and oxygen (hereinafter,this layer is referred to as an “(M,Zn) layer”) in FIG. 27 representsthe element M or zinc. In that case, the proportion of the element M isthe same as the proportion of zinc. The element M and zinc can bereplaced with each other, and their arrangement is random.

Note that InMZnO₄ has a layered crystal structure (also referred to as alayered structure) and includes one layer that contains indium andoxygen (hereinafter referred to as an In layer) for every two (M,Zn)layers that contain the element M, zinc, and oxygen, as illustrated inFIG. 27.

Indium and the element M can be replaced with each other. Thus, when theelement Min the (M,Zn) layer is replaced with indium, the layer can alsobe referred to as an (In,M,Zn) layer. In that case, a layered structurethat contains one In layer for every two (In,M,Zn) layers is obtained.

A metal oxide whose atomic ratio [In]:[M]:[Zn] is 1:1:2 has a layeredstructure that contains one In layer for every three (M,Zn) layers. Inother words, if [Zn] is higher than [In] and [M], the proportion of the(M,Zn) layer to the In layer becomes higher when the metal oxide iscrystallized.

Note that in the case where the number of (M,Zn) layers with respect toone In layer is not an integer in the metal oxide, the metal oxide mighthave a plurality of kinds of layered structures where the number of(M,Zn) layers with respect to one In layer is an integer. For example,in the case of [In]:[M]:[Zn]=1:1:1.5, the metal oxide may have a mix ofa layered structure including one In layer for every two (M,Zn) layersand a layered structure including one In layer for every three (M,Zn)layers.

For example, in the case where the metal oxide is formed with asputtering apparatus, a film having an atomic ratio deviated from theatomic ratio of a target is formed. In particular, [Zn] in the filmmight be smaller than [Zn] in the target depending on the substratetemperature in deposition.

A plurality of phases (e.g., two phases or three phases) exist in themetal oxide in some cases. For example, with an atomic ratio[In]:[M]:[Zn] that is close to 0:2:1, two phases of a spinel crystalstructure and a layered crystal structure are likely to exist. Inaddition, with an atomic ratio [In]:[M]:[Zn] that is close to 1:0:0, twophases of a bixbyite crystal structure and a layered crystal structureare likely to exist. In the case where a plurality of phases exist inthe metal oxide, a grain boundary might be formed between differentcrystal structures.

In addition, the metal oxide containing indium in a higher proportioncan have high carrier mobility (electron mobility). This is because in ametal oxide containing indium, the element M, and zinc, the s orbital ofheavy metal mainly contributes to carrier transfer, and when the indiumcontent in the metal oxide is increased, overlaps of the s orbitals ofindium atoms are increased; therefore, a metal oxide having a highcontent of indium has a higher carrier mobility than a metal oxidehaving a low content of indium.

In contrast, when the indium content and the zinc content in a metaloxide become lower, carrier mobility becomes lower. Thus, with atomicratios of [In]:[M]:[Zn]=0:1:0 and in the vicinity thereof (e.g., aregion C in FIG. 26C), insulation performance becomes better.

Accordingly, the metal oxide of one embodiment of the present inventionpreferably has an atomic ratio represented by a region A in FIG. 26A.With the atomic ratio, a layered structure with high carrier mobilityand a few grain boundaries is easily obtained.

A region B in FIG. 26B represents an atomic ratio of [In]:[M]:[Zn]=4:2:3or 4:2:4.1 and the vicinity thereof. The vicinity includes an atomicratio of [In]:[M]:[Zn]=5:3:4. A metal oxide with an atomic ratiorepresented by the region B is an excellent metal oxide that hasparticularly high crystallinity and high carrier mobility.

Note that a condition where a metal oxide forms a layered structure isnot uniquely determined by an atomic ratio. There is a difference in thedegree of difficulty in forming a layered structure among atomic ratios.Even with the same atomic ratio, whether a layered structure is formedor not depends on a formation condition. Thus, the illustrated regionseach represent an atomic ratio with which a metal oxide has a layeredstructure, and boundaries of the regions A to C are not clear.

Next, the case where the metal oxide is used for a transistor will bedescribed.

Note that when the metal oxide semiconductor is used for a transistor,carrier scattering or the like at a grain boundary can be reduced; thus,the transistor can have high field-effect mobility. In addition, thetransistor can have high reliability.

A metal oxide with low carrier density is preferably used for thetransistor. For example, a metal oxide whose carrier density is lowerthan 8×10¹¹ cm⁻³, preferably lower than 1×10¹¹ cm⁻³, further preferablylower than 1×10¹⁰ cm⁻³, and greater than or equal to 1×10⁻⁹ cm⁻³ isused.

A highly purified intrinsic or substantially highly purified intrinsicmetal oxide has few carrier generation sources and thus can have a lowcarrier density. The highly purified intrinsic or substantially highlypurified intrinsic metal oxide has a low density of defect states andaccordingly has a low density of trap states in some cases.

Charge trapped by the trap states in the metal oxide takes a long timeto be released and may behave like fixed charge. Thus, a transistorwhose channel region is formed in a metal oxide having a high density oftrap states has unstable electrical characteristics in some cases.

In order to obtain stable electrical characteristics of the transistor,it is effective to reduce the concentration of impurities in the metaloxide. In addition, in order to reduce the concentration of impuritiesin the metal oxide, the concentration of impurities in a film that isadjacent to the metal oxide is preferably reduced. Examples ofimpurities include hydrogen, nitrogen, alkali metal, alkaline earthmetal, iron, nickel, and silicon.

Here, the influence of impurities in the metal oxide is described.

When silicon or carbon that is one of Group 14 elements is contained inthe metal oxide, defect states are formed. Thus, the concentration ofsilicon or carbon in the metal oxide and around an interface with themetal oxide (measured by secondary ion mass spectrometry (SIMS)) is setlower than or equal to 2×10¹⁸ atoms/cm³, and preferably lower than orequal to 2×10¹⁷ atoms/cm³.

When the metal oxide contains alkali metal or alkaline earth metal,defect states are formed and carriers are generated, in some cases.Thus, a transistor including a metal oxide that contains alkali metal oralkaline earth metal is likely to be normally-on. Therefore, it ispreferable to reduce the concentration of alkali metal or alkaline earthmetal in the metal oxide. Specifically, the concentration of alkalimetal or alkaline earth metal in the metal oxide measured by SIMS is setlower than or equal to 1×10¹⁸ atoms/cm³, and preferably lower than orequal to 2×10¹⁶ atoms/cm³.

When the oxide semiconductor contains nitrogen, the metal oxide easilybecomes n-type by generation of electrons serving as carriers and anincrease of carrier density. Thus, a transistor whose semiconductorincludes a metal oxide that contains nitrogen is likely to benormally-on. For this reason, nitrogen in the metal oxide is preferablyreduced as much as possible; for example, the concentration of nitrogenin the metal oxide, which is measured by SIMS, can be lower than 5×10¹⁹atoms/cm³, preferably lower than or equal to 5×10¹⁸ atoms/cm³, furtherpreferably lower than or equal to 1×10¹⁸ atoms/cm³, and still furtherpreferably lower than or equal to 5×10¹⁷ atoms/cm³.

Hydrogen contained in a metal oxide reacts with oxygen bonded to a metalatom to be water, and thus causes an oxygen vacancy, in some cases. Dueto entry of hydrogen into the oxygen vacancy, an electron serving as acarrier is generated in some cases. Furthermore, in some cases, bondingof part of hydrogen to oxygen bonded to a metal atom causes generationof an electron serving as a carrier. Thus, a transistor including ametal oxide that contains hydrogen is likely to be normally-on.Accordingly, it is preferable that hydrogen in the metal oxide bereduced as much as possible. Specifically, the hydrogen concentration ofthe metal oxide measured by SIMS is set lower than 1×10²⁰ atoms/cm³,preferably lower than 1×10¹⁹ atoms/cm³, further preferably lower than5×10¹⁸ atoms/cm³, and still further preferably lower than 1×10¹⁸atoms/cm³.

When a metal oxide with sufficiently reduced impurity concentration isused for a channel formation region in a transistor, the transistor canhave stable electrical characteristics.

Next, the case where the metal oxide has a two-layer structure or athree-layer structure is described. A band diagram of insulators thatare in contact with a stacked structure of a metal oxide S1, a metaloxide S2, and a metal oxide S3, a band diagram of insulators that are incontact with a stacked structure of the metal oxide S1 and the metaloxide S2, and a band diagram of insulators that are in contact with astacked structure of the metal oxide S2 and the metal oxide S3 aredescribed with reference to FIGS. 28A to 28C.

FIG. 28A is an example of a band diagram of a stacked structureincluding an insulator I1, the metal oxide S1, the metal oxide S2, themetal oxide S3, and an insulator 12 in a film thickness direction. FIG.28B is an example of a band diagram of a stacked structure including theinsulator I1, the metal oxide S2, the metal oxide S3, and the insulator12 in a film thickness direction. FIG. 28C is an example of a banddiagram of a stacked structure including the insulator I1, the metaloxide S1, the metal oxide S2, and the insulator 12 in a thicknessdirection. Note that for easy understanding, the band diagrams show theconduction band minimum (Ec) of each of the insulator I1, the metaloxide S1, the metal oxide S2, the metal oxide S3, and the insulator 12.

The conduction band minimum of each of the metal oxide S1 and the metaloxide S3 is closer to the vacuum level than the conduction band minimumof the metal oxide S2 is. Typically, the conduction band minimum of themetal oxide S2 is lower than the conduction band minimum of each of themetal oxide S1 and the metal oxide S3. Specifically, a difference in theconduction band minimum between the metal oxide S2 and the metal oxideS1 is preferably greater than or equal to 0.15 eV and less than or equalto 2 eV and further preferably greater than or equal to 0.5 eV and lessthan or equal to 1 eV. In addition, a difference in the conduction bandminimum between the metal oxide S2 and the metal oxide S3 is preferablygreater than or equal to 0.15 eV and less than or equal to 2 eV andfurther preferably greater than or equal to 0.5 eV and less than orequal to 1 eV. This means that the electron affinity of the metal oxideS2 is preferably higher than the electron affinity of each of the metaloxide S1 and the metal oxide S3. Specifically, a difference in theelectron affinity between the metal oxide S1 and the metal oxide S2 ispreferably greater than or equal to 0.15 eV and less than or equal to 2eV and further preferably greater than or equal to 0.5 eV and less thanor equal to 1 eV, and a difference in the electron affinity between themetal oxide S3 and the metal oxide S2 is preferably greater than orequal to 0.15 eV and less than or equal to 2 eV and further preferablygreater than or equal to 0.5 eV and less than or equal to 1 eV.

As shown in FIGS. 28A to 28C, the conduction band minimum of each of themetal oxides Si to S3 is gradually varied. In other words, theconduction band minimum is continuously varied or continuouslyconnected. In order to obtain such a band diagram, the density of defectstates in a mixed layer formed at an interface between the metal oxidesS1 and S2 or an interface between the metal oxides S2 and S3 ispreferably made low.

Specifically, when the metal oxides S1 and S2 or the metal oxides S2 andS3 contain the same element (as a main component) in addition to oxygen,a mixed layer with a low density of defect states can be formed. Forexample, in the case where the metal oxide S2 is an In—Ga—Zn oxide, itis preferable to use an In—Ga—Zn oxide, a Ga—Zn oxide, gallium oxide, orthe like as each of the metal oxides S1 and S3.

At this time, the metal oxide S2 serves as a main carrier path. Sincethe density of defect states at the interface between the metal oxidesS1 and S2 and the interface between the metal oxides S2 and S3 can bemade low, the influence of interface scattering on carrier conduction issmall, and high on-state current can be obtained.

When an electron is trapped in a trap state, the trapped electronbehaves like fixed charge; thus, the threshold voltage of the transistoris shifted in a positive direction. The metal oxides S1 and S3 can makethe trap state apart from the metal oxide S2. This structure can preventthe positive shift of the threshold voltage of the transistor.

A material whose conductivity is sufficiently lower than that of themetal oxide S2 is used for the metal oxides S1 and S3. In that case, themetal oxide S2, the interface between the metal oxides S1 and S2, andthe interface between the metal oxides S2 and S3 mainly function as achannel region. For example, a metal oxide with high insulationperformance and the atomic ratio represented by the region C in FIG. 26Cmay be used as each of the metal oxides S1 and S3. Note that the regionC in FIG. 26C represents the atomic ratio of [In]:[M]:[Zn]=0:1:0 or thevicinity thereof.

In the case where a metal oxide with the atomic ratio represented by theregion A is used as the metal oxide S2, it is particularly preferable touse a metal oxide with [M]/[In] of greater than or equal to 1,preferably greater than or equal to 2 as each of the metal oxides S1 andS3. In addition, it is suitable to use a metal oxide with sufficientlyhigh insulation performance and [M]/([Zn]+[In]) of greater than or equalto 1 as the metal oxide S3.

The insulator 1250 can have a single-layer structure or a stacked-layerstructure using, for example, one or more of an insulator containingsilicon oxide, silicon oxynitride, silicon nitride oxide, aluminumoxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconatetitanate (PZT), strontium titanate (SrTiO₃), (Ba,Sr)TiO₃ (BST), or thelike. Alternatively, aluminum oxide, bismuth oxide, germanium oxide,niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttriumoxide, or zirconium oxide may be added to the insulator, for example.Alternatively, the insulator may be subjected to nitriding treatment. Alayer of silicon oxide, silicon oxynitride, or silicon nitride may bestacked over the insulator.

As the insulator 1250, like the insulator 1224, an oxide insulator thatcontains oxygen in excess of the stoichiometric composition ispreferably used. When such an insulator containing excess oxygen isprovided in contact with the metal oxide 1230, oxygen vacancies in themetal oxide 1230 can be reduced.

As the insulator 1250, an insulating film formed of aluminum oxide,aluminum oxynitride, gallium oxide, gallium oxynitride, yttrium oxide,yttrium oxynitride, hafnium oxide, hafnium oxynitride, silicon nitride,or the like, which has barrier properties with respect to oxygen andhydrogen, can be used. The insulator 1250 formed of such a material eachfunction as a layer that prevents release of oxygen from the metal oxide1230 and entry of an impurity such as hydrogen from the outside.

Note that the insulator 1250 may have a stacked-layer structure similarto that of the insulator 1220, the insulator 1222, and the insulator1224. When the insulator 1250 includes an insulator in which a necessaryamount of electrons is trapped by electron trap states, the thresholdvoltage of the transistor 1200 a can be shifted in the positivedirection. The transistor 1200 a having the structure is a normally-offtransistor that is in a non-conducting state (also referred to as an offstate) even when the gate voltage is 0 V.

In addition to the insulator 1250, a barrier film may be providedbetween the metal oxide 1230 and the conductor 1260 in the semiconductordevice illustrated in FIGS. 23A to 23C. The metal oxide 1230 c may havea barrier property.

For example, an insulating film containing excess oxygen is provided incontact with the metal oxide 1230 and covered by a barrier film, wherebythe composition of the metal oxide can be almost the same as thestoichiometric composition or can be in a supersaturated statecontaining more oxygen than that in the stoichiometric composition. Itis also possible to prevent entry of impurities such as hydrogen intothe metal oxide 1230.

One of a pair of the conductor 1240 a and the conductor 1241 a and apair of the conductor 1240 b the conductor 1241 b functions as a sourceelectrode, and the other pair functions as a drain electrode.

Any of metals such as aluminum, titanium, chromium, nickel, copper,yttrium, zirconium, molybdenum, silver, tantalum, and tungsten, or analloy containing any of the metals as its main component can be used foreach of the conductors 1240 a, 1241 a, 1240 b, and 1241 b. Although atwo-layer structure is illustrated in the drawings, a single-layerstructure or a stacked-layer structure of three or more layers may beused.

For example, a titanium film is used for each of the conductor 1240 aand the conductor 1240 b, and an aluminum film is used for each of theconductor 1241 a and the conductor 1241 b. Other examples include atwo-layer structure where an aluminum film is stacked over a tungstenfilm, a two-layer structure where a copper film is stacked over acopper-magnesium-aluminum alloy film, a two-layer structure where acopper film is stacked over a titanium film, and a two-layer structurewhere a copper film is stacked over a tungsten film.

Other examples include a three-layer structure where a titanium film ora titanium nitride film is formed, an aluminum film or a copper film isstacked over the titanium film or the titanium nitride film, and atitanium film or a titanium nitride film is formed over the aluminumfilm or the copper film; and a three-layer structure where a molybdenumfilm or a molybdenum nitride film is formed, an aluminum film or acopper film is stacked over the molybdenum film or the molybdenumnitride film, and a molybdenum film or a molybdenum nitride film isformed over the aluminum film or the copper film. Note that atransparent conductive material containing indium oxide, tin oxide, orzinc oxide may be used.

Conductors 1260 a and 1260 b functioning as a gate electrode can beformed using, for example, a metal selected from aluminum, chromium,copper, tantalum, titanium, molybdenum, and tungsten, an alloycontaining any of these metals as its component, an alloy containing anyof these metals in combination, or the like. Furthermore, one or both ofmanganese and zirconium may be used. Alternatively, a semiconductortypified by polycrystalline silicon doped with an impurity element suchas phosphorus, or a silicide such as nickel silicide may be used.

For example, a two-layer structure where aluminum is used for theconductor 1260 a and a titanium film is used for the conductor 1260 b isused. Other examples include a two-layer structure where a titanium filmis stacked over a titanium nitride film, a two-layer structure where atungsten film is stacked over a titanium nitride film, and a two-layerstructure where a tungsten film is stacked over a tantalum nitride filmor a tungsten nitride film.

Other examples include a three-layer structure where a titanium film isformed, an aluminum film is stacked over the titanium film, and atitanium film is formed over the aluminum film. An alloy film or anitride film that contains aluminum and one or more metals selected fromtitanium, tantalum, tungsten, molybdenum, chromium, neodymium, andscandium may be used.

The conductor 1260 can also be formed using a light-transmittingconductive material such as indium tin oxide, indium oxide containingtungsten oxide, indium zinc oxide containing tungsten oxide, indiumoxide containing titanium oxide, indium tin oxide containing titaniumoxide, indium zinc oxide, or indium tin oxide to which silicon oxide isadded. The conductor 1260 can have a stacked-layer structure of theabove light-transmitting conductive material and the above metal.

The insulator 1270 may be provided to cover the conductor 1260. In thecase where the insulator 1280 is formed using an oxide material fromwhich oxygen is released, the insulator 1270 is formed using a substancehaving a barrier property with respect to oxygen to prevent theconductor 1260 from being oxidized by the released oxygen.

For example, the insulator 1270 can be formed using metal oxide such asaluminum oxide. The insulator 1270 is formed to a thickness with whichthe oxidation of the conductor 1260 is prevented. For example, thethickness of the insulator 1270 is set greater than or equal to 1 nm andless than or equal to 10 nm, preferably greater than or equal to 3 nmand less than or equal to 7 nm.

Thus, the oxidation of the conductor 1260 can be prevented, and oxygenreleased from the insulator 1280 can be supplied to the metal oxide 1230efficiently.

In the structure, a region of the metal oxide 1230 b where a channel isformed can be electrically surrounded by an electric field of theconductor 1260 that functions as a gate electrode. Because of thes-channel structure, the channel might be formed in the entire metaloxide 1230 b, which faces the conductor 1260 with the insulator 1250interposed therebetween. In the s-channel structure, a large amount ofcurrent can flow between a source and a drain of a transistor, so that ahigh on-state current can be obtained. Furthermore, a voltage is appliedfrom all directions to a region where a channel is formed, and thus, atransistor in which leakage current is suppressed can be provided.

<Structure Example 2 of Transistor>

FIGS. 24A to 24C illustrate a structure example of a transistordifferent from the transistor 1200 a. FIG. 24A illustrates a top surfaceof a transistor 1200 b. FIG. 24B is a cross-sectional view taken along adashed-dotted line X1-X2 in FIG. 24A, and FIG. 24C is a cross-sectionalview taken along a dashed-dotted line Y1-Y2 in FIG. 24A.

Note that in the transistor 1200 b in FIGS. 24A to 24C, componentshaving the same function as the components in the transistor 1200 a inFIGS. 23A to 23C are denoted by the same reference numerals.

In the structure illustrated in FIGS. 24A to 24C, the metal oxide 1230c, the insulator 1250, and the conductor 1260 are formed in an openingformed in the insulator 1280. Furthermore, an end portion of each of theconductor 1240 a, the conductor 1240 b, the conductor 1241 a, and theconductor 1241 b is aligned with an end portion of the opening formed inthe insulator 1280. Furthermore, an end portion of each of the conductor1240 a, the conductor 1240 b, the conductor 1241 a, and the conductor1241 b is aligned with part of an end portion of the metal oxide 1230.Therefore, the conductor 1240 a, the conductor 1240 b, the conductor1241 a, and the conductor 1241 b can be formed concurrently with themetal oxide 1230 or the opening in the insulator 1280. This leads to areduction in the number of masks and steps and improvement in yield andproductivity.

Since the transistor 1200 b illustrated in FIGS. 24A to 24C has astructure in which the conductors 1240 a, 1240 b, 1241 a, and 1241 bhardly overlap with the conductor 1260, the parasitic capacitance addedto the conductor 1260 can be reduced. Thus, the transistor 1200 b with ahigh operation frequency can be provided.

<Structure Example 3 of Transistor>

FIGS. 25A to 25C illustrate a structure example of a transistordifferent from the transistor 1200 a and the transistor 1200 b. FIG. 25Aillustrates a top surface of a transistor 1200 c. For simplification ofthe drawing, some films are not illustrated in FIG. 25A. FIG. 25B is across-sectional view taken along a dashed-dotted line X1-X2 in FIG. 25A,and FIG. 25C is a cross-sectional view taken along a dashed-dotted lineY1-Y2.

Note that in the transistor 1200 c in FIGS. 25A to 25C, componentshaving the same function as the components in the transistor 1200 a inFIGS. 23A to 23C are denoted by the same reference numerals.

In the structure illustrated in FIGS. 25A to 25C, a region 1245 afunctioning as one of a source region and a drain region and a region1245 b functioning as the other of the source region and the drainregion are provided in the metal oxide 1230. The regions can be formedin such a manner that an impurity such as boron, phosphorus, or argon isadded to the metal oxide 1230 using the conductor 1260 as a mask.Alternatively, the regions can be formed in such a manner that theinsulator 1280 is formed of an insulator containing hydrogen, such as asilicon nitride film and hydrogen is diffused to part of the metal oxide1230. This leads to a reduction in the number of masks and steps andimprovement in yield and productivity.

<Structure Example 4 of Transistor>

FIGS. 29A to 29C are a top view and cross-sectional views of atransistor 1400 a. FIG. 29A is a top view. FIG. 29B is a cross-sectionalview taken along a dashed-dotted line A1-A2 in FIG. 29A and FIG. 29C isa cross-sectional view taken along a dashed-dotted line A3-A4 in FIG.29A. Note that for simplification of the drawing, some components arenot illustrated in the top view in FIG. 29A. Note that the dashed-dottedline A1-A2 and the dashed-dotted line A3-A4 are sometimes referred to asa channel length direction of the transistor 1400 a and a channel widthdirection of the transistor 1400 a, respectively.

The transistor 1400 a includes a substrate 1450; an insulator 1401 overthe substrate 1450; a conductor 1414 over the insulator 1401; aninsulator 1402 covering the conductor 1414; an insulator 1403 over theinsulator 1402; an insulator 1404 over the insulator 1403; a metal oxide1431 and a metal oxide 1432 which are stacked in this order over theinsulator 1404; a conductor 1421 in contact with top and side surfacesof the metal oxide 1432; a conductor 1423 also in contact with the topand side surfaces of the metal oxide 1432; a conductor 1422 over theconductor 1421; a conductor 1424 over the conductor 1423; an insulator1405 the conductors 1422 and 1424, a metal oxide 1433 in contact withthe metal oxides 1431 and 1432, the conductors 1421 to 1424, and theinsulator 1405; an insulator 1406 over the metal oxide 1433; a conductor1411 over the insulator 1406; a conductor 1412 over the conductor 1411;a conductor 1413 over the conductor 1412; an insulator 1407 covering theconductor 1413; and an insulator 1408 over the insulator 1407. Note thatthe metal oxides 1431 to 1433 are collectively referred to as a metaloxide 1430.

The metal oxide 1432 is a semiconductor and functions as a channel ofthe transistor 1400 a.

Furthermore, the metal oxides 1431 and 1432 include a region 1441 and aregion 1442. The region 1441 is formed in the vicinity of a region wherethe conductor 1421 is in contact with the metal oxides 1431 and 1432.The region 1442 is formed in the vicinity of a region where theconductor 1423 is in contact with the metal oxides 1431 and 1432.

The regions 1441 and 1442 function as low-resistance regions. The region1441 contributes to a decrease in the contact resistance between theconductor 1421 and the metal oxides 1431 and 1432. The region 1442 alsocontributes to a decrease in the contact resistance between theconductor 1423 and the metal oxides 1431 and 1432.

The conductors 1421 and 1422 function as one of source and drainelectrodes of the transistor 1400 a. The conductors 1423 and 1424function as the other of the source and drain electrodes of thetransistor 1400 a.

The conductor 1422 is configured to allow less oxygen to passtherethrough than the conductor 1421. It is thus possible to prevent adecrease in the conductivity of the conductor 1421 due to oxidation.

The conductor 1424 is also configured to allow less oxygen to passtherethrough than the conductor 1423. It is thus possible to prevent adecrease in the conductivity of the conductor 1423 due to oxidation.

The conductors 1411 to 1413 function as a first gate electrode of thetransistor 1400 a.

The conductors 1411 and 1413 are configured to allow less oxygen to passtherethrough than the conductor 1412. It is thus possible to prevent adecrease in the conductivity of the conductor 1412 due to oxidation.

The insulator 1406 functions as a first gate insulator of the transistor1400 a.

The conductor 1414 functions as a second gate electrode of thetransistor 1400 a.

The potential applied to the conductors 1411 to 1413 may be the same asor different from that applied to the conductor 1414. The conductor 1414may be omitted in some cases.

The insulators 1401 to 1404 function as a base insulator of thetransistor 1400 a. The insulators 1402 to 1404 also function as a secondgate insulator of the transistor 1400 a.

The insulators 1405 to 1408 function as a protective insulator or aninterlayer insulator of the transistor 1400 a.

As illustrated in FIG. 29C, the side surface of the metal oxide 1432 issurrounded by the conductor 1411. With this structure, the metal oxide1432 can be electrically surrounded by an electric field of theconductor 1411. Such a structure of a transistor in which asemiconductor is electrically surrounded by an electric field of a gateelectrode is referred to as a surrounded channel (s-channel) structure.With such a structure, a channel is formed in the entire metal oxide1432 (bulk). In the s-channel structure, a large amount of current canflow between a source and a drain of a transistor, increasing theon-state current of the transistor.

The s-channel structure, because of its high on-state current, issuitable for a semiconductor device such as large-scale integration(LSI) which requires a miniaturized transistor. A semiconductor deviceincluding the miniaturized transistor can have a high integration degreeand high density.

In the transistor 1400 a, a region serving as a gate electrode is formedso as to fill an opening 1415 formed in the insulator 1405 or the like,that is, in a self-aligned manner.

As illustrated in FIG. 29B, the conductors 1411 and 1422 have a regionwhere they overlap with each other with the insulator positionedtherebetween. The conductors 1411 and 1423 also have a region where theyoverlap with each other with the insulator positioned therebetween.These regions function as the parasitic capacitance caused between thegate electrode and the source or drain electrode and might decrease theoperation speed of the transistor 1400 a. This parasitic capacitance canbe reduced by providing the insulator 1405 in the transistor 1400 a. Theinsulator 1405 preferably contains a material with a low relativedielectric constant.

FIG. 30A is an enlarged view of the center of the transistor 1400 a. InFIG. 30A, a width L_(G) denotes the length of the bottom surface of theconductor 1411, which faces parallel to the top surface of the metaloxide 1432 with the insulator 1406 and the metal oxide 1433 positionedtherebetween. The width L_(G) is the line width of the gate electrode.In FIG. 30A, a width L_(SD) denotes the length between the conductors1421 and 1423, i.e., the length between the source electrode and thedrain electrode.

The width L_(SD) is generally determined by the minimum feature size. Asillustrated in FIG. 30A, the width L_(G) is narrower than the widthL_(SD). This means that in the transistor 1400 a, the line width of thegate electrode can be made narrower than the minimum feature size;specifically, the width L_(G) can be greater than or equal to 5 nm andless than or equal to 60 nm, preferably greater than or equal to 5 nmand less than or equal to 30 nm.

In FIG. 30A, a height H_(SD) denotes the total thickness of theconductors 1421 and 1422, or the total thickness of the conductors 1423and 1424.

The thickness of the insulator 1406 is preferably less than or equal tothe height H_(SD), in which case the electric field of the gateelectrode can be applied to the entire channel formation region. Thethickness of the insulator 1406 is less than or equal to 30 nm,preferably less than or equal to 10 nm.

The parasitic capacitance between the conductors 1422 and 1411 and theparasitic capacitance between the conductors 1424 and 1411 are inverselyproportional to the thickness of the insulator 1405. For example, thethickness of the insulator 1405 is preferably three times or more, andfurther preferably five times or more the thickness of the insulator1406, in which case the parasitic capacitance is negligibly small. As aresult, the transistor 1400 a can operate at high frequencies.

Components of the transistor 1400 a will be described below.

<<Metal Oxide Layer>>

First, a metal oxide that can be used as the metal oxides 1431 to 1433will be described.

The transistor 1400 a preferably has a low current (off-state current)flowing between a source and a drain when the transistor 1400 a is in anon-conducting state. Examples of the transistor with a low off-statecurrent include a transistor including an oxide semiconductor in achannel formation region.

The metal oxide 1432 is an oxide semiconductor containing indium (In),for example. The metal oxide 1432 can have high carrier mobility(electron mobility) by containing indium, for example. The metal oxide1432 preferably contains an element M The element M is preferablyaluminum (Al), gallium (Ga), yttrium (Y), tin (Sn), or the like. Otherelements that can be used as the element M are boron (B), silicon (Si),titanium (Ti), iron (Fe), nickel (Ni), germanium (Ge), zirconium (Zr),molybdenum (Mo), lanthanum (La), cerium (Ce), neodymium (Nd), hafnium(Hf), tantalum (Ta), tungsten (W), and the like. Note that two or moreof these elements may be used in combination as the element M. Theelement M is an element having high bonding energy with oxygen, forexample. The element M is an element whose bonding energy with oxygen ishigher than that of indium, for example. The element M is an elementthat can increase the energy gap of the metal oxide, for example.Furthermore, the metal oxide 1432 preferably contains zinc (Zn). Whencontaining zinc, the metal oxide is easily crystallized in some cases.

Note that the metal oxide 1432 is not limited to the oxide semiconductorcontaining indium. The metal oxide 1432 may be an oxide semiconductorthat does not contain indium and contains at least one of zinc, gallium,and tin (e.g., a zinc tin oxide or a gallium tin oxide).

For the metal oxide 1432, an oxide semiconductor with a wide energy gapis used, for example. The energy gap of the metal oxide 1432 is, forexample, greater than or equal to 2.5 eV and less than or equal to 4.2eV, preferably greater than or equal to 2.8 eV and less than or equal to3.8 eV, further preferably greater than or equal to 3 eV and less thanor equal to 3.5 eV.

The metal oxide 1432 is preferably a CAAC-OS film which is describedlater.

The metal oxides 1431 and 1433 include, for example, one or moreelements other than oxygen included in the metal oxide 1432. Since themetal oxides 1431 and 1433 include one or more elements other thanoxygen included in the metal oxide 1432, an interface state is lesslikely to be formed at an interface between the metal oxides 1431 and1432 and an interface between the metal oxides 1432 and 1433.

In the case of using an In-M-Zn oxide as the metal oxide 1431, when thetotal proportion of In and M is assumed to be 100 atomic %, theproportions of In and M are preferably set to be lower than 50 atomic %and higher than 50 atomic %, respectively, further preferably lower than25 atomic % and higher than 75 atomic %, respectively. When the metaloxide 1431 is formed by a sputtering method, a sputtering targetcontaining In, M, and Zn at an atomic ratio of 1:3:2, 1:3:4, or the likecan be used.

In the case of using an In-M-Zn oxide as the metal oxide 1432, when thetotal proportion of In and M is assumed to be 100 atomic %, theproportions of In and M are preferably set to be higher than 25 atomic %and lower than 75 atomic %, respectively, further preferably higher than34 atomic % and lower than 66 atomic %, respectively. When the metaloxide 1432 is formed by a sputtering method, a sputtering targetcontaining In, M, and Zn at an atomic ratio of 1:1:1, 1:1:1.2, 2:1:3,3:1:2, 4:2:4.1, or the like can be used. In particular, when asputtering target with an atomic ratio of In to Ga and Zn of 4:2:4.1 isused, the atomic ratio of In to Ga and Zn in the metal oxide 1432 may be4:2:3 or in the neighborhood of 4:2:3.

In the case of using an In-M-Zn oxide as the metal oxide 1433, when thetotal proportion of In and M is assumed to be 100 atomic %, theproportions of In and M are preferably set to be lower than 50 atomic %and higher than 50 atomic %, respectively, further preferably lower than25 atomic % and higher than 75 atomic %, respectively. For example,In:M:Zn is preferably 1:3:2 or 1:3:4. The metal oxide 1433 may be ametal oxide that is the same type as that of the metal oxide 1431.

The metal oxide 1431 or the metal oxide 1433 does not necessarilycontain indium in some cases. For example, the metal oxide 1431 or themetal oxide 1433 may be gallium oxide.

The function and effect of the metal oxide 1430, which includes a stackof the metal oxides 1431 to 1433, are described with reference to theenergy band diagram of FIG. 30B. FIG. 30B shows an energy band structureof a portion taken along a dashed line Y1-Y2 in FIG. 30A, that is, FIG.30B shows the energy band structure of a channel formation region of thetransistor 1400 a and the vicinity thereof.

In FIG. 30B, Ec1404, Ec1431, Ec1432, Ec1433, and Ec1406 indicate theconduction band minimum of the insulator 1404, the metal oxide 1431, themetal oxide 1432, the metal oxide 1433, and the insulator 1406,respectively.

Here, a difference in energy between the vacuum level and the conductionband minimum (the difference is also referred to as electron affinity)corresponds to a value obtained by subtracting an energy gap from adifference in energy between the vacuum level and the valence bandmaximum (the difference is also referred to as an ionization potential).Note that the energy gap can be measured using a spectroscopicellipsometer. The difference in energy between the vacuum level and thevalence band maximum can be measured using an ultraviolet photoelectronspectroscopy (UPS) device.

Since the insulators 1404 and 1406 are insulators, Ec1406 and Ec1404 arecloser to the vacuum level (i.e., have a lower electron affinity) thanEc1431, Ec1432, and Ec1433.

The metal oxide 1432 is a metal oxide having higher electron affinitythan those of the metal oxides 1431 and 1433. For example, as the metaloxide 1432, a metal oxide having an electron affinity higher than thoseof the metal oxides 1431 and 1433 by greater than or equal to 0.07 eVand less than or equal to 1.3 eV, preferably greater than or equal to0.1 eV and less than or equal to 0.7 eV, further preferably greater thanor equal to 0.15 eV and less than or equal to 0.4 eV is used. Note thatthe electron affinity is a difference in energy between the vacuum leveland the conduction band minimum.

An indium gallium oxide has a low electron affinity and a highoxygen-blocking property. Therefore, the metal oxide 1433 preferablyincludes an indium gallium oxide. The gallium atomic ratio [Ga/(In+Ga)]is, for example, higher than or equal to 70%, preferably higher than orequal to 80%, and further preferably higher than or equal to 90%.

At this time, when a gate voltage is applied, a channel is formed in themetal oxide 1432 having the highest electron affinity among the metaloxides 1431 to 1433.

Thus, electrons move mainly in the metal oxide 1432, not in the metaloxides 1431 and 1433. Hence, the on-state current hardly varies evenwhen the interface state density, which inhibits electron movement, ishigh at the interface between the metal oxide 1431 and the insulator1404 or at the interface between the metal oxide 1433 and the insulator1406. The metal oxides 1431 and 1433 function as an insulator.

In some cases, there is a mixed region of the metal oxides 1431 and 1432between the metal oxides 1431 and 1432. Furthermore, in some cases,there is a mixed region of the metal oxides 1432 and 1433 between themetal oxides 1432 and 1433. Because the mixed region has a low interfacestate density, a stack of the metal oxides 1431 to 1433 has a bandstructure where energy at each interface and in the vicinity of theinterface is changed continuously (continuous junction).

As described above, the interface between the metal oxides 1431 and 1432or the interface between the metal oxides 1432 and 1433 has a lowinterface state density. Hence, electron movement in the metal oxide1432 is less likely to be inhibited and the on-state current of thetransistor can be increased.

Electron movement in the transistor is inhibited, for example, in thecase where physical unevenness in a channel formation region is large.To increase the on-state current of the transistor, for example, rootmean square (RMS) roughness with a measurement area of 1 μm×1 μm of atop surface or a bottom surface of the metal oxide 1432 (a formationsurface; here, the top surface of the metal oxide 1431) is less than 1nm, preferably less than 0.6 nm, further preferably less than 0.5 nm,still further preferably less than 0.4 nm. The average surface roughness(Ra) with the measurement area of 1 μm×1 μm is less than 1 nm,preferably less than 0.6 nm, further preferably less than 0.5 nm, stillfurther preferably less than 0.4 nm. The maximum difference (P-V) withthe measurement area of 1 μm×1 μm is less than 10 nm, preferably lessthan 9 nm, further preferably less than 8 nm, still further preferablyless than 7 nm. The RMS roughness, Ra, and P-V can be measured with, forexample, a scanning probe microscope SPA-500 manufactured by SII NanoTechnology Inc.

The electron movement is also inhibited in the case where the density ofdefect states is high in the channel formation region. For example, inthe case where the metal oxide 1432 contains oxygen vacancies (V_(O)),donor levels are formed by entry of hydrogen into sites of oxygenvacancies in some cases. A state in which hydrogen enters sites ofoxygen vacancies is denoted by V_(O)H in the following description insome cases. V_(O)H is a factor of decreasing the on-state current of thetransistor because V_(O)H scatters electrons. Note that sites of oxygenvacancies become more stable by entry of oxygen than by entry ofhydrogen. Thus, by decreasing oxygen vacancies in the metal oxide 1432,the on-state current of the transistor can be increased in some cases.

For example, at a certain depth in the metal oxide 1432 or in a certainregion of the metal oxide 1432, the concentration of hydrogen measuredby secondary ion mass spectrometry (SIMS) is set to be higher than orequal to 1×10¹⁶ atoms/cm³ and lower than or equal to 2×10²⁰ atoms/cm³,preferably higher than or equal to 1×10¹⁶ atoms/cm³ and lower than orequal to 5×10¹⁹ atoms/cm³, further preferably higher than or equal to1×10¹⁶ atoms/cm³ and lower than or equal to 1×10¹⁹ atoms/cm³, stillfurther preferably higher than or equal to 1×10¹⁶ atoms/cm³ and lowerthan or equal to 5×10¹⁸ atoms/cm³.

To decrease oxygen vacancies in the metal oxide 1432, for example, thereis a method in which excess oxygen contained in the insulator 1404 ismoved to the metal oxide 1432 through the metal oxide 1431. In thatcase, the metal oxide 1431 is preferably a layer having anoxygen-transmitting property (a layer through which oxygen passes or istransmitted).

Note that in the case where the transistor has an s-channel structure, achannel is formed in the entire metal oxide 1432. Therefore, as themetal oxide 1432 has larger thickness, a channel region becomes larger.In other words, the thicker the metal oxide 1432 is, the larger theon-state current of the transistor is.

Moreover, the thickness of the metal oxide 1433 is preferably as smallas possible to increase the on-state current of the transistor. Forexample, the metal oxide 1433 has a region with a thickness of less than10 nm, preferably less than or equal to 5 nm, further preferably lessthan or equal to 3 nm. Meanwhile, the metal oxide 1433 has a function ofblocking entry of elements other than oxygen (such as hydrogen andsilicon) included in the adjacent insulator into the metal oxide 1432where a channel is formed. Thus, the metal oxide 1433 preferably has acertain thickness. For example, the metal oxide 1433 may have a regionwith a thickness greater than or equal to 0.3 nm, preferably greaterthan or equal to 1 nm, further preferably greater than or equal to 2 nm.The metal oxide 1433 preferably has an oxygen blocking property toinhibit outward diffusion of oxygen released from the insulator 1404 andthe like.

To improve reliability, preferably, the thickness of the metal oxide1431 is large and the thickness of the metal oxide 1433 is small. Forexample, the metal oxide 1431 has a region with a thickness greater thanor equal to 10 nm, preferably greater than or equal to 20 nm, furtherpreferably greater than or equal to 40 nm, still further preferablygreater than or equal to 60 nm. An increase in the thickness of themetal oxide 1431 can increase the distance from the interface betweenthe adjacent insulator and the metal oxide 1431 to the metal oxide 1432where a channel is formed. Note that the metal oxide 1431 has a regionwith a thickness of, for example, less than or equal to 200 nm,preferably less than or equal to 120 nm, further preferably less than orequal to 80 nm, otherwise the productivity of the semiconductor devicemight be decreased.

For example, a region in which the concentration of silicon is higherthan or equal to 1×10¹⁶ atoms/cm³ and lower than 1×10¹⁹ atoms/cm³ isprovided between the metal oxides 1432 and 1431. The concentration ofsilicon is preferably higher than or equal to 1×10¹⁶ atoms/cm³ and lowerthan 5×10¹⁸ atoms/cm³, further preferably higher than or equal to 1×10¹⁶atoms/cm³ and lower than 2×10¹⁸ atoms/cm³. A region in which theconcentration of silicon is higher than or equal to 1×10¹⁶ atoms/cm³ andlower than 1×10¹⁹ atoms/cm³ is provided between the metal oxides 1432and 1433. The concentration of silicon is preferably higher than orequal to 1×10¹⁶ atoms/cm³ and lower than 5×10¹⁸ atoms/cm³, furtherpreferably higher than or equal to 1×10¹⁶ atoms/cm³ and lower than2×10¹⁸ atoms/cm³. The concentration of silicon can be measured by SIMS.

It is preferable to reduce the concentration of hydrogen in the metaloxides 1431 and 1433 in order to reduce the concentration of hydrogen inthe metal oxide 1432. The metal oxides 1431 and 1433 each have a regionin which the concentration of hydrogen is higher than or equal to 1×10¹⁶atoms/cm³ and lower than or equal to 2×10²⁰ atoms/cm³. The concentrationof hydrogen is preferably higher than or equal to 1×10¹⁶ atoms/cm³ andlower than or equal to 5×10¹⁹ atoms/cm³, further preferably higher thanor equal to 1×10¹⁶ atoms/cm³ and lower than or equal to 1×10¹⁹atoms/cm³, and still further preferably higher than or equal to 1×10¹⁶atoms/cm³ and lower than or equal to 5×10¹⁸ atoms/cm³. The concentrationof hydrogen can be measured by SIMS. It is also preferable to reduce theconcentration of nitrogen in the metal oxides 1431 and 1433 in order toreduce the concentration of nitrogen in the metal oxide 1432. The metaloxides 1431 and 1433 each have a region in which the concentration ofnitrogen is higher than or equal to 1×10¹⁶ atoms/cm³ and lower than5×10¹⁹ atoms/cm³. The concentration of nitrogen is preferably higherthan or equal to 1×10¹⁶ atoms/cm³ and lower than or equal to 5×10¹⁸atoms/cm³, further preferably higher than or equal to 1×10¹⁶ atoms/cm³and lower than or equal to 1×10¹⁸ atoms/cm³, and still furtherpreferably higher than or equal to 1×10¹⁶ atoms/cm³ and lower than orequal to 5×10¹⁷ atoms/cm³. The concentration of nitrogen can be measuredby SIMS.

The metal oxides 1431 to 1433 may be formed by a sputtering method, achemical vapor deposition (CVD) method, a molecular beam epitaxy (MBE)method, a pulsed laser deposition (PLD) method, an atomic layerdeposition (ALD) method, or the like.

After the metal oxides 1431 and 1432 are formed, first heat treatment ispreferably performed. The first heat treatment can be performed at atemperature higher than or equal to 250° C. and lower than or equal to650° C., preferably higher than or equal to 450° C. and lower than orequal to 600° C., further preferably higher than or equal to 520° C. andlower than or equal to 570° C. The first heat treatment is performed inan inert gas atmosphere or an atmosphere containing an oxidizing gas at10 ppm or more, 1% or more, or 10% or more. The first heat treatment maybe performed under a reduced pressure. Alternatively, the first heattreatment may be performed in such a manner that heat treatment isperformed in an inert gas atmosphere, and then another heat treatment isperformed in an atmosphere containing an oxidizing gas at 10 ppm ormore, 1% or more, or 10% or more in order to compensate desorbed oxygen.The crystallinity of the metal oxides 1431 and 1432 can be increased bythe first heat treatment. Furthermore, impurities such as hydrogen andwater can be removed by the first heat treatment.

The above three-layer structure is an example. For example, a two-layerstructure without the metal oxide 1431 or 1433 may be employed.Alternatively, any one of the semiconductors shown as examples of themetal oxides 1431 to 1433 may be provided over or below the metal oxide1431 or over or below the metal oxide 1433, i.e., a four-layer structuremay be employed. Further alternatively, an n-layer structure (n is aninteger of 5 or more) in which any one of the semiconductors shown asexamples of the metal oxides 1431 to 1433 is provided at two or more ofthe following positions may be employed: over the metal oxide 1431,below the metal oxide 1431, over the metal oxide 1433, and below themetal oxide 1433.

<<Substrate>>

As the substrate 1450, for example, an insulator substrate, asemiconductor substrate, or a conductor substrate may be used. Examplesof the insulator substrate include a glass substrate, a quartzsubstrate, a sapphire substrate, a stabilized zirconia substrate (e.g.,an yttria-stabilized zirconia substrate), and a resin substrate.Examples of the semiconductor substrate include a semiconductorsubstrate of silicon, germanium, or the like, and a compoundsemiconductor substrate of silicon carbide, silicon germanium, galliumarsenide, indium phosphide, zinc oxide, or gallium oxide. Thesemiconductor substrate may be a silicon on insulator (SOI) substrate inwhich an insulating region is provided in the above semiconductorsubstrate. Examples of the conductor substrate include a graphitesubstrate, a metal substrate, an alloy substrate, and a conductive resinsubstrate. A substrate including a metal nitride, a substrate includinga metal oxide, or the like can also be used. An insulator substrateprovided with a conductor or a semiconductor, a semiconductor substrateprovided with a conductor or an insulator, a conductor substrateprovided with a semiconductor or an insulator, or the like can be used.Alternatively, any of these substrates over which an element is providedmay be used. Examples of the element provided over the substrate includea capacitor, a resistor, a switching element, a light-emitting element,and a memory element.

A flexible substrate may be used as the substrate 1450. As a method forproviding a transistor over a flexible substrate, there is a method inwhich a transistor is formed over a non-flexible substrate, and then thetransistor is separated and transferred to the substrate 1450 that is aflexible substrate. In that case, a separation layer is preferablyprovided between the non-flexible substrate and the transistor. As thesubstrate 1450, a sheet, a film, or foil containing a fiber may be used.The substrate 1450 may have elasticity. The substrate 1450 may have aproperty of returning to its original shape when bending or pulling isstopped. Alternatively, the substrate 1450 may have a property of notreturning to its original shape. The thickness of the substrate 1450 is,for example, greater than or equal to 5 μm and less than or equal to 700μm, preferably greater than or equal to 10 μm and less than or equal to500 μm, further preferably greater than or equal to 15 μm and less thanor equal to 300 μm. When the substrate 1450 has small thickness, theweight of the semiconductor device can be reduced. When the substrate1450 has small thickness, even in the case of using glass or the like,the substrate 1450 may have elasticity or a property of returning to itsoriginal shape when bending or pulling is stopped. Therefore, an impactapplied to the semiconductor device over the substrate 1450, which iscaused by dropping or the like, can be reduced. That is, a durablesemiconductor device can be provided.

For the flexible substrate 1450, metal, an alloy, a resin, glass, orfiber thereof can be used, for example. The flexible substrate 1450preferably has a lower coefficient of linear expansion becausedeformation due to an environment is suppressed. The flexible substrate1450 is preferably formed using, for example, a material whosecoefficient of linear expansion is lower than or equal to 1×10⁻³/K,lower than or equal to 5×10⁻⁵/K, or lower than or equal to 1×10⁻⁵/K.Examples of the resin include polyester, polyolefin, polyamide (e.g.,nylon or aramid), polyimide, polycarbonate, acrylic, andpolytetrafluoroethylene (PTFE). In particular, aramid is preferably usedas the material of the flexible substrate 1450 because of its lowcoefficient of linear expansion.

<<Base Insulator>>

The insulator 1401 has a function of electrically isolating thesubstrate 1450 from the conductor 1414.

The insulator 1401 or 1402 is formed using an insulator having asingle-layer structure or a stacked-layer structure. Examples of thematerial of an insulator include aluminum oxide, magnesium oxide,silicon oxide, silicon oxynitride, silicon nitride oxide, siliconnitride, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide,lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide.

The insulator 1402 may be formed using silicon oxide with high stepcoverage which is formed by reacting tetraethyl orthosilicate (TEOS),silane, or the like with oxygen, nitrous oxide, or the like.

After the insulator 1402 is formed, the insulator 1402 may be subjectedto planarization treatment using a CMP method or the like to improve theplanarity of the top surface thereof.

The insulator 1404 preferably contains an oxide. In particular, theinsulator 1404 preferably contains an oxide material from which part ofoxygen is released by heating. The insulator 1404 preferably contains anoxide containing oxygen more than that in the stoichiometriccomposition. Part of oxygen is released by heating from an oxide filmcontaining oxygen more than that in the stoichiometric composition.Oxygen released from the insulator 1404 is supplied to the metal oxide1430, so that oxygen vacancies in the metal oxide 1430 can be reduced.Consequently, changes in the electrical characteristics of thetransistor can be reduced and the reliability of the transistor can beimproved.

The oxide film containing oxygen more than that in the stoichiometriccomposition is an oxide film of which the amount of released oxygenconverted into oxygen atoms is greater than or equal to 1.0×10¹⁸atoms/cm³, preferably greater than or equal to 3.0×10²⁰ atoms/cm³ inthermal desorption spectroscopy (TDS) analysis. Note that thetemperature of the film surface in the TDS analysis is preferably higherthan or equal to 100° C. and lower than or equal to 700° C., or higherthan or equal to 100° C. and lower than or equal to 500° C.

The insulator 1404 preferably contains an oxide that can supply oxygento the metal oxide 1430. For example, a material containing siliconoxide or silicon oxynitride is preferably used.

Alternatively, a metal oxide such as aluminum oxide, aluminumoxynitride, gallium oxide, gallium oxynitride, yttrium oxide, yttriumoxynitride, hafnium oxide, or hafnium oxynitride may be used for theinsulator 1404.

To make the insulator 1404 contain excess oxygen, the insulator 1404 isformed in an oxygen atmosphere, for example. Alternatively, a regioncontaining excess oxygen may be formed by introducing oxygen into theinsulator 1404 that has been formed. Both the methods may be combined.

For example, oxygen (at least including any of oxygen radicals, oxygenatoms, and oxygen ions) may be introduced into the insulator 1404 thathas been formed, so that a region containing excess oxygen is formed.Oxygen can be introduced by, for example, an ion implantation method, anion doping method, a plasma immersion ion implantation method, plasmatreatment, or the like.

A gas containing oxygen can be used in an oxygen introducing method.Examples of the gas containing oxygen include oxygen, nitrous oxide,nitrogen dioxide, carbon dioxide, and carbon monoxide. Furthermore, arare gas may be included in the gas containing oxygen for the oxygenintroducing treatment. Moreover, hydrogen or the like may be included.For example, a mixed gas of carbon dioxide, hydrogen, and argon may beused.

After the insulator 1404 is formed, the insulator 1404 may be subjectedto planarization treatment using a CMP method or the like to improve theplanarity of the top surface thereof.

The insulator 1403 has a passivation function of preventing oxygencontained in the insulator 1404 from decreasing by bonding to metalcontained in the conductor 1414.

The insulator 1403 has a function of blocking oxygen, hydrogen, water,alkali metal, alkaline earth metal, and the like. Providing theinsulator 1403 can prevent outward diffusion of oxygen from the metaloxide 1430 and entry of hydrogen, water, or the like into the metaloxide 1430 from the outside.

The insulator 1403 can be, for example, a nitride insulator. The nitrideinsulator is formed using silicon nitride, silicon nitride oxide,aluminum nitride, aluminum nitride oxide, or the like. Note that insteadof the nitride insulator, an oxide insulator having a blocking effectagainst oxygen, hydrogen, water, and the like may be provided. Examplesof the oxide insulator include aluminum oxide, aluminum oxynitride,gallium oxide, gallium oxynitride, yttrium oxide, yttrium oxynitride,hafnium oxide, and hafnium oxynitride.

The threshold voltage of the transistor 1400 a can be controlled byinjecting electrons into a charge trap layer. The charge trap layer ispreferably provided in the insulator 1402 or the insulator 1403. Forexample, when the insulator 1403 is formed using hafnium oxide, aluminumoxide, tantalum oxide, aluminum silicate, or the like, the insulator1403 can function as a charge trap layer.

<<Gate Electrode>>

The conductors 1411 to 1414 each preferably have a single-layerstructure or a stacked-layer structure of a conductor containing alow-resistance material selected from copper (Cu), tungsten (W),molybdenum (Mo), gold (Au), aluminum (Al), manganese (Mn), titanium(Ti), tantalum (Ta), nickel (Ni), chromium (Cr), lead (Pb), tin (Sn),iron (Fe), cobalt (Co), ruthenium (Ru), platinum (Pt), iridium (Ir), andstrontium (Sr), an alloy of such a low-resistance material, or acompound containing such a material as its main component. It isparticularly preferable to use a high-melting-point material which hasboth heat resistance and conductivity, such as tungsten or molybdenum.In addition, the conductor is preferably formed using a low-resistanceconductive material such as aluminum or copper. It is further preferableto form the conductor using a Cu—Mn alloy, in which case manganese oxideformed at the interface with an insulator containing oxygen has afunction of preventing Cu diffusion.

Alternatively, the conductors 1411 to 1414 may be formed using any oneof the materials for the metal oxides 1431 to 1433 described above. Notethat the metal oxides 1431 to 1433 formed under the aforementionedconditions function as a semiconductor; therefore, an additional processis necessary so that the metal oxides 1431 to 1433 can function as aconductor. Specifically, any one of the metal oxides 1431 to 1433 isformed as the conductors 1411 to 1414 and a silicon nitride film isformed as the insulator 1407 by a method using plasma containinghydrogen such as a CVD method, thereby reducing the resistance of themetal oxides 1431 to 1433. As a result, the metal oxides 1431 to 1433function as a conductor and can be used for the conductors 1411 to 1414.

<<Source Electrode and Drain Electrode>>

The conductors 1421 to 1424 each preferably have a single-layerstructure or a stacked-layer structure of a conductor containing alow-resistance material selected from copper (Cu), tungsten (W),molybdenum (Mo), gold (Au), aluminum (Al), manganese (Mn), titanium(Ti), tantalum (Ta), nickel (Ni), chromium (Cr), lead (Pb), tin (Sn),iron (Fe), cobalt (Co), ruthenium (Ru), platinum (Pt), iridium (Ir), andstrontium (Sr), an alloy of such a low-resistance material, or acompound containing such a material as its main component. It isparticularly preferable to use a high-melting-point material which hasboth heat resistance and conductivity, such as tungsten or molybdenum.In addition, the conductor is preferably formed using a low-resistanceconductive material such as aluminum or copper. It is further preferableto form the conductor using a Cu—Mn alloy, in which case manganese oxideformed at the interface with an insulator containing oxygen has afunction of preventing Cu diffusion.

In particular, in the case of using tungsten for any of the conductors1421 to 1424, it is preferable to use tungsten for the conductors 1422and 1424 and to use tantalum nitride for the conductors 1421 and 1423.Since tungsten is a material that is easily oxidized, if tungsten is incontact with the oxide semiconductor, tungsten might capture oxygen fromthe oxide semiconductor and form oxygen vacancies in the oxidesemiconductor. Thus, tantalum nitride formed between tungsten and theoxide semiconductor can prevent the transfer of oxygen between tungstenand the oxide semiconductor. In this manner, tungsten that has both heatresistance and conductivity can be used for the conductors.

The conductors 1421 to 1424 are preferably formed using a conductiveoxide including noble metal, such as iridium oxide, ruthenium oxide, orstrontium ruthenate. Such a conductive oxide hardly takes oxygen from anoxide semiconductor even when it is in contact with the oxidesemiconductor and hardly generates oxygen vacancies in the oxidesemiconductor.

<<Low-resistance Region>>

The regions 1441 and 1442 are formed when, for example, the conductors1421 and 1423 take oxygen from the metal oxides 1431 and 1432. Oxygen ismore likely to be extracted at higher temperatures. Oxygen vacancies areformed in the regions 1441 and 1442 through several heating steps in themanufacturing process of the transistor. In addition, hydrogen enterssites of the oxygen vacancies by heating, increasing the carrierconcentration in the regions 1441 and 1442. As a result, the resistanceof the regions 1441 and 1442 is reduced.

<<Gate Insulating Film>>

The insulator 1406 preferably contains an insulator with a high relativedielectric constant. For example, the insulator 1406 preferably containsgallium oxide, hafnium oxide, an oxide containing aluminum and hafnium,oxynitride containing aluminum and hafnium, an oxide containing siliconand hafnium, or oxynitride containing silicon and hafnium.

The insulator 1406 preferably has a stacked-layer structure containingsilicon oxide or silicon oxynitride and an insulator with a highrelative dielectric constant. Because silicon oxide and siliconoxynitride have thermal stability, combination of silicon oxide orsilicon oxynitride with an insulator with a high relative dielectricconstant allows the stacked-layer structure to be thermally stable andhave a high relative dielectric constant. For example, when aluminumoxide, gallium oxide, or hafnium oxide is closer to the metal oxide1433, entry of silicon from silicon oxide or silicon oxynitride into themetal oxide 1432 can be suppressed.

When silicon oxide or silicon oxynitride is closer to the metal oxide1433, for example, trap centers might be formed at the interface betweenaluminum oxide, gallium oxide, or hafnium oxide and silicon oxide orsilicon oxynitride. The trap centers can shift the threshold voltage ofthe transistor in the positive direction by trapping electrons in somecases.

<<Interlayer Insulating Film and Protective Insulating Film>>

The insulator 1405 preferably contains an insulator with a low relativedielectric constant. For example, the insulator 1405 preferably containssilicon oxide, silicon oxynitride, silicon nitride oxide, siliconnitride, or a resin. Alternatively, the insulator 1405 preferably has astacked-layer structure containing silicon oxide or silicon oxynitrideand a resin. Because silicon oxide and silicon oxynitride have thermalstability, combination of silicon oxide or silicon oxynitride with aresin allows the stacked-layer structure to be thermally stable and havea low relative dielectric constant. Examples of the resin includepolyester, polyolefin, polyamide (e.g., nylon or aramid), polyimide,polycarbonate, and acrylic.

The insulator 1407 has a function of blocking oxygen, hydrogen, water,alkali metal, alkaline earth metal, and the like. Providing theinsulator 1407 can prevent outward diffusion of oxygen from the metaloxide 1430 and entry of hydrogen, water, or the like into the metaloxide 1430 from the outside.

The insulator 1407 can be, for example, a nitride insulator. The nitrideinsulator is formed using silicon nitride, silicon nitride oxide,aluminum nitride, aluminum nitride oxide, or the like. Note that insteadof the nitride insulator, an oxide insulator having a blocking effectagainst oxygen, hydrogen, water, and the like may be provided. Examplesof the oxide insulator include aluminum oxide, aluminum oxynitride,gallium oxide, gallium oxynitride, yttrium oxide, yttrium oxynitride,hafnium oxide, and hafnium oxynitride.

An aluminum oxide film is preferably used for the insulator 1407 becauseit is highly effective in preventing transmission of both oxygen andimpurities such as hydrogen and moisture.

When the insulator 1407 is formed by a method using plasma containingoxygen, e.g., by a sputtering method or a CVD method, oxygen can beadded to side and top surfaces of the insulators 1405 and 1406. It ispreferable to perform second heat treatment at any time after theformation of the insulator 1407. Through the second heat treatment,oxygen added to the insulators 1405 and 1406 is diffused in theinsulators to reach the metal oxide 1430, whereby oxygen vacancies inthe metal oxide 1430 can be reduced.

In schematic views of FIGS. 31A and 31B, oxygen added to the insulators1405 and 1406 in the formation of the insulator 1407 is diffused in theinsulators through the second heat treatment and reaches the metal oxide1430. In FIG. 31A, oxygen diffused in the cross-sectional view of FIG.29B is indicated by arrows. In FIG. 31B, oxygen diffused in thecross-sectional view of FIG. 29C is indicated by arrows.

As illustrated in FIGS. 31A and 31B, oxygen added to the side surface ofthe insulator 1406 is diffused in the insulator 1406 and reaches themetal oxide 1430. In addition, a region 1461, a region 1462, and aregion 1463 each containing excess oxygen are sometimes formed in thevicinity of the interface between the insulators 1407 and 1405. Oxygencontained in the regions 1461 to 1463 reaches the metal oxide 1430through the insulators 1405 and 1404. In the case where the insulator1405 includes silicon oxide and the insulator 1407 includes aluminumoxide, a mixed layer of silicon, aluminum, and oxygen is formed in theregions 1461 to 1463 in some cases.

The insulator 1407 has a function of blocking oxygen and prevents oxygenfrom being diffused over the insulator 1407. The insulator 1403 also hasa function of blocking oxygen and prevents oxygen from being diffusedunder the insulator 1403.

Note that the second heat treatment may be performed at a temperaturethat allows oxygen added to the insulators 1405 and 1406 to be diffusedto the metal oxide 1430. For example, the description of the first heattreatment may be referred to for the second heat treatment.Alternatively, the temperature of the second heat treatment ispreferably lower than that of the first heat treatment. The second heattreatment is performed at a temperature lower than that of the firstheat treatment by higher than or equal to 20° C. and lower than or equalto 150° C., preferably higher than or equal to 40° C. and lower than orequal to 100° C. Accordingly, superfluous release of oxygen from theinsulator 1404 can be inhibited. Note that the second heat treatment isnot necessarily performed when heating during formation of the films canwork as heat treatment comparable to the second heat treatment.

As described above, oxygen can be supplied to the metal oxide 1430 fromabove and below through the formation of the insulator 1407 and thesecond heat treatment.

Alternatively, oxygen can be added to the insulators 1405 and 1406 byforming a film containing indium oxide, e.g., an In-M-Zn oxide, as theinsulator 1407.

The insulator 1408 can be formed using an insulator including one ormore kinds of materials selected from aluminum oxide, aluminum nitrideoxide, magnesium oxide, silicon oxide, silicon oxynitride, siliconnitride oxide, silicon nitride, gallium oxide, germanium oxide, yttriumoxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide,and tantalum oxide. Alternatively, for the insulator 1408, a resin suchas a polyimide resin, a polyamide resin, an acrylic resin, a siloxaneresin, an epoxy resin, or a phenol resin can be used. The insulator 1408may be a stack including any of the above materials.

<Structure Example 5 of Transistor>

The conductor 1414 and the insulators 1402 and 1403 can be omitted inthe transistor 1400 a illustrated n in FIGS. 29A to 29C. An example ofsuch a structure is illustrated in FIGS. 32A to 32C.

FIGS. 32A to 32C are a top view and cross-sectional views of atransistor 1400 b. FIG. 32A is a top view. FIG. 32B is a cross-sectionalview taken along a dashed-dotted line A1-A2 in FIG. 32A and FIG. 32C isa cross-sectional view taken along a dashed-dotted line A3-A4 in FIG.32A. Note that for simplification of the drawing, some components arenot illustrated in the top view in FIG. 32A. Note that the dashed-dottedline A1-A2 and the dashed-dotted line A3-A4 are sometimes referred to asa channel length direction of the transistor 1400 b and a channel widthdirection of the transistor 1400 b, respectively.

<Structure Example 6 of Transistor>

In the transistor 1400 a illustrated in FIGS. 29A to 29C, parts of theconductors 1421 and 1423 that overlap with the gate electrode (theconductors 1411 to 1413) can be reduced in thickness. An example of sucha structure is illustrated in FIGS. 33A to 33C.

FIGS. 33A to 33C are a top view and cross-sectional views of atransistor 1400 c. FIG. 33A is a top view. FIG. 33B is a cross-sectionalview taken along a dashed-dotted line A1-A2 in FIG. 33A and FIG. 33C isa cross-sectional view taken along a dashed-dotted line A3-A4 in FIG.33A. Note that for simplification of the drawing, some components arenot illustrated in the top view in FIG. 33A. Note that the dashed-dottedline A1-A2 and the dashed-dotted line A3-A4 are sometimes referred to asa channel length direction of the transistor 1400 c and a channel widthdirection of the transistor 1400 c, respectively.

In the transistor 1400 c illustrated in FIG. 33B, part of the conductor1421 that overlaps with the gate electrode is reduced in thickness, andthe conductor 1422 covers the conductor 1421. Part of the conductor 1423that overlaps with the gate electrode is also reduced in thickness, andthe conductor 1424 covers the conductor 1423.

The transistor 1400 c, which has the structure illustrated in FIG. 33B,can have an increased distance between the gate and source electrodes orbetween the gate and drain electrodes. This results in a reduction inthe parasitic capacitance formed between the gate electrode and thesource and drain electrodes. As a result, a transistor capable ofhigh-speed operation can be obtained.

<Structure Example 7 of Transistor>

In the transistor 1400 c illustrated in FIGS. 33A to 33C, the width ofthe metal oxides 1431 and 1432 can be increased in the A3-A4 direction.An example of such a structure is illustrated in FIGS. 34A to 34C.

FIGS. 34A to 34C are a top view and cross-sectional views of atransistor 1400 d. FIG. 34A is a top view. FIG. 34B is a cross-sectionalview taken along a dashed-dotted line A1-A2 in FIG. 34A and FIG. 34C isa cross-sectional view taken along a dashed-dotted line A3-A4 in FIG.34A. Note that for simplification of the drawing, some components arenot illustrated in the top view in FIG. 34A. Note that the dashed-dottedline A1-A2 and the dashed-dotted line A3-A4 are sometimes referred to asa channel length direction of the transistor 1400 d and a channel widthdirection of the transistor 1400 d, respectively.

The transistor 1400 d, which has the structure illustrated in FIGS. 34Ato 34C, can have an increased on-state current.

<Structure Example 8 of Transistor>

In the transistor 1400 c illustrated in FIGS. 33A to 33C, a plurality ofregions (hereinafter referred to as fins) consisting of the metal oxides1431 and 1432 may be provided in the A3-A4 direction. An example of sucha structure is illustrated in FIGS. 35A to 35C.

FIGS. 35A to 35C are a top view and cross-sectional views of atransistor 1400 e. FIG. 35A is a top view. FIG. 35B is a cross-sectionalview taken along a dashed-dotted line A1-A2 in FIG. 35A and FIG. 35C isa cross-sectional view taken along a dashed-dotted line A3-A4 in FIG.35A. Note that for simplification of the drawing, some components arenot illustrated in the top view in FIG. 35A. Note that the dashed-dottedline A1-A2 and the dashed-dotted line A3-A4 are sometimes referred to asa channel length direction of the transistor 1400 e and a channel widthdirection of the transistor 1400 e, respectively.

The transistor 1400 e includes a first fin consisting of metal oxides1431 a and 1432 a, a second fin consisting of metal oxides 1431 b and1432 b, and a third fin consisting of metal oxides 1431 c and 1432 c.

In the transistor 1400 e, the metal oxides 1432 a to 1432 c where achannel is formed are surrounded by the gate electrode. Hence, a gateelectric field can be applied to the entire channel, so that atransistor with a high on-state current can be obtained.

<Structure Example 9 of Transistor>

FIGS. 36A to 36D are a top view and cross-sectional views of atransistor 1400 f FIG. 36A is a top view of the transistor 1400 f. FIG.36B is a cross-sectional view taken along a dashed-dotted line A1-A2 inFIG. 36A and FIG. 36C is a cross-sectional view taken along adashed-dotted line A3-A4 in FIG. 36A. Note that the dashed-dotted lineA1-A2 and the dashed-dotted line A3-A4 are sometimes referred to as achannel length direction and a channel width direction, respectively.The transistor 1400 f has the s-channel structure as the transistor 1400a and the like. In the transistor 1400 f, an insulator 1409 is providedin contact with the side surface of the conductor 1412 used as a gateelectrode. The insulator 1409 and the conductor 1412 are covered with aninsulator 1407. The insulator 1407 is covered with the insulator 1408.The insulator 1409 functions as a sidewall insulator of the transistor1400 f. As in the transistor 1400 a, the gate electrode may be a stackof the conductors 1411 to 1413. Alternatively, as described in Structureexample 4 of transistor, any one of the metal oxides 1431 to 1433 may beused as the conductors 1411 to 1413 of the gate electrode. In that case,the treatment described in detail for the gate electrode of Structureexample 4 of transistor needs to be performed so that the metal oxides1431 to 1433 can function as a conductor.

The insulator 1406 and the conductor 1412 overlap with the conductor1414 and the metal oxide 1432 at least partly. The side edge of theconductor 1412 in the channel length direction is preferablyapproximately aligned with the side edge of the insulator 1406 in thechannel length direction. Here, the insulator 1406 functions as a gateinsulator of the transistor 1400 f, and the conductor 1412 functions asa gate electrode of the transistor 1400 f.

The metal oxide 1432 has a region that overlaps with the conductor 1412with the metal oxide 1433 and the insulator 1406 positionedtherebetween. Preferably, the outer edge of the metal oxide 1431 isapproximately aligned with the outer edge of the metal oxide 1432, andthe outer edge of the metal oxide 1433 is outside of the outer edges ofthe metal oxides 1431 and 1432. However, the shape of the transistor inthis embodiment is not limited to that where the outer edge of the metaloxide 1433 is outside of the outer edge of the metal oxide 1431. Forexample, the outer edge of the metal oxide 1431 may be outside of theouter edge of the metal oxide 1433, or the side edge of the metal oxide1431 may be approximately aligned with the side edge of the metal oxide1433.

FIG. 36D is an enlarged view of part of FIG. 36B. As illustrated in FIG.36D, regions 1461 a to 1461 e are formed in the metal oxide 1430. Theregions 1461 b to 1461 e have a higher concentration of dopant andtherefore have a lower resistance than the region 1461 a. Furthermore,the regions 1461 b and 1461 c have a higher concentration of hydrogenand therefore have a much lower resistance than the regions 1461 d and1461 e. The concentration of a dopant in the region 1461 a is, forexample, less than or equal to 5%, less than or equal to 2%, or lessthan or equal to 1% of the maximum concentration of a dopant in theregion 1461 b or 1461 c. Note that the dopant may be rephrased as adonor, an acceptor, an impurity, or an element.

As illustrated in FIG. 36D, in the metal oxide 1430, the region 1461 asubstantially overlaps with the conductor 1412, and the regions 1461 bto 1461 e are the regions other than the region 1461 a. In the regions1461 b and 1461 c, the top surface of the metal oxide 1433 is in contactwith the insulator 1407. In the regions 1461 d and 1461 e, the topsurface of the metal oxide 1433 is in contact with the insulator 1409 or1406. That is, as illustrated in FIG. 36D, the border between theregions 1461 b and 1461 d overlaps with the border between the sideedges of the insulators 1407 and 1409. The same applies to the borderbetween the regions 1461 c and 1461 e. Here, part of the regions 1461 dand 1461 e preferably overlaps with part of a region (a channelformation region) where the metal oxide 1432 and the conductor 1412overlap with each other. For example, preferably, the side edges of theregions 1461 d and 1461 e in the channel length direction are inside ofthe conductor 1412 and the distance between the side edge of theconductor 1412 and each of the side edges of the regions 1461 d and 1461e is d. In that case, the thickness t₄₀₆ of the insulator 1406 and thedistance d preferably satisfy 0.25t₄₀₆<d<t₄₀₆.

In the above manner, the regions 1461 d and 1461 e are formed in part ofthe region where the metal oxide 1430 and the conductor 1412 overlapwith each other. Accordingly, the channel formation region of thetransistor 1400 f is in contact with the low-resistance regions 1461 dand 1461 e and a high-resistance offset region is not formed between theregion 1461 a and each of the regions 1461 d and 1461 e, so that theon-state current of the transistor 1400 f can be increased. Furthermore,since the side edges of the regions 1461 d and 1461 e in the channellength direction are formed so as to satisfy the above range, theregions 1461 d and 1461 e can be prevented from being formed too deeplyin the channel formation region and always conducted.

The regions 1461 b to 1461 e are formed by ion doping treatment such asan ion implantation method. Therefore, as illustrated in FIG. 36D, insome cases, the boundary between the regions 1461 d and 1461 a aroundthe lower surface of the metal oxide 1431 is formed closer to the A1side of the dashed-dotted line A1-A2 than the boundary between theregions 1461 d and 1461 a around the upper surface of the metal oxide1433 is; in other words, the boundary is formed closer to the A1 side inthe deeper region. The distance d in that case is the distance betweenthe boundary between the regions 1461 d and 1461 a which is closest tothe inner part of the conductor 1412 in the direction of thedashed-dotted line A1-A2 and the side edge of the conductor 1412 at theA1 side in the direction of the dashed-dotted line A1-A2. Similarly, insome cases, the boundary between the regions 1461 e and 1461 a aroundthe lower surface of the metal oxide 1431 is formed closer to the A2side of the dashed-dotted line A1-A2 than the boundary between theregions 1461 e and 1461 a around the upper surface of the metal oxide1433 is; in other words, the boundary is formed closer to the A2 side inthe deeper region. The distance d in that case is the distance betweenthe boundary between the regions 1461 e and 1461 a which is closest tothe inner part of the conductor 1412 in the direction of thedashed-dotted line A1-A2 and the side edge of the conductor 1412 at theA2 side in the direction of the dashed-dotted line A1-A2.

In some cases, for example, the regions 1461 d and 1461 e in the metaloxide 1431 do not overlap with the conductor 1412. In that case, atleast part of the regions 1461 d and 1461 e in the metal oxide 1431 or1432 is preferably formed in a region overlapping with the conductor1412.

In addition, low-resistance regions 1451 and 1452 are preferably formedin metal oxide 1431, the metal oxide 1432, and the metal oxide 1433 inthe vicinity of the interface with the insulator 1407. Thelow-resistance regions 1451 and 1452 contain at least one of elementsincluded in the insulator 1407. Preferably, part of the low-resistanceregions 1451 and 1452 is substantially in contact with or overlapspartly with the region (the channel formation region) where the metaloxide 1432 and the conductor 1412 overlap with each other.

Since a large part of the metal oxide 1433 is in contact with theinsulator 1407, the low-resistance regions 1451 and 1452 are likely tobe formed in the metal oxide 1433. The low-resistance regions 1451 and1452 in the metal oxide 1433 contain a higher concentration of elementsincluded in the insulator 1407 than the other regions of the metal oxide1433 (e.g., the region of the metal oxide 1433 that overlaps with theconductor 1412).

The low-resistance regions 1451 and 1452 are formed in the regions 1461b and 1461 c, respectively. Ideally, the metal oxide 1430 has astructure in which the concentration of added elements is the highest inthe low-resistance regions 1451 and 1452, the second highest in theregions 1461 b to 1461 e other than the low-resistance regions 1451 and1452, and the lowest in the region 1461 a. The added elements refer to adopant for forming the regions 1461 b and 1461 c and an element addedfrom the insulator 1407 to the low-resistance regions 1451 and 1452.

Although the low-resistance regions 1451 and 1452 are formed in thetransistor 1400 f, the semiconductor device described in this embodimentis not limited to this structure. For example, the low-resistanceregions 1451 and 1452 are not necessarily formed in the case where theregions 1461 b and 1461 c have a sufficiently low resistance.

<Structure Example 10 of Transistor>

FIGS. 37A and 37B are a top view and a cross-sectional view of atransistor 1680. FIG. 37A is a top view, and FIG. 37B is across-sectional view taken along a dashed-dotted line A-B in FIG. 37A.Note that for simplification of the drawing, some components areincreased or reduced in size, or omitted in FIGS. 37A and 37B. Note thatthe dashed-dotted line A-B is sometimes referred to as a channel lengthdirection.

The transistor 1680 illustrated in FIG. 37B includes a conductor 1689serving as a first gate, a conductor 1688 serving as a second gate, asemiconductor 1682, a conductor 1683 and a conductor 1684 serving as asource and a drain, an insulator 1681, an insulator 1685, an insulator1686, and an insulator 1687.

The conductor 1689 is on an insulating surface. The conductor 1689overlaps with the semiconductor 1682 with the insulator 1681 providedtherebetween. The conductor 1688 overlaps with the semiconductor 1682with the insulators 1685, 1686, and 1687 provided therebetween. Theconductors 1683 and 1684 are connected to the semiconductor 1682.

The description of the conductors 1411 to 1414 in FIGS. 29A to 29C canbe referred to for the details of the conductors 1689 and 1688.

The conductors 1689 and 1688 may be supplied with different potentials,or may be supplied with the same potential at the same time. Theconductor 1688 serving as a second gate electrode in the transistor 1680leads to stabilization of threshold voltage. Note that the conductor1688 is unnecessary in some cases.

The description of the metal oxide 1432 in FIGS. 29A to 29C can bereferred to for the details of the semiconductor 1682. The semiconductor1682 may be a single layer or a stack including a plurality ofsemiconductor layers.

The description of the conductors 1421 to 1424 in FIGS. 29A to 29C canbe referred to for the details of the conductors 1683 and 1684.

The description of the insulator 1406 in FIGS. 29A to 29C can bereferred to for the details of the insulator 1681.

The insulators 1685 to 1687 are sequentially stacked over thesemiconductor 1682 and the conductors 1683 and 1684 in FIG. 37B;however, an insulator provided over the semiconductor 1682 and theconductors 1683 and 1684 may be a single layer or a stack including aplurality of insulators.

In the case of using an oxide semiconductor as the semiconductor 1682,the insulator 1686 preferably contains oxygen at a proportion higherthan or equal to that in the stoichiometric composition and has afunction of supplying part of oxygen to the semiconductor 1682 byheating. Note that in the case where the provision of the insulator 1686directly on the semiconductor 1682 causes damage to the semiconductor1682 at the time of formation of the insulator 1686, the insulator 1685is preferably provided between the semiconductor 1682 and the insulator1686, as illustrated in FIG. 37B. The insulator 1685 preferably allowsoxygen to pass therethrough, and causes little damage to thesemiconductor 1682 when the insulator 1685 is formed compared with thecase of the insulator 1686. If the insulator 1686 can be formed directlyon the semiconductor 1682 while damage to the semiconductor 1682 isreduced, the insulator 1685 is not necessarily provided.

For the insulators 1685 and 1686, a material containing silicon oxide orsilicon oxynitride is preferably used, for example. Alternatively, ametal oxide such as aluminum oxide, aluminum oxynitride, gallium oxide,gallium oxynitride, yttrium oxide, yttrium oxynitride, hafnium oxide, orhafnium oxynitride can be used.

The insulator 1687 preferably has an effect of blocking diffusion ofoxygen, hydrogen, and water. Alternatively, the insulator 1687preferably has an effect of blocking diffusion of hydrogen and water.

As an insulator has higher density and becomes denser or has a fewerdangling bonds and becomes more chemically stable, the insulator has amore excellent blocking effect. An insulator that has an effect ofblocking diffusion of oxygen, hydrogen, and water can be formed using,for example, aluminum oxide, aluminum oxynitride, gallium oxide, galliumoxynitride, yttrium oxide, yttrium oxynitride, hafnium oxide, or hafniumoxynitride. An insulator that has an effect of blocking diffusion ofhydrogen and water can be formed using, for example, silicon nitride orsilicon nitride oxide.

In the case where the insulator 1687 has an effect of blocking diffusionof water, hydrogen, and the like, impurities such as water and hydrogenthat exist in a resin in a panel or exist outside the panel can beprevented from entering the semiconductor 1682. In the case where anoxide semiconductor is used as the semiconductor 1682, part of water orhydrogen that enters the oxide semiconductor serves as an electron donor(donor). Thus, the use of the insulator 1687 having the blocking effectcan prevent a shift in the threshold voltage of the transistor 1680 dueto generation of donors.

In addition, in the case where an oxide semiconductor is used as thesemiconductor 1682, the insulator 1687 has an effect of blockingdiffusion of oxygen, so that diffusion of oxygen from the oxidesemiconductor to the outside can be prevented. Accordingly, oxygenvacancies in the oxide semiconductor that serve as donors are reduced,so that a shift in the threshold voltage of the transistor 1680 due togeneration of donors can be prevented.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 4)

In this embodiment, configuration examples of a device that can beapplied to the memory cells 301 to 304 (hereinafter collectivelyreferred to as the memory cell 300) described in the above embodimentswill be described with reference to FIGS. 38A and 38B, FIGS. 39A and39B, FIGS. 40A and 40B, and FIGS. 41A and 41B.

<Chip Configuration Example 1>

FIGS. 38A and 38B are cross-sectional views showing an example in whichthe memory cell 300 is formed in one chip. FIG. 38A illustrates a crosssection in a channel length direction of transistors included in thememory cell 300, and FIG. 38B illustrates a cross section in a channelwidth direction of the transistors included in the memory cell 300.

The memory cell 300 illustrated in FIGS. 38A and 38B includes layers L0,L1, L2, L3, L4, L5, L6, L7, L8, and L9 in order from the bottom.

The layer L0 includes a substrate 1700.

The layer L1 includes an insulator 1706 over the substrate 1700, atransistor TrA, an insulator 1702, an insulator 1703, and a plurality ofconductors such as a conductor 1714 and a conductor 1715.

The layer L2 includes a plurality of wirings such as a wiring 1732 and awiring 1733.

The layer L3 includes a plurality of conductors such as a conductor1716.

The layer L4 includes a transistor TrB, an insulator 1704, an insulator1705, and a plurality of conductors such as a conductor 1717,

The layer L5 includes a plurality of wirings such as a wiring 1734 and awiring 1735.

The layer L6 includes a plurality of conductors such as a conductor1718.

The layer L7 includes a plurality of wirings such as a wiring 1736.

The layer L8 includes a capacitor CA and a plurality of conductors suchas a conductor 1719. The capacitor CA includes a first electrode 1751, asecond electrode 1752, and an insulator 1753.

The layer L9 includes plurality of wirings such as a wiring 1737.

The OS transistor described in Embodiment 3 is preferably used as thetransistors TrA and TrB. In FIGS. 38A and 38B, the transistor 1400 cillustrated in FIGS. 33A to 33C is used as the transistors TrA and TrB.

For example, a glass substrate, a quartz substrate, a plastic substrate,a metal substrate, a flexible substrate, an attachment film, paperincluding a fibrous material, or a base film may be used as thesubstrate 1700. Alternatively, a semiconductor element may be formedusing one substrate, and then transferred to another substrate.

In FIGS. 38A and 38B, the insulators 1702 to 1706 preferably have ablocking effect against hydrogen, water, and the like. Water, hydrogen,and the like are factors that generate carriers in an oxidesemiconductor; thus, providing such a blocking layer against hydrogen,water, and the like can improve the reliability of the transistors TrAand TrB. Examples of the insulator having a blocking effect againsthydrogen, water, and the like include aluminum oxide, aluminumoxynitride, gallium oxide, gallium oxynitride, yttrium oxide, yttriumoxynitride, hafnium oxide, hafnium oxynitride, and yttria-stabilizedzirconia (YSZ).

The wirings 1732 to 1737 and the conductors 1714 to 1719 each preferablyhave a single-layer structure or a layered structure of a conductorcontaining a low-resistance material selected from copper (Cu), tungsten(W), molybdenum (Mo), gold (Au), aluminum (Al), manganese (Mn), titanium(Ti), tantalum (Ta), nickel (Ni), chromium (Cr), lead (Pb), tin (Sn),iron (Fe), and cobalt (Co), an alloy of such a low-resistance material,or a compound containing such a material as its main component. It isparticularly preferable to use a high-melting-point material which hasboth heat resistance and conductivity, such as tungsten or molybdenum.It is also preferable to use a low-resistance conductive material suchas aluminum or copper. The use of a Cu—Mn alloy is further preferable,in which case manganese oxide formed at the interface with an insulatorcontaining oxygen has a function of preventing Cu diffusion.

In FIGS. 38A and 38B, regions without reference numerals and hatchpatterns represent regions formed of an insulator. As the insulator, aninsulator containing at least one of aluminum oxide, aluminum nitrideoxide, magnesium oxide, silicon oxide, silicon oxynitride, siliconnitride oxide, silicon nitride, gallium oxide, germanium oxide, yttriumoxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide,tantalum oxide, and the like can be used. Alternatively, in the regions,an organic resin such as a polyimide resin, a polyamide resin, anacrylic resin, a siloxane resin, an epoxy resin, or a phenol resin canbe used. Note that in this specification, an oxynitride refers to acompound that contains more oxygen than nitrogen, and a nitride oxiderefers to a compound that contains more nitrogen than oxygen.

In the case where an OS transistor is used as the transistors Tr1 to Tr8described in Embodiment 1, the transistors Tr1 to Tr8 are preferablyformed in the layer L1 or the layer L4.

The capacitor C1 or C2 described in Embodiment 1 is preferably formed inthe layer L8.

In the case where a driver circuit provided around the memory cell 300,for example, a driver circuit such as the decoder circuit or the rowdriver circuit described in Embodiment 1, is formed using an OStransistor, the transistors Tr9 to Tr24 may be formed in the layer L1 orthe layer L4.

With the structure illustrated in FIGS. 38A and 38B, the area occupiedby the memory cell 300 can be reduced, leading to higher integration ofthe memory cell.

<Chip Configuration Example 2>

All the OS transistors in the memory cell 300 may be formed in the samelayer. An example of such a case is illustrated in FIGS. 39A and 39B.Similarly to FIGS. 38A and 38B, FIG. 39A illustrates a cross section ina channel length direction of transistors included in the memory cell300, and FIG. 39B illustrates a cross section in a channel widthdirection of the transistors included in the memory cell 300.

The cross-sectional views of FIGS. 39A and 39B are different from thoseof FIGS. 38A and 38B in that the layers L3 to L5 are omitted and thelayer L6 is formed on the layer L2. For the other details in FIGS. 39Aand 39B, the description of FIGS. 38A and 38B is referred to.

In the case where an OS transistor is used as the transistors Tr1 to Tr8described in Embodiment 1, the transistors Tr1 to Tr8 are preferablyformed in the layer L1.

The capacitor C1 or C2 described in Embodiment 1 is preferably formed inthe layer L8.

In the case where a driver circuit provided around the memory cell 300,for example, a driver circuit such as the decoder circuit or the rowdriver circuit described in Embodiment 1, is formed using an OStransistor, the transistors Tr9 to Tr24 may be formed in the layer L1.

With the structure illustrated in FIGS. 39A and 39B, the productionprocess of the memory cell 300 can be simplified.

<Chip Configuration Example 3>

All OS transistors in the memory cell 300 illustrated in FIGS. 38A and38B may be formed above the capacitor CA as illustrated in FIGS. 40A and40B. Similarly to FIGS. 38A and 38B and FIGS. 39A and 39B, FIG. 40A is across-sectional view in a channel length direction of transistorsincluded in the memory cell 300, and FIG. 40B is a cross-sectional viewin a channel width direction of the transistors included in the memorycell 300.

The cross-sectional views in FIGS. 40A and 40B are different from thosein FIGS. 38A and 38B in that the transistor TrA and the transistor TrBare provided above the capacitor CA. For the other details in FIGS. 40Aand 40B, refer to the description for FIGS. 38A and 38B.

The memory cell 300 illustrated in FIGS. 40A and 40B includes the layersL0, L7, L8, L9, L10, L1, L2, L3, L4, and L5 in order from the bottom.

The layer L10 includes a plurality of conductors such as a conductor1720 and a conductor 1721.

For materials used for the conductors 1720 and 1721, refer to thedescription of the wirings 1732 to 1737 and the conductors 1714 to 1719.

In the case where an OS transistor is used as the transistors Tr1 to Tr8described in Embodiment 1, the transistors Tr1 to Tr8 are preferablyformed in the layer L1 or the layer L4.

The capacitor C1 or C2 described in Embodiment 1 is preferably formed inthe layer L8.

In the case where a driver circuit provided around the memory cell 300,for example, a driver circuit such as the decoder circuit or the rowdriver circuit described in Embodiment 1, is formed using an OStransistor, the transistors Tr9 to Tr24 may be formed in the layer L1 orthe layer L4.

<Chip Configuration Example 4>

Similarly to the chip configuration example 3, all OS transistors in thememory cell 300 illustrated in FIGS. 39A and 39B may be formed above thecapacitor CA as illustrated in FIGS. 41A and 41B. Similarly to FIGS. 39Aand 39B, FIG. 41A is a cross-sectional view in a channel lengthdirection of transistors included in the memory cell 300, and FIG. 41Bis a cross-sectional view in a channel width direction of thetransistors included in the memory cell 300.

The cross-sectional views in FIGS. 41A and 41B are different from thosein FIGS. 39A and 39B in that the transistor TrA is provided above thecapacitor CA. For the other details in FIGS. 41A and 41B, refer to thedescription for FIGS. 40A and 40B.

The memory cell 300 illustrated in FIGS. 41A and 41B includes the layersL0, L7, L8, L9, L10, L1, and L2 in order from the bottom.

In the case where an OS transistor is used as the transistors Tr1 to Tr8described in Embodiment 1, the transistors Tr1 to Tr8 are preferablyformed in the layer L1.

The capacitor C1 or C2 described in Embodiment 1 is preferably formed inthe layer L8.

In the case where a driver circuit provided around the memory cell 300,for example, a driver circuit such as the decoder circuit or the rowdriver circuit described in Embodiment 1, is formed using an OStransistor, the transistors Tr9 to Tr24 may be formed in the layer L1.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 5)

Described in this embodiment are structures of an oxide semiconductorfilm capable of being used for the OS transistors described in the aboveembodiments.

<Structure of Oxide Semiconductor>

An oxide semiconductor is classified into a single crystal oxidesemiconductor and a non-single-crystal oxide semiconductor. Examples ofa non-single-crystal oxide semiconductor include a c-axis alignedcrystalline oxide semiconductor (CAAC-OS), a polycrystalline oxidesemiconductor, a nanocrystalline oxide semiconductor (nc-OS), anamorphous-like oxide semiconductor (a-like OS), and an amorphous oxidesemiconductor.

From another perspective, an oxide semiconductor is classified into anamorphous oxide semiconductor and a crystalline oxide semiconductor.Examples of a crystalline oxide semiconductor include a single crystaloxide semiconductor, a CAAC-OS, a polycrystalline oxide semiconductor,and an nc-OS.

An amorphous structure is generally thought to be isotropic and have nonon-uniform structure, to be metastable and have no fixed positions ofatoms, to have a flexible bond angle, and to have a short-range orderbut have no long-range order, for example.

In other words, a stable oxide semiconductor cannot be regarded as acompletely amorphous oxide semiconductor. Moreover, an oxidesemiconductor that is not isotropic (e.g., an oxide semiconductor thathas a periodic structure in a microscopic region) cannot be regarded asa completely amorphous oxide semiconductor. In contrast, an a-like OS,which is not isotropic, has an unstable structure that contains a void.Because of its instability, an a-like OS is close to an amorphous oxidesemiconductor in terms of physical properties.

<CAAC-OS>

First, a CAAC-OS is described.

A CAAC-OS is one of oxide semiconductors having a plurality of c-axisaligned crystal parts (also referred to as pellets).

Analysis of a CAAC-OS by X-ray diffraction (XRD) is described. Forexample, when the structure of a CAAC-OS including an InGaZnO₄ crystalthat is classified into the space group R-3m is analyzed by anout-of-plane method, a peak appears at a diffraction angle (2θ) ofaround 31° as shown in FIG. 42A. This peak is derived from the (009)plane of the InGaZnO₄ crystal, which indicates that crystals in theCAAC-OS have c-axis alignment, and that the c-axes are aligned in adirection substantially perpendicular to a surface over which theCAAC-OS film is formed (also referred to as a formation surface) or thetop surface of the CAAC-OS film. Note that a peak sometimes appears at a2θ of around 36° in addition to the peak at a 2θ of around 31°. The peakat a 2θ of around 36° is derived from a crystal structure that isclassified into the space group Fd-3m; thus, this peak is preferably notexhibited in a CAAC-OS.

On the other hand, in structural analysis of the CAAC-OS by an in-planemethod in which an X-ray is incident on the CAAC-OS in a directionparallel to the formation surface, a peak appears at a 2θ of around 56°.This peak is attributed to the (110) plane of the InGaZnO₄ crystal. Whenanalysis (ϕ scan) is performed with 2θ fixed at around 56° and with thesample rotated using a normal vector to the sample surface as an axis (ϕaxis), as shown in FIG. 42B, a peak is not clearly observed. Incontrast, in the case where single crystal InGaZnO₄ is subjected to ϕscan with 2θ fixed at around 56°, as shown in FIG. 42C, six peaks whichare derived from crystal planes equivalent to the (110) plane areobserved. Accordingly, the structural analysis using XRD shows that thedirections of a-axes and b-axes are irregularly oriented in the CAAC-OS.

Next, a CAAC-OS analyzed by electron diffraction is described. Forexample, when an electron beam with a probe diameter of 300 nm isincident on a CAAC-OS including an InGaZnO₄ crystal in a directionparallel to the formation surface of the CAAC-OS, a diffraction pattern(also referred to as a selected-area electron diffraction pattern) shownin FIG. 42D can be obtained. In this diffraction pattern, spots derivedfrom the (009) plane of an InGaZnO₄ crystal are included. Thus, theelectron diffraction also indicates that pellets included in the CAAC-OShave c-axis alignment and that the c-axes are aligned in a directionsubstantially perpendicular to the formation surface or the top surfaceof the CAAC-OS. Meanwhile, FIG. 42E shows a diffraction pattern obtainedin such a manner that an electron beam with a probe diameter of 300 nmis incident on the same sample in a direction perpendicular to thesample surface. As shown in FIG. 42E, a ring-like diffraction pattern isobserved. Thus, the electron diffraction using an electron beam with aprobe diameter of 300 nm also indicates that the a-axes and b-axes ofthe pellets included in the CAAC-OS do not have regular orientation. Thefirst ring in FIG. 42E is considered to be derived from the (010) plane,the (100) plane, and the like of the InGaZnO₄ crystal. The second ringin FIG. 42E is considered to be derived from the (110) plane and thelike.

In a combined analysis image (also referred to as a high-resolution TEMimage) of a bright-field image and a diffraction pattern of a CAAC-OS,which is obtained using a transmission electron microscope (TEM), aplurality of pellets can be observed. However, in the high-resolutionTEM image, a boundary between pellets, that is, a grain boundary is notclearly observed in some cases. Thus, in the CAAC-OS, a reduction inelectron mobility due to the grain boundary is less likely to occur.

FIG. 43A shows a high-resolution TEM image of a cross section of theCAAC-OS which is observed from a direction substantially parallel to thesample surface. The high-resolution TEM image is obtained with aspherical aberration corrector function. The high-resolution TEM imageobtained with a spherical aberration corrector function is particularlyreferred to as a Cs-corrected high-resolution TEM image. TheCs-corrected high-resolution TEM image can be observed with, forexample, an atomic resolution analytical electron microscope JEM-ARM200Fmanufactured by JEOL Ltd.

FIG. 43A shows pellets in which metal atoms are arranged in a layeredmanner. FIG. 43A proves that the size of a pellet is greater than orequal to 1 nm or greater than or equal to 3 nm. Therefore, the pelletcan also be referred to as a nanocrystal (nc). Furthermore, the CAAC-OScan also be referred to as an oxide semiconductor including c-axisaligned nanocrystals (CANC). A pellet reflects unevenness of a formationsurface or a top surface of the CAAC-OS, and is parallel to theformation surface or the top surface of the CAAC-OS.

FIGS. 43B and 43C show Cs-corrected high-resolution TEM images of aplane of the CAAC-OS observed from a direction substantiallyperpendicular to the sample surface. FIGS. 43D and 43E are imagesobtained through image processing of FIGS. 43B and 43C. The method ofimage processing is as follows. The image in FIG. 43B is subjected tofast Fourier transform (FFT), so that an FFT image is obtained. Then,mask processing is performed such that a range of from 2.8 nm⁻¹ to 5.0nm⁻¹ from the origin in the obtained FFT image remains. After the maskprocessing, the FFT image is processed by inverse fast Fourier transform(IFFT) to obtain a processed image. The image obtained in this manner iscalled an FFT filtering image. The FFT filtering image is a Cs-correctedhigh-resolution TEM image from which a periodic component is extracted,and shows a lattice arrangement.

In FIG. 43D, a portion where a lattice arrangement is broken is denotedwith a dashed line. A region surrounded by a dashed line is one pellet.The portion denoted with the dashed line is a junction of pellets. Thedashed line draws a hexagon, which means that the pellet has a hexagonalshape. Note that the shape of the pellet is not always a regular hexagonbut is a non-regular hexagon in many cases.

In FIG. 43E, a dotted line denotes a portion between a region where alattice arrangement is well aligned and another region where a latticearrangement is well aligned, and dashed lines denote the directions ofthe lattice arrangements. A clear crystal grain boundary cannot beobserved even in the vicinity of the dotted line. When a lattice pointin the vicinity of the dotted line is regarded as a center andsurrounding lattice points are joined, a distorted hexagon, pentagon,and/or heptagon can be formed, for example. That is, a latticearrangement is distorted so that formation of a crystal grain boundaryis inhibited. This is probably because the CAAC-OS can toleratedistortion owing to a low density of the atomic arrangement in an a-bplane direction, an interatomic bond distance changed by substitution ofa metal element, and the like.

As described above, the CAAC-OS has c-axis alignment, its pellets(nanocrystals) are connected in an a-b plane direction, and the crystalstructure has distortion. For this reason, the CAAC-OS can also bereferred to as an oxide semiconductor including a c-axis-aligneda-b-plane-anchored (CAA) crystal.

The CAAC-OS is an oxide semiconductor with high crystallinity. Entry ofimpurities, formation of defects, or the like might decrease thecrystallinity of an oxide semiconductor. This means that the CAAC-OS hassmall amounts of impurities and defects (e.g., oxygen vacancies).

Note that the impurity means an element other than the main componentsof the oxide semiconductor, such as hydrogen, carbon, silicon, or atransition metal element. For example, an element (specifically, siliconor the like) having higher strength of bonding to oxygen than a metalelement included in an oxide semiconductor extracts oxygen from theoxide semiconductor, which results in disorder of the atomic arrangementand reduced crystallinity of the oxide semiconductor. A heavy metal suchas iron or nickel, argon, carbon dioxide, or the like has a large atomicradius (or molecular radius), and thus disturbs the atomic arrangementof the oxide semiconductor and decreases crystallinity.

The characteristics of an oxide semiconductor having impurities ordefects might be changed by light, heat, or the like. Impuritiescontained in the oxide semiconductor might serve as carrier traps orcarrier generation sources, for example. Oxygen vacancies in the oxidesemiconductor might serve as carrier traps or serve as carriergeneration sources when hydrogen is captured therein, for example.

The CAAC-OS having small amounts of impurities and oxygen vacancies isan oxide semiconductor with low carrier density. Specifically, an oxidesemiconductor with a carrier density of lower than 8×10¹¹ cm⁻³,preferably lower than 1×10¹¹ cm⁻³, further preferably lower than 1×10¹⁰cm⁻³, and higher than or equal to 1×10⁻⁹ cm⁻³ can be used. Such an oxidesemiconductor is referred to as a highly purified intrinsic orsubstantially highly purified intrinsic oxide semiconductor. A CAAC-OShas a low impurity concentration and a low density of defect states.Thus, the CAAC-OS can be referred to as an oxide semiconductor havingstable characteristics.

<nc-OS>

Next, an nc-OS is described.

Analysis of an nc-OS by XRD is described. When the structure of an nc-OSis analyzed by an out-of-plane method, a peak indicating orientationdoes not appear. That is, a crystal of an nc-OS does not haveorientation.

For example, when an electron beam with a probe diameter of 50 nm isincident on a 34-nm-thick region of thinned nc-OS including an InGaZnO₄crystal in a direction parallel to the formation surface, a ring-shapeddiffraction pattern (a nanobeam electron diffraction pattern) shown inFIG. 44A is observed. FIG. 44B shows a diffraction pattern obtained whenan electron beam with a probe diameter of 1 nm is incident on the samesample. As shown in FIG. 44B, a plurality of spots are observed in aring-like region. In other words, ordering in an nc-OS is not observedwith an electron beam with a probe diameter of 50 nm but is observedwith an electron beam with a probe diameter of 1 nm.

Furthermore, an electron diffraction pattern in which spots are arrangedin an approximately regular hexagonal shape is observed in some cases asshown in FIG. 44C when an electron beam having a probe diameter of 1 nmis incident on a region with a thickness of less than 10 nm. This meansthat an nc-OS has a well-ordered region, i.e., a crystal, in the rangeof less than 10 nm in thickness. Note that an electron diffractionpattern having regularity is not observed in some regions becausecrystals are aligned in various directions.

FIG. 44D shows a Cs-corrected high-resolution TEM image of a crosssection of an nc-OS observed from the direction substantially parallelto the formation surface. In a high-resolution TEM image, an nc-OS has aregion in which a crystal part is observed, such as the part indicatedby additional lines in FIG. 44D, and a region in which a crystal part isnot clearly observed. In most cases, the size of a crystal part includedin the nc-OS is greater than or equal to 1 nm and less than or equal to10 nm, or specifically, greater than or equal to 1 nm and less than orequal to 3 nm. Note that an oxide semiconductor including a crystal partwhose size is greater than 10 nm and less than or equal to 100 nm issometimes referred to as a microcrystalline oxide semiconductor. In ahigh-resolution TEM image of the nc-OS, for example, a grain boundary isnot clearly observed in some cases. Note that there is a possibilitythat the origin of the nanocrystal is the same as that of a pellet in aCAAC-OS. Therefore, a crystal part of the nc-OS may be referred to as apellet in the following description.

As described above, in the nc-OS, a microscopic region (for example, aregion with a size greater than or equal to 1 nm and less than or equalto 10 nm, in particular, a region with a size greater than or equal to 1nm and less than or equal to 3 nm) has a periodic atomic arrangement.There is no regularity of crystal orientation between different pelletsin the nc-OS. Thus, the orientation of the whole film is not ordered.Accordingly, the nc-OS cannot be distinguished from an a-like OS or anamorphous oxide semiconductor, depending on an analysis method.

Since there is no regularity of crystal orientation between the pellets(nanocrystals) as mentioned above, the nc-OS can also be referred to asan oxide semiconductor including random aligned nanocrystals (RANC) oran oxide semiconductor including non-aligned nanocrystals (NANC).

The nc-OS is an oxide semiconductor that has high regularity as comparedwith an amorphous oxide semiconductor. Therefore, the nc-OS is likely tohave a lower density of defect states than an a-like OS and an amorphousoxide semiconductor. Note that there is no regularity of crystalorientation between different pellets in the nc-OS. Therefore, the nc-OShas a higher density of defect states than the CAAC-OS.

<a-like OS>

An a-like OS has a structure intermediate between those of the nc-OS andthe amorphous oxide semiconductor.

FIGS. 45A and 45B are high-resolution cross-sectional TEM images of ana-like OS. FIG. 45A is the high-resolution cross-sectional TEM image ofthe a-like OS at the start of the electron irradiation. FIG. 45B is thehigh-resolution cross-sectional TEM image of a-like OS after theelectron (e⁻) irradiation at 4.3×10⁸ e⁻/nm². FIGS. 45A and 45B show thatstripe-like bright regions extending vertically are observed in thea-like OS from the start of the electron irradiation. It can be alsofound that the shape of the bright region changes after the electronirradiation. Note that the bright region is presumably a void or alow-density region.

The a-like OS has an unstable structure because it contains a void. Toverify that an a-like OS has an unstable structure as compared with aCAAC-OS and an nc-OS, a change in structure caused by electronirradiation is described below.

An a-like OS, an nc-OS, and a CAAC-OS are prepared as samples. Each ofthe samples is an In—Ga—Zn oxide.

First, a high-resolution cross-sectional TEM image of each sample isobtained. The high-resolution cross-sectional TEM images show that allthe samples have crystal parts.

It is known that a unit cell of an InGaZnO₄ crystal has a structure inwhich nine layers including three In—O layers and six Ga—Zn—O layers arestacked in the c-axis direction. The distance between the adjacentlayers is equivalent to the lattice spacing on the (009) plane (alsoreferred to as d value). The value is calculated to be 0.29 nm fromcrystal structural analysis. Accordingly, a portion where the spacingbetween lattice fringes is greater than or equal to 0.28 nm and lessthan or equal to 0.30 nm is regarded as a crystal part of InGaZnO₄ inthe following description. Each of lattice fringes corresponds to thea-b plane of the InGaZnO₄ crystal.

FIG. 46 shows change in the average size of crystal parts (at 22 pointsto 30 points) in each sample. Note that the crystal part sizecorresponds to the length of a lattice fringe. FIG. 46 indicates thatthe crystal part size in the a-like OS increases with an increase in thecumulative electron dose in obtaining TEM images, for example. As shownin FIG. 46, a crystal part of approximately 1.2 nm (also referred to asan initial nucleus) at the start of TEM observation grows to a size ofapproximately 1.9 nm at a cumulative electron (e⁻) dose of 4.2×10⁸e⁻/nm². In contrast, the crystal part size in the nc-OS and the CAAC-OSshows little change from the start of electron irradiation to acumulative electron dose of 4.2×10⁸ e⁻/nm². As shown in FIG. 46, thecrystal part sizes in an nc-OS and a CAAC-OS are approximately 1.3 nmand approximately 1.8 nm, respectively, regardless of the cumulativeelectron dose. For the electron beam irradiation and TEM observation, aHitachi H-9000NAR transmission electron microscope was used. Theconditions of electron beam irradiation were as follows: theaccelerating voltage was 300 kV; the current density was 6.7×10⁵e⁻/(nm²·s); and the diameter of irradiation region was 230 nm.

In this manner, growth of the crystal part in the a-like OS is sometimesinduced by electron irradiation. In contrast, in the nc-OS and theCAAC-OS, growth of the crystal part is hardly induced by electronirradiation. Therefore, the a-like OS has an unstable structure ascompared with the nc-OS and the CAAC-OS.

The a-like OS has a lower density than the nc-OS and the CAAC-OS becauseit contains a void. Specifically, the density of the a-like OS is higherthan or equal to 78.6% and lower than 92.3% of the density of the singlecrystal oxide semiconductor having the same composition. The density ofeach of the nc-OS and the CAAC-OS is higher than or equal to 92.3% andlower than 100% of the density of the single crystal oxide semiconductorhaving the same composition. Note that it is difficult to deposit anoxide semiconductor having a density of lower than 78% of the density ofthe single crystal oxide semiconductor.

For example, in the case of an oxide semiconductor having an atomicratio of In:Ga:Zn=1:1:1, the density of single crystal InGaZnO₄ with arhombohedral crystal structure is 6.357 g/cm³. Accordingly, in the caseof the oxide semiconductor having an atomic ratio of In:Ga:Zn=1:1:1, thedensity of the a-like OS is higher than or equal to 5.0 g/cm³ and lowerthan 5.9 g/cm³. For example, in the case of the oxide semiconductorhaving an atomic ratio of In:Ga:Zn=1:1:1, the density of each of thenc-OS and the CAAC-OS is higher than or equal to 5.9 g/cm³ and lowerthan 6.3 g/cm³.

Note that in the case where an oxide semiconductor having a certaincomposition does not exist in a single crystal structure, single crystaloxide semiconductors with different compositions are combined at anadequate ratio, which makes it possible to calculate density equivalentto that of a single crystal oxide semiconductor with the desiredcomposition. The density of a single crystal oxide semiconductor havingthe desired composition can be calculated using a weighted averageaccording to the combination ratio of the single crystal oxidesemiconductors with different compositions. Note that it is preferableto use as few kinds of single crystal oxide semiconductors as possibleto calculate the density.

As described above, oxide semiconductors have various structures andvarious properties. Note that an oxide semiconductor may be a stackedlayer including two or more films of an amorphous oxide semiconductor,an a-like OS, an nc-OS, and a CAAC-OS, for example.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 6)

In this embodiment, examples in which the semiconductor device describedin any of the above embodiments is used as a memory device in anelectronic component and in an electronic device including theelectronic component are described with reference to FIGS. 47A and 47Band FIGS. 48A to 48H.

<Electronic Component>

FIG. 47A illustrates an example in which the semiconductor devicedescribed in any of the above embodiments is used for a memory device inan electronic component. Note that the electronic component is alsoreferred to as a semiconductor package or an IC package. This electroniccomponent has various standards and names depending on the direction andthe shape of terminals. Therefore, an example of the electroniccomponent is described in this embodiment.

A semiconductor device including the transistors described inEmbodiments 1 and 2 is completed through an assembly process(post-process) of integrating detachable components on a printed board.

The post-process can be completed through the steps in FIG. 47A.Specifically, after an element substrate obtained in the precedingprocess is completed (Step ST1), a back surface of the substrate isground (Step ST2). The substrate is thinned in this step to reducesubstrate warpage or the like caused in the preceding process and toreduce the size of the component.

After the back surface of the substrate is ground, a dicing step isperformed to divide the substrate into a plurality of chips. Then, thedivided chips are separately picked up, placed on a lead frame, andbonded thereto in a die bonding step (Step ST3). In the die bondingstep, the chip is bonded to the lead frame by an appropriate methoddepending on products, for example, bonding with a resin or a tape. Notethat in the die bonding step, a chip may be placed on and bonded to aninterposer.

Note that in this embodiment, when an element is formed on a surface ofa substrate, the other surface is referred to as a back surface (asurface on which the element is not formed).

Next, wire bonding for electrically connecting a lead of the lead frameand an electrode on the chip through a metal wire is performed (StepST4). As the metal wire, a silver wire or a gold wire can be used. Ballbonding or wedge bonding can be used as the wire bonding.

The wire-bonded chip is subjected to a molding step of sealing the chipwith an epoxy resin or the like (Step ST5). Through the molding step,the inside of the electronic component is filled with a resin, wherebydamage to a mounted circuit portion and wire caused by externalmechanical force as well as deterioration of characteristics due tomoisture or dust can be reduced.

Subsequently, the lead of the lead frame is plated. Then, the lead iscut and processed (Step ST6). This plating process prevents rust of thelead and facilitates soldering at the time of mounting the chip on aprinted board in a later step.

Next, printing (marking) is performed on a surface of the package (StepST7). After a final testing step (Step ST8), the electronic component iscompleted (Step ST9).

The above-described electronic component can include the semiconductordevice described in any of the above embodiments. Thus, a highlyreliable electronic component can be obtained.

FIG. 47B is a perspective schematic diagram illustrating a quad flatpackage (QFP) as an example of the completed electronic component. Anelectronic component 4700 in FIG. 47B includes a lead 4701 and a circuitunit 4703. The electronic component 4700 in FIG. 47B is mounted on aprinted board 4702, for example. A plurality of electronic components4700 which are combined and electrically connected to each other overthe printed board 4702 can be mounted on an electronic device. Acompleted circuit board 4704 is provided in an electronic device or thelike.

<Electronic Device>

Next, electronic devices including the aforementioned electroniccomponent are described.

A semiconductor device of one embodiment of the present invention can beused for display devices, personal computers, or image reproducingdevices provided with recording media (typically, devices that reproducethe content of recording media such as digital versatile discs (DVD) andhave displays for displaying the reproduced images). Other examples ofelectronic devices that can include the semiconductor device of oneembodiment of the present invention include cellular phones, gamemachines (including portable game machines), portable informationterminals, e-book readers, cameras such as video cameras and digitalstill cameras, goggle-type displays (head mounted displays), navigationsystems, audio reproducing devices (e.g., car audio systems and digitalaudio players), copiers, facsimiles, printers, multifunction printers,automated teller machines (ATM), vending machines, and medical devices.FIGS. 48A to 48H illustrate specific examples of these electronicdevices.

FIG. 48A illustrates a portable game machine, which includes a housing5201, a housing 5202, a display portion 5203, a display portion 5204, amicrophone 5205, a speaker 5206, an operation key 5207, a stylus 5208,and the like. The semiconductor device of one embodiment of the presentinvention can be used for a variety of integrated circuits included inportable game machines. Although the portable game machine in FIG. 48Ahas the two display portions 5203 and 5204, the number of displayportions included in a portable game machine is not limited to this.

FIG. 48B illustrates a portable information terminal including a firsthousing 5601, a second housing 5602, a first display portion 5603, asecond display portion 5604, a joint 5605, an operation key 5606, andthe like. The semiconductor device of one embodiment of the presentinvention can be used for a variety of integrated circuits included inportable information terminals. The first display portion 5603 isprovided in the first housing 5601, and the second display portion 5604is provided in the second housing 5602. The first housing 5601 and thesecond housing 5602 are connected to each other with the joint 5605, andthe angle between the first housing 5601 and the second housing 5602 canbe changed with the joint 5605. Images displayed on the first displayportion 5603 may be switched in accordance with the angle at the joint5605 between the first housing 5601 and the second housing 5602. Adisplay device with a position input function may be used as at leastone of the first display portion 5603 and the second display portion5604. Note that the position input function can be added by providing atouch panel in a display device. Alternatively, the position inputfunction can be added by provision of a photoelectric conversion elementcalled a photosensor in a pixel portion of a display device.

FIG. 48C illustrates a notebook computer including a housing 5401, adisplay portion 5402, a keyboard 5403, a pointing device 5404, and thelike. The semiconductor device of one embodiment of the presentinvention can be used for a variety of integrated circuits included innotebook type personal computers.

FIG. 48D is a smart watch which is one of wearable terminals. The smartwatch includes a housing 5901, a display portion 5902, operation buttons5903, an operator 5904, and a band 5905. The semiconductor device of oneembodiment of the present invention can be used for a variety ofintegrated circuits included in the smart watch. A display device with aposition input function may be used for a display portion 5902. Notethat the position input function can be added by provision of a touchpanel in a display device. Alternatively, the position input functioncan be added by providing a photoelectric conversion element called aphotosensor in a pixel area of a display device. As operation buttons5903, any one of a power switch for starting the smart watch, a buttonfor operating an application of the smart watch, a volume controlbutton, a switch for turning on or off the display portion 5902, and thelike can be used. Although the smart watch in FIG. 48D includes twooperation buttons 5903, the number of the operation buttons included inthe smart watch is not limited to two. The operator 5904 functions as acrown performing time adjustment in the smart watch. The operator 5904may be used as an input interface for operating an application of thesmart watch as well as the crown for a time adjustment. Although thesmart watch illustrated in FIG. 48D includes the operator 5904, oneembodiment of the present invention is not limited thereto and theoperator 5904 is not necessarily provided.

FIG. 48E illustrates a video camera including a first housing 5801, asecond housing 5802, a display portion 5803, operation keys 5804, a lens5805, a joint 5806, and the like. The semiconductor device of oneembodiment of the present invention can be used for a variety ofintegrated circuits included in video cameras. The operation keys 5804and the lens 5805 are provided in the first housing 5801, and thedisplay portion 5803 is provided in the second housing 5802. The firsthousing 5801 and the second housing 5802 are connected to each otherwith the joint 5806, and the angle between the first housing 5801 andthe second housing 5802 can be changed with the joint 5806. Imagesdisplayed on the display portion 5803 may be switched in accordance withthe angle at the joint 5806 between the first housing 5801 and thesecond housing 5802.

FIG. 48F illustrates a passenger car including a car body 5701, wheels5702, a dashboard 5703, lights 5704, and the like. The semiconductordevice of one embodiment of the present invention can be used for avariety of integrated circuits included in passenger cars.

FIG. 48G illustrates an electric refrigerator-freezer including ahousing 5301, a refrigerator door 5302, a freezer door 5303, and thelike. The semiconductor device of one embodiment of the presentinvention can be used for a variety of integrated circuits included inthe electric refrigerator-freezer.

FIG. 48H is a mobile phone having a function of an information terminal.The mobile phone includes a housing 5501, a display portion 5502, amicrophone 5503, a speaker 5504, and operation buttons 5505. A displaydevice with a position input function may be used for the displayportion 5502. Note that the position input function can be added byprovision of a touch panel in a display device. Alternatively, theposition input function can be added by providing a photoelectricconversion element called a photosensor in a pixel area of a displaydevice. As operation buttons 5505, any one of a power switch forstarting the mobile phone, a button for operating an application of themobile phone, a volume control button, a switch for turning on or offthe display portion 5502, and the like can be used. Although the mobilephone in FIG. 48H includes two operation buttons 5505, the number of theoperation buttons included in the mobile phone is not limited to two.Although not illustrated, the mobile phone illustrated in FIG. 48H maybe provided with a camera. Although not illustrated, the mobile phoneillustrated in FIG. 48H may include a light-emitting device that is usedas a flash or a lighting device. Although not illustrated, the mobilephone in FIG. 48H may include a sensor (a sensor having a function ofmeasuring force, displacement, position, speed, acceleration, angularvelocity, rotational frequency, distance, light, liquid, magnetism,temperature, chemical substance, sound, time, hardness, electric field,current, voltage, electric power, radiation, flow rate, humidity,gradient, oscillation, odor, or infrared rays) in the housing 5501. Inparticular, the direction of the mobile phone (the direction of themobile phone with respect to the vertical direction) illustrated in FIG.48H is determined by providing a sensing device which includes a sensorfor sensing inclinations, such as a gyroscope or an acceleration sensor,and display on the screen of the display portion 5502 can beautomatically changed in accordance with the direction of the mobilephone. In particular, in the case where a sensing device including asensor obtaining biological information of fingerprints, veins, iris,voice prints, or the like is provided, a mobile phone having a functionof biometric authentication can be obtained.

Next, a display device that can include the semiconductor device ormemory device of one embodiment of the present invention is described.In one example, a display device includes a pixel. The pixel includes atransistor and a display element, for example. Alternatively, thedisplay device includes a driver circuit for driving the pixel. Thedriver circuit includes a transistor, for example. As these transistors,any of the transistors described in the other embodiments can be used,for example.

For example, in this specification and the like, a display element, adisplay device which is a device including a display element, alight-emitting element, and a light-emitting device which is a deviceincluding a light-emitting element can employ a variety of modes or caninclude a variety of elements. The display element, the display device,the light-emitting element, or the light-emitting device includes atleast one of an electroluminescent (EL) element (e.g., an EL elementincluding organic and inorganic materials, an organic EL element, or aninorganic EL element), an LED chip (e.g., a white LED chip, a red LEDchip, a green LED chip, or a blue LED chip), a transistor (a transistorthat emits light depending on a current), a plasma display panel (PDP),an electron emitter, a display element using a carbon nanotube, a liquidcrystal element, electronic ink, an electrowetting element, anelectrophoretic element, a display element using micro electromechanical systems (MEMS), (e.g., a grating light valve (GLV), a digitalmicromirror device (DMD), a digital micro shutter (DMS), MIRASOL(registered trademark), an interferometric modulator display (IMOD)element, a MEMS shutter display element, an optical-interference-typeMEMS display element, or a piezoelectric ceramic display), quantum dots,and the like. Other than the above, a display medium whose contrast,luminance, reflectance, transmittance, or the like is changed by anelectric or magnetic effect may be included. Examples of a displaydevice using an EL element include an EL display. Examples of a displaydevice using electron emitters include a field emission display (FED),and an SED-type flat panel display (SED: surface-conductionelectron-emitter display). Examples of a display device using a liquidcrystal element include a liquid crystal display (e.g., a transmissiveliquid crystal display, a transflective liquid crystal display, areflective liquid crystal display, a direct-view liquid crystal display,or a projection liquid crystal display). Examples of a display deviceusing electronic ink, Electronic Liquid Powder (registered trademark),or electrophoretic elements include electronic paper. Examples of adisplay device using a quantum dot in each pixel include a quantum dotdisplay. Note that the quantum dots may be provided in part of abacklight, instead of being used for a display element. With the use ofthe quantum dots, an image with high color purity can be displayed. Inthe case of a transflective liquid crystal display or a reflectiveliquid crystal display, some or all of pixel electrodes function asreflective electrodes. For example, some or all of pixel electrodes areformed to contain aluminum, silver, or the like. In such a case, amemory circuit such as an SRAM can be provided under the reflectiveelectrodes, leading to lower power consumption. Note that in the case ofusing an LED chip, graphene or graphite may be provided under anelectrode or a nitride semiconductor of the LED chip. Graphene orgraphite may be a multilayer film in which a plurality of layers arestacked. The provision of graphene or graphite enables a nitridesemiconductor such as an n-type GaN semiconductor layer includingcrystals to be easily formed thereover. Furthermore, a p-type GaNsemiconductor layer including crystals, or the like can be providedthereover, and thus the LED chip can be formed. Note that an AlN layermay be provided between the n-type GaN semiconductor layer includingcrystals and graphene or graphite. The GaN semiconductor layers includedin the LED chip may be formed by MOCVD. Note that when the graphene isprovided, the GaN semiconductor layers included in the LED chip can alsobe formed by a sputtering method. In a display device using MEMS, a dryagent may be provided in a space where a display element is sealed (orbetween an element substrate over which the display element is placedand a counter substrate opposed to the element substrate, for example).With the dry agent, malfunction or degradation of the MEMS or the likedue to moisture can be prevented.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 7)

The memory device of one embodiment of the present invention can be usedfor removable memory devices such as memory cards (e.g., SD cards),universal serial bus (USB) memories, and solid state drives (SSD). Inthis embodiment, some structure examples of the removable storage deviceare described with reference to FIGS. 49A to 49E.

FIG. 49A is a schematic diagram of a USB memory. A USB memory 5100includes a housing 5101, a cap 5102, a USB connector 5103, and asubstrate 5104. The substrate 5104 is held in the housing 5101. Thesubstrate 5104 is provided with a memory device and a circuit fordriving the memory device. For example, the substrate 5104 is providedwith a memory chip 5105 and a controller chip 5106. In the memory chip5105, the memory cell array 110, the row driver 120, the row decoder130, the row address latch circuit 140, the sense amplifier/prechargecircuit 150, the data selector/column decoder 160, and the columnaddress latch circuit 170 which are described in the above embodimentare incorporated, for example. Specifically, a processor, a work memory,an ECC circuit, and the like are incorporated in the controller chip5106. Note that the circuit configurations of the memory chip 5105 andthe controller chip 5106 are not limited to those described above, andcan be changed depending on circumstances or conditions. For example,the row driver 120, the row decoder 130, the row address latch circuit140, the sense amplifier/precharge circuit 150, the data selector/columndecoder 160, and the column address latch circuit 170 may beincorporated in the controller chip 5106, not in the memory chip 5105.The USB connector 5103 functions as an interface for connection to anexternal device.

FIG. 49B is a schematic external diagram of an SD card, and FIG. 49C isa schematic diagram illustrating the internal structure of the SD card.An SD card 5110 includes a housing 5111, a connector 5112, and asubstrate 5113. The connector 5112 functions as an interface forconnection to an external device. The substrate 5113 is held in thehousing 5111. The substrate 5113 is provided with a memory device and acircuit for driving the memory device. For example, the substrate 5113is provided with a memory chip 5114 and a controller chip 5115. In thememory chip 5114, the memory cell array 110, the row driver 120, the rowdecoder 130, the row address latch circuit 140, the senseamplifier/precharge circuit 150, the data selector/column decoder 160,and the column address latch circuit 170 which are described in theabove embodiment are incorporated, for example. A processor, a workmemory, an ECC circuit, and the like are incorporated in the controllerchip 5115. Note that the circuit configurations of the memory chip 5114and the controller chip 5115 are not limited to those described above,and can be changed depending on circumstances or conditions. Forexample, the row driver 120, the row decoder 130, the row address latchcircuit 140, the sense amplifier/precharge circuit 150, the dataselector/column decoder 160, and the column address latch circuit 170may be incorporated in the controller chip 5115, not in the memory chip5114.

When the memory chip 5114 is also provided on a back side of thesubstrate 5113, the capacity of the SD card 5110 can be increased. Inaddition, a wireless chip with a radio communication function may beprovided on the substrate 5113. This structure enables wirelesscommunication between an external device and the SD card 5110, making itpossible to write/read data to/from the memory chip 5114.

FIG. 49D is a schematic external diagram of an SSD, and FIG. 49E is aschematic diagram illustrating the internal structure of the SSD. An SSD5150 includes a housing 5151, a connector 5152, and a substrate 5153.The connector 5152 functions as an interface for connection to anexternal device. The substrate 5153 is held in the housing 5151. Thesubstrate 5153 is provided with a memory device and a circuit fordriving the memory device. For example, the substrate 5153 is providedwith a memory chip 5154, a memory chip 5155, and a controller chip 5156.In the memory chip 5154, the memory cell array 110, the row driver 120,the row decoder 130, the row address latch circuit 140, the senseamplifier/precharge circuit 150, the data selector/column decoder 160,and the column address latch circuit 170 which are described in theabove embodiment are incorporated, for example. When the memory chip5154 is also provided on a back side of the substrate 5153, the capacityof the SSD 5150 can be increased. A work memory is incorporated in thememory chip 5155. For example, a DRAM chip may be used as the memorychip 5155. A processor, an ECC circuit, and the like are incorporated inthe controller chip 5156. Note that the circuit configurations of thememory chip 5154, the memory chip 5155, and the controller chip 5115 arenot limited to those described above, and can be changed depending oncircumstances or conditions. For example, a memory functioning as a workmemory may also be provided in the controller chip 5156.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Embodiment 8)

In this embodiment, application examples of an RF tag that can includethe memory device of one embodiment of the present invention will bedescribed with reference to FIGS. 50A to 50F. The RF tag is widely usedand can be provided for, for example, products such as bills, coins,securities, bearer bonds, documents (e.g., driver's licenses orresident's cards, see FIG. 50A), recording media (e.g., DVD or videotapes, see FIG. 50B), packaging containers (e.g., wrapping paper orbottles, see FIG. 50C), vehicles (e.g., bicycles, see FIG. 50D),personal belongings (e.g., bags or glasses), foods, plants, animals,human bodies, clothing, household goods, medical supplies such asmedicine and chemicals, and electronic devices (e.g., liquid crystaldisplay devices, EL display devices, television sets, or cellularphones), or tags on products (see FIGS. 50E and 50F).

An RF tag 4000 of one embodiment of the present invention is fixed to aproduct by being attached to a surface thereof or embedded therein. Forexample, the RF tag 4000 is fixed to each product by being embedded inpaper of a book, or embedded in an organic resin of a package. Since theRF tag 4000 of one embodiment of the present invention can be reduced insize, thickness, and weight, it can be fixed to a product withoutspoiling the design of the product. Furthermore, bills, coins,securities, bearer bonds, documents, or the like can have anidentification function by being provided with the RF tag 4000 of oneembodiment of the present invention, and the identification function canbe utilized to prevent counterfeiting. Moreover, the efficiency of asystem such as an inspection system can be improved by providing the RFtag of one embodiment of the present invention for packaging containers,recording media, personal belongings, foods, clothing, household goods,electronic devices, or the like. Vehicles can also have higher securityagainst theft or the like by being provided with the RF tag of oneembodiment of the present invention.

As described above, by using the RF tag of one embodiment of the presentinvention for each application described in this embodiment, power foroperation such as writing or reading of data can be reduced, whichresults in an increase in the maximum communication distance. Moreover,data can be held for an extremely long period even in the state wherepower is not supplied; thus, the RF tag can be preferably used forapplication in which data is not frequently written or read.

Note that this embodiment can be combined with any of the otherembodiments in this specification as appropriate.

(Supplementary Notes on the Description in this Specification and theLike)

The following are notes on the descriptions of the structures in theabove embodiments and structures in the embodiments.

<Notes on One Embodiment of the Present Invention Described inEmbodiments>

One embodiment of the present invention can be constituted byappropriately combining the structure described in an embodiment withany of the structures described in the other embodiments. In addition,in the case where a plurality of structure examples is given in oneembodiment, any of the structure examples can be combined asappropriate.

Note that what is described (or part thereof) in an embodiment can beapplied to, combined with, or replaced with another content (or partthereof) in the same embodiment and/or what is described (or partthereof) in another embodiment or other embodiments.

Note that in each embodiment, a content described in the embodiment is acontent described with reference to a variety of diagrams or a contentdescribed with a text described in this specification.

Note that by combining a diagram (or part thereof) illustrated in oneembodiment with another part of the diagram, a different diagram (orpart thereof) illustrated in the embodiment, and/or a diagram (or partthereof) illustrated in one or a plurality of different embodiments,much more diagrams can be formed.

<Notes on Ordinal Numbers>

In this specification and the like, ordinal numbers such as first,second, and third are used in order to avoid confusion among components.Thus, the terms do not limit the number or order of components. In thepresent specification and the like, a “first” component in oneembodiment can be referred to as a “second” component in otherembodiments or claims. Furthermore, in the present specification and thelike, a “first” component in one embodiment can be referred to withoutthe ordinal number in other embodiments or claims.

<Notes on the Description for Drawings>

Embodiments are described with reference to drawings. However, theembodiments can be implemented with various modes. It will be readilyappreciated by those skilled in the art that modes and details can bechanged in various ways without departing from the spirit and scope ofthe present invention. Thus, the present invention should not beinterpreted as being limited to the description of the embodiments. Notethat in the structures of the embodiments, the same portions or portionshaving similar functions are denoted by the same reference numerals indifferent drawings, and the description of such portions is notrepeated.

In this specification and the like, terms for explaining arrangement,such as over and under, are used for convenience to describe thepositional relation between components with reference to drawings.Furthermore, the positional relation between components is changed asappropriate in accordance with a direction in which the components aredescribed. Therefore, the terms for explaining arrangement are notlimited to those used in this specification and may be changed to otherterms as appropriate depending on the situation.

The term “over” or “under” does not necessarily mean that a component isplaced “directly above and in contact with” or “directly below and incontact with” another component. For example, the expression “electrodeB over insulating layer A” does not necessarily mean that the electrodeB is on and in direct contact with the insulating layer A and can meanthe case where another component is provided between the insulatinglayer A and the electrode B.

Furthermore, in a block diagram in this specification and the like,components are functionally classified and shown by blocks that areindependent from each other. However, in an actual circuit and the like,such components are sometimes hard to classify functionally, and thereis a case in which one circuit is concerned with a plurality offunctions or a case in which a plurality of circuits are concerned withone function. Therefore, the segmentation of a block in the blockdiagrams is not limited by any of the components described in thespecification, and can be differently determined as appropriatedepending on situations.

In drawings, the size, the layer thickness, or the region is determinedarbitrarily for description convenience. Therefore, embodiments of thepresent invention are not limited to such a scale. Note that thedrawings are schematically shown for clarity, and embodiments of thepresent invention are not limited to shapes or values shown in thedrawings. For example, the following can be included: variation insignal, voltage, or current due to noise or difference in timing.

In drawings such as plan views (also referred to as layout views) andperspective views, some of components might not be illustrated forclarity of the drawings.

In the drawings, the same components, components having similarfunctions, components formed of the same material, or components formedat the same time are denoted by the same reference numerals in somecases, and the description thereof is not repeated in some cases.

<Notes on Expressions that can be Rephrased>

In this specification and the like, in describing connections of atransistor, expressions “one of a source and a drain” (or a firstelectrode or a first terminal) and “the other of the source and thedrain” (or a second electrode or a second terminal) are used. This isbecause a source and a drain of a transistor are interchangeabledepending on the structure, operation conditions, or the like of thetransistor. Note that the source or the drain of the transistor can alsobe referred to as a source (or drain) terminal, a source (or drain)electrode, or the like as appropriate depending on the situation. Inthis specification and the like, two terminals except a gate aresometimes referred to as a first terminal and a second terminal or as athird terminal and a fourth terminal. In this specification and thelike, in the case where a transistor has two or more gates (such astructure is referred to as a dual-gate structure in some cases), thesegates are referred to as a first gate and a second gate or a front gateand a back gate in some cases. In particular, the term “front gate” canbe replaced with a simple term “gate.” Note that a “bottom gate” is aterminal that is formed before a channel formation region in manufactureof a transistor, and a “top gate” is a terminal that is formed after achannel formation region in manufacture of a transistor.

A transistor has three terminals: a gate, a source, and a drain. Thegate is a terminal which functions as a control terminal for controllingthe conducting/non-conducting state of the transistor. Functions ofinput/output terminals of the transistor depend on the type and thelevels of potentials applied to the terminals, and one of the twoterminals serves as a source and the other serves as a drain. Therefore,in this specification and the like, the terms “source” and “drain” canbe used to denote the drain and the source, respectively. In thisspecification and the like, the two terminals other than the gate mayalso be referred to as a first terminal and a second terminal, a thirdterminal and a fourth terminal, or the like.

In addition, in this specification and the like, the term such as an“electrode” or a “wiring” does not limit a function of a component. Forexample, an “electrode” is used as part of a “wiring” in some cases, andvice versa. Furthermore, the term “electrode” or “wiring” can also meana combination of a plurality of “electrodes” and “wirings” formed in anintegrated manner.

In this specification and the like, “voltage” and “potential” can bereplaced with each other. The term “voltage” refers to a potentialdifference from a reference potential. When the reference potential is aground potential, for example, “voltage” can be replaced with“potential.” The ground potential does not necessarily mean 0 V.Potentials are relative values, and the potential applied to a wiring orthe like is changed depending on the reference potential, in some cases.

In this specification and the like, the terms “film,” “layer,” and thelike can be interchanged with each other depending on the case orcircumstances. For example, the term “conductive layer” can be changedinto the term “conductive film” in some cases. Moreover, the term“insulating film” can be changed into the term “insulating layer” insome cases, or can be replaced with a word not including the term “film”or “layer.” For example, the term “conductive layer” or “conductivefilm” can be changed into the term “conductor” in some cases.Furthermore, for example, the term “insulating layer” or “insulatingfilm” can be changed into the term “insulator” in some cases.

In this specification and the like, the terms “wiring,” “signal line,”“power supply line,” and the like can be interchanged with each otherdepending on circumstances or conditions. For example, the term “wiring”can be changed into the term such as “signal line” or “power supplyline” in some cases. The term such as “signal line” or “power supplyline” can be changed into the term “wiring” in some cases. The term suchas “power supply line” can be changed into the term such as “signalline” in some cases. The term such as “signal line” can be changed intothe term such as “power supply line” in some cases. The term “potential”that is applied to a wiring can be changed into the term “signal” or thelike depending on circumstances or conditions. Inversely, the term“signal” or the like can be changed into the term “potential” in somecases.

<Notes on Definitions of Terms>

The following are definitions of the terms mentioned in the aboveembodiments.

<<Semiconductor>>

In this specification, a “semiconductor” may have the characteristics ofan “insulator” in some cases when the conductivity is sufficiently low,for example. Further, a “semiconductor” and an “insulator” cannot bestrictly distinguished from each other in some cases because a borderbetween the “semiconductor” and the “insulator” is not clear.Accordingly, a “semiconductor” in this specification can be called an“insulator” in some cases. Similarly, an “insulator” in thisspecification can be called a “semiconductor” in some cases.

Furthermore, a “semiconductor” includes the characteristics of a“conductor” in some cases when the conductivity is sufficiently high,for example. Furthermore, a “semiconductor” and a “conductor” cannot bestrictly distinguished from each other in some cases because a borderbetween the “semiconductor” and the “conductor” is not clear.Accordingly, a “semiconductor” in this specification can be called a“conductor” in some cases. Similarly, a “conductor” in thisspecification can be called a “semiconductor” in some cases.

Note that an impurity in a semiconductor refers to, for example,elements other than the main components of a semiconductor layer. Forexample, an element with a concentration of lower than 0.1 atomic % isan impurity. When an impurity is contained, the density of states (DOS)may be formed in a semiconductor, the carrier mobility may be decreased,or the crystallinity may be decreased, for example. In the case wherethe semiconductor is an oxide semiconductor, examples of an impuritywhich changes the characteristics of the semiconductor include Group 1elements, Group 2 elements, Group 13 elements, Group 14 elements, Group15 elements, and transition metals other than the main components;specific examples are hydrogen (included in water), lithium, sodium,silicon, boron, phosphorus, carbon, and nitrogen.

In the case of an oxide semiconductor, oxygen vacancies may be formed byentry of impurities such as hydrogen. Furthermore, when thesemiconductor is a silicon layer, examples of an impurity which changesthe characteristics of the semiconductor include oxygen, Group 1elements except hydrogen, Group 2 elements, Group 13elements, and Group15 elements.

<<Transistor>>

In this specification, a transistor is an element having at least threeterminals of a gate, a drain, and a source. The transistor includes achannel formation region between the drain (a drain terminal, a drainregion, or a drain electrode) and the source (a source terminal, asource region, or a source electrode) and current can flow through thedrain, the channel formation region, and the source. Note that in thisspecification and the like, a channel formation region refers to aregion through which current mainly flows.

Furthermore, functions of a source and a drain might be switched whentransistors having different polarities are employed or a direction ofcurrent flow is changed in circuit operation, for example. Therefore,the terms “source” and “drain” can be switched in this specification andthe like.

<<Switch>>

In this specification and the like, a switch is in a conducting state(on state) or in a non-conducting state (off state) to determine whethercurrent flows therethrough or not. Alternatively, a switch has afunction of selecting and changing a current path.

For example, an electrical switch, a mechanical switch, or the like canbe used as a switch. That is, any element can be used as a switch aslong as it can control current, without limitation to a certain element.

Examples of the electrical switch are a transistor (e.g., a bipolartransistor or a MOS transistor), a diode (e.g., a PN diode, a PIN diode,a Schottky diode, a metal-insulator-metal (MIM) diode, ametal-insulator-semiconductor (MIS) diode, or a diode-connectedtransistor), and a logic circuit in which such elements are combined.

In the case of using a transistor as a switch, a “conducting state” ofthe transistor refers to a state in which a source electrode and a drainelectrode of the transistor are electrically short-circuited.Furthermore, a “non-conducting state” of the transistor refers to astate in which the source electrode and the drain electrode of thetransistor are electrically disconnected. In the case where a transistoroperates just as a switch, the polarity (conductivity type) of thetransistor is not particularly limited to a certain type.

An example of a mechanical switch is a switch formed using a technologyof micro electro mechanical systems (MEMS), such as a digitalmicromirror device (DMD). Such a switch includes an electrode which canbe moved mechanically, and operates by controlling conduction andnon-conduction in accordance with movement of the electrode.

<<Channel Length>>

In this specification and the like, the channel length refers to, forexample, the distance between a source (source region or sourceelectrode) and a drain (drain region or drain electrode) in a regionwhere a semiconductor (or a portion where current flows in asemiconductor when a transistor is on) and a gate electrode overlap witheach other or a region where a channel is formed in a top view of thetransistor.

In one transistor, channel lengths in all regions are not necessarilythe same. In other words, the channel length of one transistor is notlimited to one value in some cases. Therefore, in this specification,the channel length is any one of values, the maximum value, the minimumvalue, or the average value, in a region where a channel is formed.

<<Channel Width>>

In this specification and the like, the channel width refers to, forexample, the length of a portion where a source and a drain face eachother in a region where a semiconductor (or a portion where a currentflows in a semiconductor when a transistor is on) and a gate electrodeoverlap with each other, or a region where a channel is formed in a topview of the transistor.

In one transistor, channel widths in all regions do not necessarily havethe same value. In other words, a channel width of one transistor is notfixed to one value in some cases. Therefore, in this specification, thechannel width is any one of values, the maximum value, the minimumvalue, or the average value, in a region where a channel is formed.

Note that depending on transistor structures, a channel width in aregion where a channel is formed actually (hereinafter referred to as aneffective channel width) is different from a channel width shown in atop view of a transistor (hereinafter referred to as an apparent channelwidth) in some cases. For example, in a transistor having athree-dimensional structure, an effective channel width is greater thanan apparent channel width shown in a top view of the transistor, and itsinfluence cannot be ignored in some cases. For example, in aminiaturized transistor having a three-dimensional structure, theproportion of a channel region formed in a side surface of asemiconductor is high in some cases. In that case, an effective channelwidth obtained when a channel is actually formed is greater than anapparent channel width shown in the top view.

In a transistor having a three-dimensional structure, an effectivechannel width is difficult to measure in some cases. For example, toestimate an effective channel width from a design value, it is necessaryto assume that a semiconductor has a known shape. Therefore, in the casewhere the shape of a semiconductor is unclear, it is difficult tomeasure an effective channel width accurately.

Therefore, in this specification, in a top view of a transistor, anapparent channel width that is a length of a portion where a source anda drain face each other in a region where a semiconductor and a gateelectrode overlap with each other is referred to as a surrounded channelwidth (SCW) in some cases. Furthermore, in this specification, in thecase where the term “channel width” is simply used, it may represent asurrounded channel width or an apparent channel width. Alternatively, inthis specification, in the case where the term “channel width” is simplyused, it may represent an effective channel width in some cases. Notethat the values of a channel length, a channel width, an effectivechannel width, an apparent channel width, a surrounded channel width,and the like can be determined by obtaining and analyzing across-sectional TEM image and the like.

Note that in the case where field-effect mobility, a current value perchannel width, and the like of a transistor are obtained by calculation,a surrounded channel width may be used for the calculation. In thatcase, a value different from one in the case where an effective channelwidth is used for the calculation is obtained in some cases.

<<High-level Potential and Low-level Potential>>

In this specification, when there is a description saying that ahigh-level potential is applied to a wiring, the high-level potentialsometimes means at least one of the following potentials: a potentialhigh enough to turn on an n-channel transistor with a gate connected tothe wiring; and a potential high enough to turn off a p-channeltransistor with a gate connected to the wiring. Thus, when high-levelpotentials are applied to different two or more wirings, the high-levelpotentials applied to the wirings may be at different levels.

In this specification, when there is a description saying that alow-level potential is applied to a wiring, the low-level potentialsometimes means at least one of the following potentials: a potentiallow enough to turn off an n-channel transistor with a gate connected tothe wiring; and a potential low enough to turn on a p-channel transistorwith a gate connected to the wiring. Thus, when low-level potentials areapplied to different two or more wirings, the low-level potentialsapplied to the wirings may be at different levels.

<<Connection>>

In this specification and the like, when it is described that X and Yare connected, the case where X and Y are electrically connected, thecase where X and Y are functionally connected, and the case where X andY are directly connected are included therein. Accordingly, a connectionrelation other than the predetermined connection relation, for example,a connection relation other than that shown in drawings and texts, isalso allowed.

Here, X, Y, and the like each denote an object (e.g., a device, anelement, a circuit, a wiring, an electrode, a terminal, a conductivefilm, a layer, or the like).

For example, in the case where X and Y are electrically connected, oneor more elements that enable electrical connection between X and Y(e.g., a switch, a transistor, a capacitor, an inductor, a resistor, adiode, a display element, a light-emitting element, or a load) can beconnected between X and Y. Note that the switch is controlled to beturned on or off. That is, a switch is conducting or not conducting (isturned on or off) to determine whether current flows therethrough ornot.

For example, in the case where X and Y are functionally connected, oneor more circuits that enable functional connection between X and Y(e.g., a logic circuit such as an inverter, a NAND circuit, or a NORcircuit; a signal converter circuit such as a D/A converter circuit, anA/D converter circuit, or a gamma correction circuit; a potential levelconverter circuit such as a power supply circuit (e.g., a step-upcircuit or a step-down circuit) or a level shifter circuit for changingthe potential level of a signal; a voltage source; a current source; aswitching circuit; an amplifier circuit such as a circuit that canincrease signal amplitude, the amount of current, or the like, anoperational amplifier, a differential amplifier circuit, a sourcefollower circuit, and a buffer circuit; a signal generation circuit; amemory circuit; or a control circuit) can be connected between X and Y.Note that, for example, in the case where a signal output from X istransmitted to Y even when another circuit is interposed between X andY, X and Y are functionally connected.

Note that when it is explicitly described that X and Y are electricallyconnected, the case where X and Y are electrically connected (i.e., thecase where X and Y are connected with another element or another circuitprovided therebetween), the case where X and Y are functionallyconnected (i.e., the case where X and Y are functionally connected withanother circuit provided therebetween), and the case where X and Y aredirectly connected (i.e., the case where X and Y are connected withoutanother element or another circuit provided therebetween) are includedtherein. That is, when it is explicitly described that “X and Y areelectrically connected,” the description is the same as the case whereit is explicitly only described that “X and Y are connected.”

Note that, for example, the case where a source (or a first terminal orthe like) of a transistor is electrically connected to X through (or notthrough) Z1 and a drain (or a second terminal or the like) of thetransistor is electrically connected to Y through (or not through) Z2,or the case where a source (or a first terminal or the like) of atransistor is directly connected to one part of Z1 and another part ofZ1 is directly connected to X while a drain (or a second terminal or thelike) of the transistor is directly connected to one part of Z2 andanother part of Z2 is directly connected to Y, can be expressed by usingany of the following expressions.

The expressions include, for example, “X Y, a source (or a firstterminal or the like) of a transistor, and a drain (or a second terminalor the like) of the transistor are electrically connected to each other,and X, the source (or the first terminal or the like) of the transistor,the drain (or the second terminal or the like) of the transistor, and Yare electrically connected to each other in this order,” “a source (or afirst terminal or the like) of a transistor is electrically connected toX, a drain (or a second terminal or the like) of the transistor iselectrically connected to Y, and X, the source (or the first terminal orthe like) of the transistor, the drain (or the second terminal or thelike) of the transistor, and Y are electrically connected to each otherin this order,” and “X is electrically connected to Y through a source(or a first terminal or the like) and a drain (or a second terminal orthe like) of a transistor, and X, the source (or the first terminal orthe like) of the transistor, the drain (or the second terminal or thelike) of the transistor, and Y are provided to be connected in thisorder.” When the connection order in a circuit configuration is definedby an expression similar to the above examples, a source (or a firstterminal or the like) and a drain (or a second terminal or the like) ofa transistor can be distinguished from each other to specify thetechnical scope. Note that these expressions are examples and there isno limitation on the expressions. Here, X, Y, Z1, and Z2 each denote anobject (e.g., a device, an element, a circuit, a wiring, an electrode, aterminal, a conductive film, and a layer).

Even when independent components are electrically connected to eachother in a circuit diagram, one component has functions of a pluralityof components in some cases. For example, when part of a wiring alsofunctions as an electrode, one conductive film functions as the wiringand the electrode. Thus, “electrical connection” in this specificationincludes in its category such a case where one conductive film hasfunctions of a plurality of components.

<<Parallel and Perpendicular>>

In this specification, the term “parallel” indicates that the angleformed between two straight lines is greater than or equal to −10° andless than or equal to 10°, and accordingly also includes the case wherethe angle is greater than or equal to −5° and less than or equal to 5°.In addition, the term “substantially parallel” indicates that the angleformed between two straight lines is greater than or equal to −30° andless than or equal to 30°. The term “perpendicular” indicates that theangle formed between two straight lines is greater than or equal to 80°and less than or equal to 100°, and accordingly also includes the casewhere the angle is greater than or equal to 85° and less than or equalto 95°. The term “substantially perpendicular” indicates that the angleformed between two straight lines is greater than or equal to 60° andless than or equal to 120°.

<<Trigonal and Rhombohedral>>

In this specification, trigonal and rhombohedral crystal systems areincluded in a hexagonal crystal system.

This application is based on Japanese Patent Application serial no.2015-233147 filed with Japan Patent Office on Nov. 30, 2015, the entirecontents of which are hereby incorporated by reference.

What is claimed is:
 1. A signal processing circuit comprising: a firstcircuit; a second circuit; a first wiring; a second wiring; a thirdwiring; a fourth wiring; a fifth wiring; and a sixth wiring, wherein thefirst circuit comprises a first terminal, a second terminal, a thirdterminal, a first transistor, and a second transistor, wherein thesecond circuit comprises a fourth terminal, a fifth terminal, a sixthterminal, a third transistor, and a fourth transistor, wherein each ofthe first transistor, the second transistor, the third transistor, andthe fourth transistor comprises a first gate and a second gate, whereinone of a source and a drain of the first transistor is electricallyconnected to the first terminal, wherein one of a source and a drain ofthe second transistor is electrically connected to the second terminal,wherein the other of the source and the drain of the first transistor iselectrically connected to the third terminal, wherein the other of thesource and the drain of the second transistor is electrically connectedto the third terminal, wherein the first gate of the first transistor iselectrically connected to the first wiring, wherein the first gate ofthe second transistor is electrically connected to the second wiring,wherein the second gate of the first transistor is electricallyconnected to the third wiring, wherein the second gate of the secondtransistor is electrically connected to the fourth wiring, wherein oneof a source and a drain of the third transistor is electricallyconnected to the fourth terminal, wherein one of a source and a drain ofthe fourth transistor is electrically connected to the fifth terminal,wherein the other of the source and the drain of the third transistor iselectrically connected to the sixth terminal, wherein the other of thesource and the drain of the fourth transistor is electrically connectedto the sixth terminal, wherein the first gate of the third transistor iselectrically connected to the fifth wiring, wherein the first gate ofthe fourth transistor is electrically connected to the sixth wiring,wherein the second gate of the third transistor is electricallyconnected to the fifth wiring, wherein the second gate of the fourthtransistor is electrically connected to the sixth wiring, wherein thesixth terminal is electrically connected to one of the first terminaland the second terminal, wherein an inverted signal of a signal input tothe second wiring is input to the first wiring, and wherein an invertedsignal of a signal input to the sixth wiring is input to the fifthwiring.
 2. The signal processing circuit according to claim 1, whereinthe first transistor, the second transistor, the third transistor, andthe fourth transistor comprise an oxide containing at least one ofindium, an element M, and zinc in channel formation regions, and whereinthe element M is aluminum, gallium, yttrium, or tin.
 3. The signalprocessing circuit according to claim 1, wherein each of the firsttransistor and the second transistor the third transistor, and thefourth transistor has a dual-gate structure.
 4. The signal processingcircuit according to claim 1, wherein a potential for changing athreshold voltage of the first transistor is applied to the thirdwiring, and wherein a potential for changing a threshold voltage of thesecond transistor is applied to the fourth wiring.
 5. A display devicecomprising: a driver circuit portion comprising the signal processingcircuit according to claim 1; and a display element operationallyconnected to the driver circuit portion.
 6. An image sensor comprising:a pixel block comprising a photoelectric conversion element; and adriver circuit comprising the signal processing circuit according toclaim 1, wherein the driver circuit is configured to drive the pixelblock.
 7. A memory device comprising: a controller chip; and a memorychip comprising: a memory cell array; a driver circuit; and a decodercomprising the signal processing circuit according to claim
 1. 8. Thememory device according to claim 7, wherein a transistor included in thedriver circuit comprises an oxide containing at least one of indium, anelement M and zinc in channel formation regions, and wherein the elementM is aluminum, gallium, yttrium, or tin.
 9. A signal processing circuitcomprising: a circuit; a first wiring; a second wiring; a third wiring;and a fourth wiring, wherein the circuit comprises a first terminal, asecond terminal, a third terminal, a first transistor, and a secondtransistor, wherein each of the first transistor and the secondtransistor comprises a first gate and a second gate, wherein one of asource and a drain of the first transistor is electrically connected tothe first terminal, wherein one of a source and a drain of the secondtransistor is electrically connected to the second terminal, wherein theother of the source and the drain of the first transistor iselectrically connected to the third terminal, wherein the other of thesource and the drain of the second transistor is electrically connectedto the third terminal, wherein the first gate of the first transistor iselectrically connected to the first wiring, wherein the first gate ofthe second transistor is electrically connected to the second wiring,wherein the second gate of the first transistor is electricallyconnected to the third wiring, wherein the second gate of the secondtransistor is electrically connected to the fourth wiring, wherein aninverted signal of a signal input to the second wiring is input to thefirst wiring, wherein a potential for changing a threshold voltage ofthe first transistor is applied to the third wiring, and wherein apotential for changing a threshold voltage of the second transistor isapplied to the fourth wiring.
 10. The signal processing circuitaccording to claim 9, wherein each of the first transistor and thesecond transistor has a dual-gate structure.
 11. The signal processingcircuit according to claim 9, wherein the first transistor and thesecond transistor comprise an oxide containing at least one of indium,an element M and zinc in channel formation regions, and wherein theelement M is aluminum, gallium, yttrium, or tin.
 12. A display devicecomprising: a driver circuit portion comprising the signal processingcircuit according to claim 9; and a display element operationallyconnected to the driver circuit portion.
 13. An image sensor comprising:a pixel block comprising a photoelectric conversion element; and adriver circuit comprising the signal processing circuit according toclaim 9, wherein the driver circuit is configured to drive the pixelblock.
 14. A memory device comprising: a controller chip; and a memorychip comprising: a memory cell array; a driver circuit; and a decodercomprising the signal processing circuit according to claim
 9. 15. Thememory device according to claim 14, wherein a transistor included inthe driver circuit comprises an oxide containing at least one of indium,an element M and zinc in channel formation regions, and wherein theelement M is aluminum, gallium, yttrium, or tin.
 16. A signal processingcircuit comprising: a first circuit; and a second circuit; wherein eachof the first circuit and the second circuit comprises: a first terminal;a second terminal; a third terminal; a first transistor; and a secondtransistor, wherein one of a source and a drain of the first transistoris electrically connected to the first terminal, wherein one of a sourceand a drain of the second transistor is electrically connected to thesecond terminal, wherein the other of the source and the drain of thefirst transistor is electrically connected to the third terminal,wherein the other of the source and the drain of the second transistoris electrically connected to the third terminal, wherein each of thefirst transistor and the second transistor comprises: a first gate; anda second gate, wherein the first gate of the first transistor iselectrically connected to the second gate of the first transistor,wherein the first gate of the second transistor is electricallyconnected to the second gate of the second transistor, wherein the thirdterminal of the second circuit is electrically connected to the firstterminal of the first circuit or the second terminal of the firstcircuit.
 17. The signal processing circuit according to claim 16,wherein each of the first transistor and the second transistor has adual-gate structure.
 18. The signal processing circuit according toclaim 16, wherein the first transistor and the second transistorcomprise an oxide containing at least one of indium, an element M, andzinc in channel formation regions, and wherein the element M isaluminum, gallium, yttrium, or tin.
 19. A display device comprising: adriver circuit portion comprising the signal processing circuitaccording to claim 16; and a display element operationally connected tothe driver circuit portion.
 20. An image sensor comprising: a pixelblock comprising a photoelectric conversion element; and a drivercircuit comprising the signal processing circuit according to claim 16,wherein the driver circuit is configured to drive the pixel block.
 21. Amemory device comprising: a controller chip; and a memory chipcomprising: a memory cell array; a driver circuit; and a decodercomprising the signal processing circuit according to claim
 16. 22. Thememory device according to claim 21, wherein a transistor included inthe driver circuit comprises an oxide containing at least one of indium,an element M, and zinc in channel formation regions, and wherein theelement M is aluminum, gallium, yttrium, or tin.